DE69613432D1 - Belichtungsapparat und Belichtungsverfahren unter Verwendung desselben - Google Patents
Belichtungsapparat und Belichtungsverfahren unter Verwendung desselbenInfo
- Publication number
- DE69613432D1 DE69613432D1 DE69613432T DE69613432T DE69613432D1 DE 69613432 D1 DE69613432 D1 DE 69613432D1 DE 69613432 T DE69613432 T DE 69613432T DE 69613432 T DE69613432 T DE 69613432T DE 69613432 D1 DE69613432 D1 DE 69613432D1
- Authority
- DE
- Germany
- Prior art keywords
- exposure
- same
- exposure apparatus
- exposure method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
- G03F7/70108—Off-axis setting using a light-guiding element, e.g. diffractive optical elements [DOEs] or light guides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950016257A KR0155830B1 (ko) | 1995-06-19 | 1995-06-19 | 변형노광장치 및 노광방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69613432D1 true DE69613432D1 (de) | 2001-07-26 |
DE69613432T2 DE69613432T2 (de) | 2002-05-29 |
Family
ID=19417482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69613432T Expired - Lifetime DE69613432T2 (de) | 1995-06-19 | 1996-03-26 | Belichtungsapparat und Belichtungsverfahren unter Verwendung desselben |
Country Status (5)
Country | Link |
---|---|
US (1) | US5691803A (de) |
EP (1) | EP0750231B1 (de) |
JP (1) | JP3887034B2 (de) |
KR (1) | KR0155830B1 (de) |
DE (1) | DE69613432T2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000250100A (ja) * | 1999-03-01 | 2000-09-14 | Mitsutoyo Corp | 光学測定機用照明装置 |
US6361909B1 (en) | 1999-12-06 | 2002-03-26 | Industrial Technology Research Institute | Illumination aperture filter design using superposition |
US6403285B1 (en) * | 1999-12-17 | 2002-06-11 | Micron Technology, Inc. | Method for exposing semiconductor wafers in a manner that promotes radial processing uniformity |
US6261727B1 (en) | 1999-12-28 | 2001-07-17 | Taiwan Semiconductor Manufacturing Company | DOF for both dense and isolated contact holes |
US7217503B2 (en) * | 2001-04-24 | 2007-05-15 | Canon Kabushiki Kaisha | Exposure method and apparatus |
JP2002324743A (ja) * | 2001-04-24 | 2002-11-08 | Canon Inc | 露光方法及び装置 |
JP4171647B2 (ja) * | 2001-11-28 | 2008-10-22 | エーエスエムエル マスクツールズ ビー.ブイ. | プロセス・ラチチュードを改善するために利用した補助形態を除去する方法 |
KR101187612B1 (ko) * | 2003-04-09 | 2012-10-08 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
TWI628698B (zh) | 2003-10-28 | 2018-07-01 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
TW201809801A (zh) | 2003-11-20 | 2018-03-16 | 日商尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法 |
TWI389174B (zh) | 2004-02-06 | 2013-03-11 | 尼康股份有限公司 | 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法 |
US20050225740A1 (en) * | 2004-03-31 | 2005-10-13 | Padlyar Sushil D | Light source for photolithography |
KR100613461B1 (ko) * | 2005-06-29 | 2006-08-17 | 주식회사 하이닉스반도체 | 이중노광기술을 이용한 이중노광방법과 이를 위한포토마스크 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69132120T2 (de) * | 1990-11-15 | 2000-09-21 | Nikon Corp., Tokio/Tokyo | Verfahren und Vorrichtung zur Projektionsbelichtung |
US5357311A (en) * | 1991-02-25 | 1994-10-18 | Nikon Corporation | Projection type light exposure apparatus and light exposure method |
US5348837A (en) * | 1991-09-24 | 1994-09-20 | Hitachi, Ltd. | Projection exposure apparatus and pattern forming method for use therewith |
JPH06333803A (ja) * | 1992-09-18 | 1994-12-02 | Sharp Corp | 投影型露光装置用フィルター |
US5552856A (en) * | 1993-06-14 | 1996-09-03 | Nikon Corporation | Projection exposure apparatus |
-
1995
- 1995-06-19 KR KR1019950016257A patent/KR0155830B1/ko not_active IP Right Cessation
-
1996
- 1996-02-21 US US08/604,302 patent/US5691803A/en not_active Expired - Lifetime
- 1996-03-25 JP JP09302296A patent/JP3887034B2/ja not_active Expired - Fee Related
- 1996-03-26 EP EP96302139A patent/EP0750231B1/de not_active Expired - Lifetime
- 1996-03-26 DE DE69613432T patent/DE69613432T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0750231A1 (de) | 1996-12-27 |
US5691803A (en) | 1997-11-25 |
KR0155830B1 (ko) | 1998-11-16 |
JP3887034B2 (ja) | 2007-02-28 |
KR970002477A (ko) | 1997-01-24 |
JPH097937A (ja) | 1997-01-10 |
DE69613432T2 (de) | 2002-05-29 |
EP0750231B1 (de) | 2001-06-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |