SG144799A1 - Probe for high frequency signal transmission and probe card using the same - Google Patents
Probe for high frequency signal transmission and probe card using the sameInfo
- Publication number
- SG144799A1 SG144799A1 SG200718184-5A SG2007181845A SG144799A1 SG 144799 A1 SG144799 A1 SG 144799A1 SG 2007181845 A SG2007181845 A SG 2007181845A SG 144799 A1 SG144799 A1 SG 144799A1
- Authority
- SG
- Singapore
- Prior art keywords
- probe
- high frequency
- frequency signal
- signal transmission
- same
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096100746A TW200829922A (en) | 2007-01-08 | 2007-01-08 | High frequency probe |
Publications (1)
Publication Number | Publication Date |
---|---|
SG144799A1 true SG144799A1 (en) | 2008-08-28 |
Family
ID=39510088
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200718184-5A SG144799A1 (en) | 2007-01-08 | 2007-11-30 | Probe for high frequency signal transmission and probe card using the same |
Country Status (7)
Country | Link |
---|---|
US (2) | US7791359B2 (fr) |
JP (1) | JP4759577B2 (fr) |
KR (1) | KR100959599B1 (fr) |
DE (1) | DE102008003534B4 (fr) |
FR (1) | FR2911190B1 (fr) |
SG (1) | SG144799A1 (fr) |
TW (1) | TW200829922A (fr) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7683645B2 (en) * | 2006-07-06 | 2010-03-23 | Mpi Corporation | High-frequency probe card and transmission line for high-frequency probe card |
TW200829922A (en) * | 2007-01-08 | 2008-07-16 | Microelectonics Technology Inc | High frequency probe |
TWI447397B (zh) * | 2010-05-17 | 2014-08-01 | Star Techn Inc | 探針卡 |
TWI397695B (zh) * | 2010-06-10 | 2013-06-01 | Allstron Inc | 用於積體電路測試之探測裝置 |
CN103221833B (zh) * | 2010-10-29 | 2016-06-08 | 爱德万测试公司 | 具有专用电子模块的测试器和并入或使用该测试器的系统和方法 |
TWI482975B (zh) * | 2011-05-27 | 2015-05-01 | Mpi Corp | Spring-type micro-high-frequency probe |
WO2013006771A2 (fr) * | 2011-07-06 | 2013-01-10 | Celadon Systems, Inc. | Systèmes de test à appareil de sonde et mécanisme d'indexation |
WO2013006770A2 (fr) | 2011-07-06 | 2013-01-10 | Celadon Systems, Inc. | Appareil de test comportant une carte sonde et mécanisme de connexion |
TWI444625B (zh) * | 2012-03-20 | 2014-07-11 | Mpi Corp | High frequency probe card |
JP5748709B2 (ja) * | 2012-06-05 | 2015-07-15 | 三菱電機株式会社 | プローブカード |
TWI471570B (zh) * | 2012-12-26 | 2015-02-01 | Mpi Corp | High frequency probe card |
TWI512300B (zh) * | 2013-07-15 | 2015-12-11 | Mpi Corp | Cantilever high frequency probe card |
TW201504631A (zh) * | 2013-07-23 | 2015-02-01 | Mpi Corp | 光電元件檢測用之高頻探針卡 |
JP6118710B2 (ja) * | 2013-10-30 | 2017-04-19 | 日本電子材料株式会社 | プローブカード |
TWI506280B (zh) * | 2013-12-13 | 2015-11-01 | Mpi Corp | Probe module (2) |
TWI522623B (zh) * | 2013-12-13 | 2016-02-21 | Mpi Corp | Probe module (1) |
CN109001500B (zh) * | 2018-08-21 | 2024-01-02 | 淮阴师范学院 | 一种内嵌电感的射频器件测试探针 |
CN111721976B (zh) * | 2019-03-18 | 2023-04-28 | 台湾中华精测科技股份有限公司 | 探针卡装置及其导电探针 |
KR102088205B1 (ko) * | 2019-08-30 | 2020-03-16 | 주식회사 프로이천 | 디스플레이 패널 검사용 프로브 핀 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2918164B2 (ja) * | 1989-01-10 | 1999-07-12 | 富士通株式会社 | プローブカード |
JPH048973U (fr) * | 1990-05-14 | 1992-01-27 | ||
JPH0436239U (fr) * | 1990-07-20 | 1992-03-26 | ||
US5264788A (en) | 1992-06-12 | 1993-11-23 | Cascade Microtech, Inc. | Adjustable strap implemented return line for a probe station |
US5382898A (en) | 1992-09-21 | 1995-01-17 | Cerprobe Corporation | High density probe card for testing electrical circuits |
US5594358A (en) * | 1993-09-02 | 1997-01-14 | Matsushita Electric Industrial Co., Ltd. | Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line |
CN1036945C (zh) | 1994-03-15 | 1998-01-07 | 吉林大学 | 共面集成电路芯片微波探针 |
JPH09218222A (ja) * | 1996-02-08 | 1997-08-19 | Advantest Corp | プローブカード |
US6603322B1 (en) * | 1996-12-12 | 2003-08-05 | Ggb Industries, Inc. | Probe card for high speed testing |
JPH11108955A (ja) * | 1997-09-30 | 1999-04-23 | Mitsubishi Electric Corp | ウエハプローバー |
US6298312B1 (en) * | 1998-07-22 | 2001-10-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of determining the tip angle of a probe card needle |
JP2001091543A (ja) * | 1999-09-27 | 2001-04-06 | Hitachi Ltd | 半導体検査装置 |
US6727716B1 (en) * | 2002-12-16 | 2004-04-27 | Newport Fab, Llc | Probe card and probe needle for high frequency testing |
JP2004309257A (ja) * | 2003-04-04 | 2004-11-04 | Micronics Japan Co Ltd | プローブカード |
CN2715341Y (zh) | 2004-07-09 | 2005-08-03 | 威盛电子股份有限公司 | 探针卡 |
KR100711292B1 (ko) * | 2005-04-14 | 2007-04-25 | 한국과학기술원 | 프로브 카드 및 그 제조방법 |
TWI279548B (en) * | 2005-08-04 | 2007-04-21 | Mjc Probe Inc | High frequency cantilever type probe card |
TWI274161B (en) * | 2005-08-29 | 2007-02-21 | Mjc Probe Inc | Electrical contact device of probe card |
US7683645B2 (en) * | 2006-07-06 | 2010-03-23 | Mpi Corporation | High-frequency probe card and transmission line for high-frequency probe card |
US7368928B2 (en) * | 2006-08-29 | 2008-05-06 | Mjc Probe Incorporation | Vertical type high frequency probe card |
KR100795909B1 (ko) | 2006-12-12 | 2008-01-21 | 삼성전자주식회사 | 반도체 검사 장치의 프로브 카드 |
KR100806379B1 (ko) | 2006-12-22 | 2008-02-27 | 세크론 주식회사 | 프로브 및 이를 포함하는 프로브 카드 |
TW200829922A (en) * | 2007-01-08 | 2008-07-16 | Microelectonics Technology Inc | High frequency probe |
US7724009B2 (en) * | 2007-02-09 | 2010-05-25 | Mpi Corporation | Method of making high-frequency probe, probe card using the high-frequency probe |
US7595651B2 (en) * | 2007-02-13 | 2009-09-29 | Mpi Corporation | Cantilever-type probe card for high frequency application |
TWI367329B (en) * | 2008-06-19 | 2012-07-01 | King Yuan Electronics Co Ltd | Probe card assembly |
-
2007
- 2007-01-08 TW TW096100746A patent/TW200829922A/zh unknown
- 2007-11-30 SG SG200718184-5A patent/SG144799A1/en unknown
-
2008
- 2008-01-08 DE DE102008003534A patent/DE102008003534B4/de not_active Expired - Fee Related
- 2008-01-08 JP JP2008001719A patent/JP4759577B2/ja active Active
- 2008-01-08 US US11/970,739 patent/US7791359B2/en active Active
- 2008-01-08 KR KR1020080002054A patent/KR100959599B1/ko active IP Right Grant
- 2008-01-08 FR FR0850092A patent/FR2911190B1/fr not_active Expired - Fee Related
-
2010
- 2010-05-26 US US12/788,291 patent/US8106673B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI322890B (fr) | 2010-04-01 |
JP4759577B2 (ja) | 2011-08-31 |
US20080164900A1 (en) | 2008-07-10 |
US20100253378A1 (en) | 2010-10-07 |
FR2911190B1 (fr) | 2014-08-08 |
JP2008170441A (ja) | 2008-07-24 |
KR100959599B1 (ko) | 2010-05-27 |
US7791359B2 (en) | 2010-09-07 |
DE102008003534A1 (de) | 2008-07-17 |
DE102008003534B4 (de) | 2013-05-29 |
TW200829922A (en) | 2008-07-16 |
KR20080065235A (ko) | 2008-07-11 |
FR2911190A1 (fr) | 2008-07-11 |
US8106673B2 (en) | 2012-01-31 |
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