SG155949A1 - Method and system for packaging mems devices with incorporated getter - Google Patents

Method and system for packaging mems devices with incorporated getter

Info

Publication number
SG155949A1
SG155949A1 SG200906279-5A SG2009062795A SG155949A1 SG 155949 A1 SG155949 A1 SG 155949A1 SG 2009062795 A SG2009062795 A SG 2009062795A SG 155949 A1 SG155949 A1 SG 155949A1
Authority
SG
Singapore
Prior art keywords
getter
seal
device package
incorporated
mems device
Prior art date
Application number
SG200906279-5A
Other languages
English (en)
Inventor
Lauren Palmateer
William J Cummings
Brian J Gally
Clarence Chui
Manish Kothari
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of SG155949A1 publication Critical patent/SG155949A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
    • B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0172—Seals
    • B81C2203/019—Seals characterised by the material or arrangement of seals between parts
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Packages (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electroluminescent Light Sources (AREA)
SG200906279-5A 2004-09-27 2005-09-12 Method and system for packaging mems devices with incorporated getter SG155949A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61347604P 2004-09-27 2004-09-27
US11/102,554 US20060076634A1 (en) 2004-09-27 2005-04-08 Method and system for packaging MEMS devices with incorporated getter

Publications (1)

Publication Number Publication Date
SG155949A1 true SG155949A1 (en) 2009-10-29

Family

ID=35482159

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200505840A SG121122A1 (en) 2004-09-27 2005-09-12 Method and system for packaging mems devices with incorporated getter
SG200906279-5A SG155949A1 (en) 2004-09-27 2005-09-12 Method and system for packaging mems devices with incorporated getter

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG200505840A SG121122A1 (en) 2004-09-27 2005-09-12 Method and system for packaging mems devices with incorporated getter

Country Status (11)

Country Link
US (3) US20060076634A1 (ko)
EP (1) EP1640327A3 (ko)
JP (1) JP2006121052A (ko)
KR (1) KR20060092914A (ko)
AU (1) AU2005204607A1 (ko)
BR (1) BRPI0503873A (ko)
CA (1) CA2519656A1 (ko)
MX (1) MXPA05010246A (ko)
RU (1) RU2379227C2 (ko)
SG (2) SG121122A1 (ko)
TW (1) TW200620590A (ko)

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US20060076634A1 (en) 2006-04-13
US20090189230A1 (en) 2009-07-30
EP1640327A3 (en) 2007-12-05
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SG121122A1 (en) 2006-04-26
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US20110290552A1 (en) 2011-12-01
KR20060092914A (ko) 2006-08-23
US8735225B2 (en) 2014-05-27
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EP1640327A2 (en) 2006-03-29
MXPA05010246A (es) 2006-05-22

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