SG55109A1 - Lighting apparatus - Google Patents

Lighting apparatus

Info

Publication number
SG55109A1
SG55109A1 SG1996006435A SG1996006435A SG55109A1 SG 55109 A1 SG55109 A1 SG 55109A1 SG 1996006435 A SG1996006435 A SG 1996006435A SG 1996006435 A SG1996006435 A SG 1996006435A SG 55109 A1 SG55109 A1 SG 55109A1
Authority
SG
Singapore
Prior art keywords
lighting apparatus
lighting
Prior art date
Application number
SG1996006435A
Other languages
English (en)
Inventor
Shuji Kurokawa
Kenji Kobayashi
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of SG55109A1 publication Critical patent/SG55109A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Image Input (AREA)
  • Stroboscope Apparatuses (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
SG1996006435A 1995-03-31 1996-03-27 Lighting apparatus SG55109A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10040095 1995-03-31

Publications (1)

Publication Number Publication Date
SG55109A1 true SG55109A1 (en) 1998-12-21

Family

ID=14272941

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996006435A SG55109A1 (en) 1995-03-31 1996-03-27 Lighting apparatus

Country Status (7)

Country Link
US (2) US5923020A (zh)
EP (1) EP0735361B1 (zh)
KR (1) KR100388186B1 (zh)
DE (1) DE69636183T2 (zh)
MY (1) MY116648A (zh)
SG (1) SG55109A1 (zh)
TW (1) TW313626B (zh)

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JPH11183389A (ja) * 1997-12-18 1999-07-09 Lintec Corp 観測装置
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US6557764B1 (en) * 1999-08-12 2003-05-06 Hewlett-Packard Development Company, L.P. Method and apparatus for illumination control to increase the manufacturing yield for a bar code and position reference reader in a mass storage auto-changer
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WO2003102562A1 (fr) * 2002-05-31 2003-12-11 Olympus Corporation Dispositif de macro-illumination
US20050122509A1 (en) * 2002-07-18 2005-06-09 Leica Microsystems Semiconductor Gmbh Apparatus for wafer inspection
US9536124B1 (en) 2003-10-24 2017-01-03 Cognex Corporation Integrated illumination assembly for symbology reader
US7874487B2 (en) 2005-10-24 2011-01-25 Cognex Technology And Investment Corporation Integrated illumination assembly for symbology reader
US7823783B2 (en) 2003-10-24 2010-11-02 Cognex Technology And Investment Corporation Light pipe illumination system and method
US7823789B2 (en) 2004-12-21 2010-11-02 Cognex Technology And Investment Corporation Low profile illumination for direct part mark readers
US7604174B2 (en) 2003-10-24 2009-10-20 Cognex Technology And Investment Corporation Method and apparatus for providing omnidirectional lighting in a scanning device
US9070031B2 (en) 2003-10-24 2015-06-30 Cognex Technology And Investment Llc Integrated illumination assembly for symbology reader
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US7086756B2 (en) * 2004-03-18 2006-08-08 Lighting Science Group Corporation Lighting element using electronically activated light emitting elements and method of making same
US7824065B2 (en) * 2004-03-18 2010-11-02 Lighting Science Group Corporation System and method for providing multi-functional lighting using high-efficiency lighting elements in an environment
US7215086B2 (en) * 2004-04-23 2007-05-08 Lighting Science Group Corporation Electronic light generating element light bulb
US7367692B2 (en) * 2004-04-30 2008-05-06 Lighting Science Group Corporation Light bulb having surfaces for reflecting light produced by electronic light generating sources
US7319293B2 (en) * 2004-04-30 2008-01-15 Lighting Science Group Corporation Light bulb having wide angle light dispersion using crystalline material
US9292724B1 (en) 2004-12-16 2016-03-22 Cognex Corporation Hand held symbology reader illumination diffuser with aimer optics
US7617984B2 (en) 2004-12-16 2009-11-17 Cognex Technology And Investment Corporation Hand held symbology reader illumination diffuser
US20070125863A1 (en) * 2005-12-05 2007-06-07 Jakoboski Timothy A System and method for employing infrared illumination for machine vision
DE102005061834B4 (de) * 2005-12-23 2007-11-08 Ioss Intelligente Optische Sensoren & Systeme Gmbh Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche
JP2008014697A (ja) * 2006-07-04 2008-01-24 Nikon Corp 表面検査装置
JP4306741B2 (ja) * 2006-07-20 2009-08-05 株式会社デンソーウェーブ 光学情報読取装置
JP4307470B2 (ja) * 2006-08-08 2009-08-05 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料加工方法及び半導体検査装置
US7766526B2 (en) * 2006-09-13 2010-08-03 Isky Panel Systems, Inc. Illumination system
US8134124B2 (en) 2006-10-20 2012-03-13 Fei Company Method for creating S/tem sample and sample structure
JP5266236B2 (ja) 2006-10-20 2013-08-21 エフ・イ−・アイ・カンパニー サンプル抽出および取り扱いのための方法および装置
KR100867520B1 (ko) * 2007-04-23 2008-11-07 삼성전기주식회사 결상 렌즈 및 그 제조 방법
FR2931295B1 (fr) * 2008-05-13 2010-08-20 Altatech Semiconductor Dispositif et procede d'inspection de plaquettes semi-conductrices
KR20100002829A (ko) * 2008-06-30 2010-01-07 삼성테크윈 주식회사 실물 화상기용 조명 장치 및 이를 구비하는 실물 화상기
HUP0900142A2 (en) * 2009-03-06 2010-10-28 3Dhistech Kft Method and arrangement for dark-field and bright-field digitalization of sample with or without visible dyestuft in transmitted light
JP2011095070A (ja) * 2009-10-29 2011-05-12 Hst Vision Corp 照明装置および照明システム
JP5698763B2 (ja) * 2010-01-15 2015-04-08 コーニンクレッカ フィリップス エヌ ヴェ 局所的な照明寄与の２ｄ検出のための方法及びシステム
US9146156B2 (en) * 2011-06-29 2015-09-29 Kla-Tencor Corporation Light source tracking in optical metrology system
DE102011052802B4 (de) * 2011-08-18 2014-03-13 Sick Ag 3D-Kamera und Verfahren zur Überwachung eines Raumbereichs
US8901831B2 (en) 2012-05-07 2014-12-02 Lighting Science Group Corporation Constant current pulse-width modulation lighting system and associated methods
JP6205780B2 (ja) * 2013-03-27 2017-10-04 凸版印刷株式会社 照明装置及び検査装置
KR101405227B1 (ko) * 2013-04-02 2014-06-10 현대자동차 주식회사 컨베이어 라인의 속도측정장치
US9464788B2 (en) * 2013-08-16 2016-10-11 Lighting Science Group Corporation Method of assembling a lighting device with flexible circuits having light-emitting diodes positioned thereon
US9557015B2 (en) 2013-08-16 2017-01-31 Lighting Science Group Corporation Lighting device with flexible circuits having light-emitting diodes positioned thereupon and associated methods
DE102013216774A1 (de) * 2013-08-23 2015-02-26 Robert Bosch Gmbh Projektorvorrichtung, Überwachungsvorrichtung, Verfahren mit der Überwachungsvorrichtung sowie Computerprogramm
DE202013104836U1 (de) 2013-10-29 2014-01-30 Foseco International Limited Speiseraufbau
CN106537110A (zh) * 2014-05-15 2017-03-22 伊麦视觉私人有限公司 用于检查眼镜镜片的系统和方法
JP5866586B1 (ja) * 2015-09-22 2016-02-17 マシンビジョンライティング株式会社 検査用照明装置及び検査システム
US10210625B2 (en) * 2015-10-30 2019-02-19 Industrial Technology Research Institute Measurement system comprising angle adjustment module
US10509931B1 (en) 2018-07-03 2019-12-17 Hand Held Products, Inc. Methods, systems, and apparatuses for scanning and decoding direct part marking indicia

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US4585315A (en) * 1984-11-13 1986-04-29 International Business Machines Corporation Brightfield/darkfield microscope illuminator
JPS6211133A (ja) * 1985-06-24 1987-01-20 Hitachi Electronics Eng Co Ltd 表面検査装置
JPS63256841A (ja) * 1987-04-14 1988-10-24 Hitachi Ltd 透過照明方法
US4805175A (en) * 1987-12-03 1989-02-14 Metrologic Instrumetns, Inc. Ultra-compact, hand-held laser scanner
DE3905481C2 (de) * 1988-02-23 2003-01-09 Sony Corp Verfahren und Vorrichtung für optischen Datenverkehr
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US5280161A (en) * 1988-11-18 1994-01-18 West Electric Company, Ltd. Apparatus for optically reading a bar code
US4893223A (en) * 1989-01-10 1990-01-09 Northern Telecom Limited Illumination devices for inspection systems
US5077640A (en) * 1990-08-13 1991-12-31 Butler Jr C Tyler Photographic lighting apparatus
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JPH06317532A (ja) * 1993-04-30 1994-11-15 Kazumi Haga 検査装置
US5463213A (en) * 1994-05-03 1995-10-31 Honda; Takafaru Code mark reader
EP0735361B1 (en) * 1995-03-31 2006-05-31 LINTEC Corporation Apparatus for inspecting semiconductor substrates

Also Published As

Publication number Publication date
EP0735361B1 (en) 2006-05-31
US6286969B1 (en) 2001-09-11
TW313626B (zh) 1997-08-21
EP0735361A3 (en) 1998-06-10
MY116648A (en) 2004-03-31
KR100388186B1 (ko) 2003-09-19
DE69636183T2 (de) 2007-03-29
DE69636183D1 (de) 2006-07-06
EP0735361A2 (en) 1996-10-02
KR960035949A (ko) 1996-10-28
US5923020A (en) 1999-07-13

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