SG162673A1 - Process and method for modifying polymer film surface interaction - Google Patents
Process and method for modifying polymer film surface interactionInfo
- Publication number
- SG162673A1 SG162673A1 SG200908080-5A SG2009080805A SG162673A1 SG 162673 A1 SG162673 A1 SG 162673A1 SG 2009080805 A SG2009080805 A SG 2009080805A SG 162673 A1 SG162673 A1 SG 162673A1
- Authority
- SG
- Singapore
- Prior art keywords
- polymer film
- film surface
- surface interaction
- polymer
- photo
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 230000003993 interaction Effects 0.000 title abstract 2
- 229920006254 polymer film Polymers 0.000 title abstract 2
- 229920000642 polymer Polymers 0.000 abstract 3
- 239000003054 catalyst Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000003999 initiator Substances 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 238000001127 nanoimprint lithography Methods 0.000 abstract 1
- 238000006116 polymerization reaction Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13902308P | 2008-12-19 | 2008-12-19 | |
| EP08172338.9A EP2199854B1 (en) | 2008-12-19 | 2008-12-19 | Hybrid polymer mold for nano-imprinting and method for making the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG162673A1 true SG162673A1 (en) | 2010-07-29 |
Family
ID=40481697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG200908080-5A SG162673A1 (en) | 2008-12-19 | 2009-12-04 | Process and method for modifying polymer film surface interaction |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8426025B2 (enExample) |
| EP (1) | EP2199854B1 (enExample) |
| JP (1) | JP5663162B2 (enExample) |
| KR (1) | KR101621381B1 (enExample) |
| CN (1) | CN101799626B (enExample) |
| SG (1) | SG162673A1 (enExample) |
| TW (1) | TWI443138B (enExample) |
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| JP6538159B2 (ja) | 2014-09-30 | 2019-07-03 | エルジー・ケム・リミテッド | ブロック共重合体 |
| JP6394798B2 (ja) | 2014-09-30 | 2018-09-26 | エルジー・ケム・リミテッド | ブロック共重合体 |
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| EP3225641B1 (en) | 2014-09-30 | 2021-11-24 | LG Chem, Ltd. | Block copolymer |
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| DE602005012068D1 (de) | 2005-06-10 | 2009-02-12 | Obducat Ab | Kopieren eines Musters mit Hilfe eines Zwischenstempels |
| US7878791B2 (en) | 2005-11-04 | 2011-02-01 | Asml Netherlands B.V. | Imprint lithography |
| US20080000373A1 (en) * | 2006-06-30 | 2008-01-03 | Maria Petrucci-Samija | Printing form precursor and process for preparing a stamp from the precursor |
-
2008
- 2008-12-19 EP EP08172338.9A patent/EP2199854B1/en active Active
-
2009
- 2009-12-04 SG SG200908080-5A patent/SG162673A1/en unknown
- 2009-12-10 US US12/635,296 patent/US8426025B2/en active Active
- 2009-12-14 JP JP2009283149A patent/JP5663162B2/ja active Active
- 2009-12-16 TW TW98143046A patent/TWI443138B/zh active
- 2009-12-17 CN CN200910261312.7A patent/CN101799626B/zh active Active
- 2009-12-18 KR KR1020090126771A patent/KR101621381B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US8426025B2 (en) | 2013-04-23 |
| TW201030076A (en) | 2010-08-16 |
| JP5663162B2 (ja) | 2015-02-04 |
| TWI443138B (zh) | 2014-07-01 |
| JP2010143220A (ja) | 2010-07-01 |
| KR101621381B1 (ko) | 2016-05-31 |
| EP2199854B1 (en) | 2015-12-16 |
| CN101799626A (zh) | 2010-08-11 |
| CN101799626B (zh) | 2015-08-12 |
| US20100155988A1 (en) | 2010-06-24 |
| EP2199854A1 (en) | 2010-06-23 |
| KR20100071926A (ko) | 2010-06-29 |
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