SG52251A1 - Method and arrangement for the response analysis of semiconductor materials with optical excitation - Google Patents

Method and arrangement for the response analysis of semiconductor materials with optical excitation

Info

Publication number
SG52251A1
SG52251A1 SG1996001383A SG1996001383A SG52251A1 SG 52251 A1 SG52251 A1 SG 52251A1 SG 1996001383 A SG1996001383 A SG 1996001383A SG 1996001383 A SG1996001383 A SG 1996001383A SG 52251 A1 SG52251 A1 SG 52251A1
Authority
SG
Singapore
Prior art keywords
arrangement
semiconductor materials
optical excitation
response analysis
analysis
Prior art date
Application number
SG1996001383A
Other languages
English (en)
Inventor
Hans-Dieter Geiler
Matthias Wagner
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Publication of SG52251A1 publication Critical patent/SG52251A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
SG1996001383A 1995-03-31 1996-02-13 Method and arrangement for the response analysis of semiconductor materials with optical excitation SG52251A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19511869A DE19511869B4 (de) 1995-03-31 1995-03-31 Verfahren und Anordnung zur Responseanalyse von Halbleitermaterialien mit optischer Anregung

Publications (1)

Publication Number Publication Date
SG52251A1 true SG52251A1 (en) 1998-09-28

Family

ID=7758282

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996001383A SG52251A1 (en) 1995-03-31 1996-02-13 Method and arrangement for the response analysis of semiconductor materials with optical excitation

Country Status (8)

Country Link
US (1) US6081127A (fr)
EP (1) EP0735378A3 (fr)
JP (1) JP3103761B2 (fr)
KR (1) KR960035045A (fr)
CN (1) CN1097728C (fr)
DE (1) DE19511869B4 (fr)
SG (1) SG52251A1 (fr)
TW (1) TW303423B (fr)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3009551U (ja) * 1994-09-28 1995-04-04 株式会社アークス レシート用ロール紙
US6151119A (en) * 1997-12-19 2000-11-21 Advanced Micro Devices Apparatus and method for determining depth profile characteristics of a dopant material in a semiconductor device
KR100253099B1 (ko) * 1997-12-26 2000-04-15 윤종용 광열 기술을 이용한 이온 주입 샘플의 평가 방법 및 그를 위한프로그램을 저장한 기록매체
RU2195653C2 (ru) * 1998-06-12 2002-12-27 Асахи Касеи Кабусики Кайся Анализатор
DE19827202A1 (de) * 1998-06-18 1999-12-23 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zur zerstörungsfreien Erkennung von Kristalldefektten
DE19837889C1 (de) * 1998-08-20 2000-12-21 Siemens Ag Thermowellen-Meßverfahren
US6529018B1 (en) * 1998-08-28 2003-03-04 International Business Machines Corporation Method for monitoring defects in polysilicon gates in semiconductor devices responsive to illumination by incident light
DE19840197A1 (de) * 1998-09-03 2000-03-09 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zur Qualitätskontrolle sowie zur Prozeßsteuerung ind er Siliziumwaferfertigung
US6541987B1 (en) * 1999-08-30 2003-04-01 Advanced Micro Devices, Inc. Laser-excited detection of defective semiconductor device
JP4970640B2 (ja) * 2000-05-19 2012-07-11 ルネサスエレクトロニクス株式会社 スクリーニング方法、スクリーニング装置及び記録媒体
EP1311825B1 (fr) * 2000-06-29 2006-10-18 Semiconductor Diagnostics, Inc. Procede de determination rapide et precise de la longueur de diffusion d'un porteur minoritaire a partir de phototensions superficielles mesurees simultanement
DE10059469C2 (de) * 2000-11-30 2002-02-21 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zum Erkennen von Kristallbaufehlern in Siliciumeinkristallen
DE10221937A1 (de) * 2002-05-17 2003-12-04 Uwe Hermes Verfahren und Vorrichtung zur Messung der Diffusionslänge von Minoritätsladungsträgern in einer zu messenden Halbleiterprobe
US7106446B2 (en) * 2002-06-21 2006-09-12 Therma-Wave, Inc. Modulated reflectance measurement system with multiple wavelengths
US7075058B2 (en) * 2003-03-28 2006-07-11 The United States Of America As Represented By The United States Department Of Energy Photothermal imaging scanning microscopy
US7280215B2 (en) * 2003-09-24 2007-10-09 Therma-Wave, Inc. Photothermal system with spectroscopic pump and probe
US7072029B2 (en) * 2004-05-21 2006-07-04 Lucent Technologies Inc. Method and apparatus for testing optical fiber cables
KR20080073179A (ko) * 2007-02-05 2008-08-08 삼성전자주식회사 다층구조체의 결함검사장치
US7755752B1 (en) 2008-04-07 2010-07-13 Kla-Tencor Corporation Combined modulated optical reflectance and photoreflectance system
JP5699421B2 (ja) * 2008-09-16 2015-04-08 横河電機株式会社 顕微鏡装置
CN102272584A (zh) * 2009-01-22 2011-12-07 三井造船株式会社 荧光检测装置及荧光检测方法
WO2010092752A1 (fr) * 2009-02-10 2010-08-19 三井造船株式会社 Dispositif de détection de fluorescence et procédé de détection de fluorescence
US9209096B2 (en) 2010-07-30 2015-12-08 First Solar, Inc Photoluminescence measurement
WO2012174125A1 (fr) * 2011-06-13 2012-12-20 President And Fellows Of Harvard College Détection de fluorescence efficace dans des systèmes de spins à l'état solide
US8604447B2 (en) * 2011-07-27 2013-12-10 Kla-Tencor Corporation Solar metrology methods and apparatus
DE102011055272B4 (de) 2011-11-11 2021-08-12 Presens Precision Sensing Gmbh Verfahren zur Bestimmung eines relaxationszeitabhängigen Parameters zu einem System
US9618563B2 (en) 2013-02-01 2017-04-11 Hamamatsu Photonics K.K. Semiconductor device inspection device and semiconductor device inspection method
CN103712960B (zh) * 2013-12-26 2016-01-13 无锡利弗莫尔仪器有限公司 一种采用级联锁相检测的光热检测装置及其检测方法
JP6395206B2 (ja) * 2014-03-25 2018-09-26 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および検査方法
JP6395213B2 (ja) * 2014-09-26 2018-09-26 株式会社Ｓｃｒｅｅｎホールディングス 改質処理装置および改質処理方法
JP6397318B2 (ja) * 2014-11-26 2018-09-26 浜松ホトニクス株式会社 電場ベクトル検出方法及び電場ベクトル検出装置
KR101699592B1 (ko) * 2014-12-29 2017-01-24 정진주 조립식 의자 및 이를 이용한 증강현실 시스템
US9927363B2 (en) * 2015-03-24 2018-03-27 Arizona Board Of Regents On Behalf Of Arizona State University Real-time baseline correction technique for infrared time-resolved photoluminescence
CN204789902U (zh) * 2015-07-03 2015-11-18 中国科学院物理研究所 一种用于检测半导体器件的电荷及电场响应的系统
CN105203305A (zh) * 2015-11-03 2015-12-30 山东华光光电子有限公司 一种半导体激光器无损波长分类筛选方法
CN109750450B (zh) * 2017-11-01 2022-03-04 青岛海尔智能技术研发有限公司 一种识别衣物材质的智能模块及智能洗衣机
FR3073944B1 (fr) * 2017-11-21 2019-12-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode de mesure par photoluminescence d'un echantillon
CN114235764A (zh) * 2021-12-07 2022-03-25 电子科技大学 一种半导体晶圆载流子表面复合速率的定量成像表征方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4122383A (en) * 1977-12-16 1978-10-24 Nasa Method and apparatus for measuring minority carrier lifetimes and bulk diffusion length in P-N junction solar cells
US4579463A (en) * 1984-05-21 1986-04-01 Therma-Wave Partners Detecting thermal waves to evaluate thermal parameters
US4661770A (en) * 1984-12-18 1987-04-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method and apparatus for measuring minority carrier lifetime in a direct band-gap semiconductor
HU213198B (en) * 1990-07-12 1997-03-28 Semilab Felvezetoe Fiz Lab Rt Method and apparatus for measuring concentration of charge carriers in semiconductor materials
DE4035266C2 (de) * 1990-11-02 1995-11-16 Jenoptik Jena Gmbh Verfahren und Anordnung zur Thermowellenanalyse
JPH0727945B2 (ja) * 1991-09-26 1995-03-29 信越半導体株式会社 半導体結晶中の深い準位密度分布の評価方法
DE4217097A1 (de) * 1992-05-22 1993-11-25 Siemens Ag Meßanordnung zur Bestimmung von Ladungsträgerdichten in Halbleitermaterial
DE4223337C2 (de) * 1992-07-16 1996-02-22 Jenoptik Jena Gmbh Verfahren und Anordnung zur photothermischen Spektroskopie
US5490090A (en) * 1994-06-14 1996-02-06 The United States Of America As Represented By The Secretary Of The Army Two tone test method for determining frequency domain transfer

Also Published As

Publication number Publication date
EP0735378A2 (fr) 1996-10-02
DE19511869A1 (de) 1996-10-10
KR960035045A (ko) 1996-10-24
TW303423B (fr) 1997-04-21
US6081127A (en) 2000-06-27
CN1097728C (zh) 2003-01-01
JP3103761B2 (ja) 2000-10-30
CN1135041A (zh) 1996-11-06
EP0735378A3 (fr) 1997-12-17
JPH08335617A (ja) 1996-12-17
DE19511869B4 (de) 2004-02-26

Similar Documents

Publication Publication Date Title
SG52251A1 (en) Method and arrangement for the response analysis of semiconductor materials with optical excitation
AU7554894A (en) Method and system for measuring the diffusion tensor and for diffusion tension imaging
HUP9702463A3 (en) Process and compounds for the magnetorelaxometric detection of analytes and use thereof
DE69302028T2 (de) Elektrostatische isolierte Spannvorrichtung und Erregunsgsverfahren
EP0513804A3 (en) Biosensor and method of quantitative analysis using the same
DE69627584D1 (de) Abtastbelichtungsapparat und Belichtungsverfahren unter Verwendung desselben
DE69636403D1 (de) Spektrometrie und optisches Messverfahren und Vorrichtung
FI924716A0 (fi) Menetelmä ja laitteisto näytteen analysoimiseksi
DE69617148D1 (de) Fühlerprobe
TR199700352A3 (tr) Miknatislanmaz ürünlerde manyetik maddelerin tespiti için yöntem ve cihaz.
FI101610B1 (fi) Näytetunnistin
DE69613432D1 (de) Belichtungsapparat und Belichtungsverfahren unter Verwendung desselben
AU4828896A (en) Grommet and inspecting apparatus for the same
AU5008996A (en) Method for the qualitative and quantitative detection of dna damage
AU8010698A (en) Method and device for enabling non-destructive determination of the elasticity of materials
ITTO930971A0 (it) Metodo di misura dimensionale e campione di riferimento per l'attuazione di tale metodo.
AU3537295A (en) Method for analysis and device for carrying out the method
NO954005D0 (no) Fremgangsmåte for analysering av stråling samt apparat for gjennomföring av fremgangsmåten
IT1276134B1 (it) Metodo per la determinazione di anticorpo antistreptolisina o
AU6580094A (en) Method for the measurement of the surface tension of biological fluids
GB2305504B (en) An improved optical sensor and method
AUPM551994A0 (en) Method and device for optoelectronic chemical sensing
GB9417088D0 (en) Test method and materials for use therein
AU7507296A (en) Case for fixing and supporting biological sample
IT1275750B1 (it) Metodo fotoacustico per misurare la concentrazione di sostanze assorbenti luce