SG115515A1 - Cabinet for chemical delivery with solvent purge - Google Patents

Cabinet for chemical delivery with solvent purge

Info

Publication number
SG115515A1
SG115515A1 SG200300070A SG200300070A SG115515A1 SG 115515 A1 SG115515 A1 SG 115515A1 SG 200300070 A SG200300070 A SG 200300070A SG 200300070 A SG200300070 A SG 200300070A SG 115515 A1 SG115515 A1 SG 115515A1
Authority
SG
Singapore
Prior art keywords
container
chemical
delivering
cabinet
chemical delivery
Prior art date
Application number
SG200300070A
Other languages
English (en)
Inventor
Michael Birtcher Charles
Casteneda Martinez Martin
Andrew Steidl Thomas
Vivanco Gil
James Silva David
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of SG115515A1 publication Critical patent/SG115515A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/03—Thermal insulations
    • F17C2203/0304—Thermal insulations by solid means
    • F17C2203/0329—Foam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
    • F17C2203/0634—Materials for walls or layers thereof
    • F17C2203/0636—Metals
    • F17C2203/0639—Steels
    • F17C2203/0643—Stainless steels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0146—Two or more vessels characterised by the presence of fluid connection between vessels with details of the manifold
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0329—Valves manually actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0335—Check-valves or non-return valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0341—Filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/04—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by other properties of handled fluid before transfer
    • F17C2223/042—Localisation of the removal point
    • F17C2223/046—Localisation of the removal point in the liquid
    • F17C2223/047—Localisation of the removal point in the liquid with a dip tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0304—Heat exchange with the fluid by heating using an electric heater
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/032—Control means using computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/036—Control means using alarms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0408—Level of content in the vessel
    • F17C2250/0413—Level of content in the vessel with floats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0408—Level of content in the vessel
    • F17C2250/0417—Level of content in the vessel with electrical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F17C2250/0434—Pressure difference
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0486—Indicating or measuring characterised by the location
    • F17C2250/0491—Parameters measured at or inside the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0486—Indicating or measuring characterised by the location
    • F17C2250/0495—Indicating or measuring characterised by the location the indicated parameter is a converted measured parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/01—Improving mechanical properties or manufacturing
    • F17C2260/013—Reducing manufacturing time or effort
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/01—Improving mechanical properties or manufacturing
    • F17C2260/015—Facilitating maintenance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/01—Improving mechanical properties or manufacturing
    • F17C2260/016—Preventing slosh
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/01—Purifying the fluid
    • F17C2265/015—Purifying the fluid by separating
    • F17C2265/017—Purifying the fluid by separating different phases of a same fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0545—Tools
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0419—Fluid cleaning or flushing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0419—Fluid cleaning or flushing
    • Y10T137/0424—Liquid cleaning or flushing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y10T137/4245—Cleaning or steam sterilizing
    • Y10T137/4259—With separate material addition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6606—With electric heating element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87893—With fluid actuator

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Detergent Compositions (AREA)
  • Catching Or Destruction (AREA)
  • Cleaning By Liquid Or Steam (AREA)
SG200300070A 2002-01-14 2003-01-10 Cabinet for chemical delivery with solvent purge SG115515A1 (en)

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US10/046,614 US6953047B2 (en) 2002-01-14 2002-01-14 Cabinet for chemical delivery with solvent purging

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KR (1) KR100561883B1 (zh)
CN (1) CN1264615C (zh)
AT (1) ATE486814T1 (zh)
DE (1) DE60334749D1 (zh)
IL (1) IL153844A (zh)
SG (1) SG115515A1 (zh)
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Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003303023A (ja) * 2002-02-07 2003-10-24 Tokyo Electron Ltd 処理装置及び処理装置の保守方法
US6966348B2 (en) * 2002-05-23 2005-11-22 Air Products And Chemicals, Inc. Purgeable container for low vapor pressure chemicals
US7325567B2 (en) * 2003-07-08 2008-02-05 Aaa Sales & Engineering, Inc. Pneumatic retarder acutator valve
JP2005131632A (ja) * 2003-10-08 2005-05-26 Adeka Engineering & Consutruction Co Ltd 流体供給装置
US7051749B2 (en) * 2003-11-24 2006-05-30 Advanced Technology Materials, Inc. Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications
ITMI20040022A1 (it) * 2004-01-13 2004-04-13 Dresser Italia S R L Attuatore per l'azionamento di dispositivi sottomarini
US20070017596A1 (en) * 2004-07-13 2007-01-25 Silva David J System for purging high purity interfaces
US7114531B2 (en) * 2004-07-13 2006-10-03 David James Silva System and method for purging high purity interfaces
US7198072B2 (en) * 2004-07-13 2007-04-03 David James Silva Purgeable manifold system
US7290572B2 (en) * 2005-07-10 2007-11-06 David James Silva Method for purging a high purity manifold
US7198056B2 (en) * 2005-02-10 2007-04-03 David James Silva High purity chemical delivery system
US7810516B2 (en) * 2005-03-04 2010-10-12 Air Liquide Electronics U.S. Lp Control of fluid conditions in bulk fluid distribution systems
KR100706793B1 (ko) * 2005-08-03 2007-04-12 삼성전자주식회사 케미컬 공급 장치 및 케미컬 공급 방법
US7293569B2 (en) * 2005-12-13 2007-11-13 Air Liquide Electronics U.S. Lp Alkylsilanes as solvents for low vapor pressure precursors
US20070175392A1 (en) * 2006-01-27 2007-08-02 American Air Liquide, Inc. Multiple precursor dispensing apparatus
US20070237895A1 (en) * 2006-03-30 2007-10-11 Tokyo Electron Limited Method and system for initiating a deposition process utilizing a metal carbonyl precursor
US8084367B2 (en) * 2006-05-24 2011-12-27 Samsung Electronics Co., Ltd Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
JP4606396B2 (ja) * 2006-09-15 2011-01-05 東京エレクトロン株式会社 処理ガス供給システム及び処理ガス供給方法
JP4845782B2 (ja) * 2007-03-16 2011-12-28 東京エレクトロン株式会社 成膜原料
WO2008149325A1 (en) * 2007-06-07 2008-12-11 L'air Liquide-Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Non-flammable solvents for semiconductor applications
WO2009032459A1 (en) * 2007-08-02 2009-03-12 Ehd Technology Group, Inc. Apparatus using electrosprayed fluids for cleaning surfaces with reduced residual contaminants, and method related thereto
US7828004B2 (en) * 2007-08-27 2010-11-09 Rohde Uwe Method and device for storing chemical products in a container
US9023001B2 (en) * 2007-09-12 2015-05-05 Heal-Ex, Llc Systems and methods for providing a debriding wound vacuum
US7847683B2 (en) * 2007-09-12 2010-12-07 International Business Machines Corporation Emergency machine off feature with safety control interface
US20090214777A1 (en) * 2008-02-22 2009-08-27 Demetrius Sarigiannis Multiple ampoule delivery systems
JP5046423B2 (ja) * 2008-05-30 2012-10-10 東京エレクトロン株式会社 原料液供給ユニット
US8328938B2 (en) * 2008-08-21 2012-12-11 United Microelectronics Corp. Buffer apparatus and thin film deposition system
US8002247B2 (en) * 2008-08-22 2011-08-23 Air Products And Chemicals, Inc. Cross purge valve and container assembly
DE102008041521A1 (de) * 2008-08-25 2010-03-04 Robert Bosch Gmbh Vorrichtung mit abgeschlossenem Arbeitsraum mit verbesserter Reinigungsmöglichkeit
US8499979B2 (en) * 2009-10-07 2013-08-06 Delaware Capital Formation, Inc. Chemical dispensing apparatus and methods
DE102010021072A1 (de) * 2010-05-19 2011-11-24 Truma Gerätetechnik GmbH & Co. KG Elektronisches Multiventil für einen Flüssiggastank
US8910665B2 (en) * 2011-02-28 2014-12-16 Fisher Controls International Llc Methods and apparatus for bypassing a positioner in an active control loop
KR101928120B1 (ko) * 2011-05-28 2018-12-11 엔테그리스, 아이엔씨. 퍼지 능력을 갖춘 리필 가능한 앰플
US9238865B2 (en) 2012-02-06 2016-01-19 Asm Ip Holding B.V. Multiple vapor sources for vapor deposition
US20130299018A1 (en) * 2012-05-10 2013-11-14 First Augusta, LLC dba Kalaco Equipment High density polyethylene acid and water tank manifold
CN102983216B (zh) * 2012-11-22 2015-11-25 深圳首创光伏有限公司 制造cigs薄膜太阳能电池的吸收层的反应装置及方法
US10010912B2 (en) * 2013-06-14 2018-07-03 Applied Materials, Inc. Particle reduction via throttle gate valve purge
US8765546B1 (en) 2013-06-24 2014-07-01 United Microelectronics Corp. Method for fabricating fin-shaped field-effect transistor
US9632516B2 (en) * 2013-12-19 2017-04-25 Tawan Semiconductor Manufacturing Co., Ltd Gas-supply system and method
US10161060B2 (en) 2013-12-19 2018-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Gas-supply system and method
US20150259797A1 (en) * 2014-03-17 2015-09-17 Jiangsu Nata Opto-electronic Material Co., Ltd. Liquid-Metal Organic Compound Supply System
US10024447B2 (en) * 2014-05-28 2018-07-17 Scott Technologies, Inc. Modular manifold assembly for sequentially drawing fluid from fluid storage tanks
JP6301867B2 (ja) * 2015-03-31 2018-03-28 東芝メモリ株式会社 気化システム
US10121685B2 (en) * 2015-03-31 2018-11-06 Tokyo Electron Limited Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus
US10460960B2 (en) * 2016-05-09 2019-10-29 Applied Materials, Inc. Gas panel apparatus and method for reducing exhaust requirements
US20180033614A1 (en) 2016-07-27 2018-02-01 Versum Materials Us, Llc Compositions and Methods Using Same for Carbon Doped Silicon Containing Films
US10822458B2 (en) 2017-02-08 2020-11-03 Versum Materials Us, Llc Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
US10821466B2 (en) * 2017-07-06 2020-11-03 Nordson Corporation Systems and methods for solvent extraction
SG10201903201XA (en) 2018-04-11 2019-11-28 Versum Materials Us Llc Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films
CN108328944A (zh) * 2018-05-16 2018-07-27 贵州大学 一种化学钢化炉化学品回收装置
US10883663B2 (en) * 2018-05-24 2021-01-05 Rolls-Royce North American Technologies Inc Rapid fill container system
US20200071819A1 (en) 2018-08-29 2020-03-05 Versum Materials Us, Llc Methods For Making Silicon Containing Films That Have High Carbon Content
US10985010B2 (en) 2018-08-29 2021-04-20 Versum Materials Us, Llc Methods for making silicon and nitrogen containing films
CN112969818A (zh) 2018-10-03 2021-06-15 弗萨姆材料美国有限责任公司 用于制备含硅和氮的膜的方法
CN109578811B (zh) * 2019-01-31 2024-05-14 苏州普耀光电材料有限公司 一种mo源灌装容器余料的回收处理装置及回收处理方法
KR20210114546A (ko) 2019-02-05 2021-09-23 버슘머트리얼즈 유에스, 엘엘씨 탄소 도핑된 산화규소의 증착
KR20200130121A (ko) * 2019-05-07 2020-11-18 에이에스엠 아이피 홀딩 비.브이. 딥 튜브가 있는 화학물질 공급원 용기
US11788190B2 (en) 2019-07-05 2023-10-17 Asm Ip Holding B.V. Liquid vaporizer
US11946136B2 (en) 2019-09-20 2024-04-02 Asm Ip Holding B.V. Semiconductor processing device
KR102709602B1 (ko) * 2019-09-24 2024-09-26 도쿄엘렉트론가부시키가이샤 원료 공급 장치 및 원료 공급 방법
TWI749410B (zh) * 2019-11-28 2021-12-11 智和股份有限公司 物料快速脫除溶劑之裝置及製程
WO2021178770A1 (en) * 2020-03-06 2021-09-10 Coravin, Inc. Pressurised gas source with piercing means and pressure regulator
KR20210119802A (ko) * 2020-03-25 2021-10-06 삼성전자주식회사 가스 용기 및 이를 포함하는 증착 시스템
JP2023520226A (ja) 2020-04-02 2023-05-16 バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー ケイ素含有薄膜の堆積のための有機アミノ官能基を有する環式オリゴシロキサン
CN112222097B (zh) * 2020-09-04 2022-03-08 山东国晶新材料有限公司 一种去除夹持杆表面残渣的方法
KR20230040279A (ko) * 2021-09-15 2023-03-22 에이에스엠 아이피 홀딩 비.브이. 액체를 제어하기 위한 방법 및 장치
KR102679529B1 (ko) * 2022-01-27 2024-07-01 아리온주식회사 200l 이상 대용량 케미컬 공급장치 및 그 제어방법

Family Cites Families (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3958720A (en) 1975-05-19 1976-05-25 Anderson Ralph F Adjustable multiple container dispensing apparatus
US4537660A (en) 1978-06-28 1985-08-27 Mccord James W Vapor generating and recovering apparatus
US4357175A (en) 1980-04-10 1982-11-02 Stauffer Chemical Company Process for cleaning the interiors of vessels
US4865061A (en) 1983-07-22 1989-09-12 Quadrex Hps, Inc. Decontamination apparatus for chemically and/or radioactively contaminated tools and equipment
US4570799A (en) 1984-02-06 1986-02-18 Universal Symetrics Corporation Multiple container package
US4832753A (en) 1987-05-21 1989-05-23 Tempress Measurement & Control Corporation High-purity cleaning system, method, and apparatus
JPH01134932A (ja) 1987-11-19 1989-05-26 Oki Electric Ind Co Ltd 基板清浄化方法及び基板清浄化装置
US5051135A (en) 1989-01-30 1991-09-24 Kabushiki Kaisha Tiyoda Seisakusho Cleaning method using a solvent while preventing discharge of solvent vapors to the environment
US5195711A (en) 1989-07-14 1993-03-23 Prince Corporation Multiple container holder
US5115576A (en) 1989-10-27 1992-05-26 Semifab Incorporated Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
US5304253A (en) 1990-09-12 1994-04-19 Baxter International Inc. Method for cleaning with a volatile solvent
US5106404A (en) 1990-09-12 1992-04-21 Baxter International Inc. Emission control system for fluid compositions having volatile constituents and method thereof
US5045117A (en) 1990-09-18 1991-09-03 Rockwell International Corporation System for removing flux residues from printed wiring assemblies
US5108582A (en) 1990-11-19 1992-04-28 Uop Cleanup of hydrocarbon-conversion system
US5240507A (en) 1991-11-05 1993-08-31 Gray Donald J Cleaning method and system
US5538025A (en) 1991-11-05 1996-07-23 Serec Partners Solvent cleaning system
US5425183A (en) 1991-12-04 1995-06-20 Vacon Technologies, Inc. Method and apparatus for producing and delivering solvent vapor to vessel interiors for treating residue deposits and coatings
JP3146465B2 (ja) 1992-03-13 2001-03-19 株式会社ニッショー 薬液注入装置
US5339844A (en) 1992-08-10 1994-08-23 Hughes Aircraft Company Low cost equipment for cleaning using liquefiable gases
EP0619450A1 (en) * 1993-04-09 1994-10-12 The Boc Group, Inc. Zero Dead-Leg Gas Cabinet
US5607002A (en) * 1993-04-28 1997-03-04 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US6029717A (en) * 1993-04-28 2000-02-29 Advanced Delivery & Chemical Systems, Ltd. High aspect ratio containers for ultrahigh purity chemicals
US5398846A (en) 1993-08-20 1995-03-21 S. C. Johnson & Son, Inc. Assembly for simultaneous dispensing of multiple fluids
US5509431A (en) 1993-12-14 1996-04-23 Snap-Tite, Inc. Precision cleaning vessel
US5499656A (en) * 1993-12-23 1996-03-19 Hughes Aircraft Company Integrated storage and transfer system and method for spacecraft propulsion systems
JPH07271168A (ja) 1994-03-30 1995-10-20 Minolta Co Ltd 現像剤供給容器
US5565070A (en) 1994-08-09 1996-10-15 Morikawa Industries Corporation Solvent vapor sucking method and solvent recovering apparatus
US5472119A (en) 1994-08-22 1995-12-05 S. C. Johnson & Son, Inc. Assembly for dispensing fluids from multiple containers, while simultaneously and instantaneously venting the fluid containers
JP3247270B2 (ja) 1994-08-25 2002-01-15 東京エレクトロン株式会社 処理装置及びドライクリーニング方法
US5573132A (en) 1994-11-25 1996-11-12 Kanfer; Joseph S. Dispensing container
US5551309A (en) * 1995-01-17 1996-09-03 Olin Corporation Computer-controlled chemical dispensing with alternative operating modes
US5562883A (en) 1995-05-05 1996-10-08 Davidson Textron Inc. Solvent flush reaction injection molding mixhead
AU6688398A (en) * 1997-03-06 1998-09-22 Percusurge, Inc. Intravascular aspiration system
US6296026B1 (en) * 1997-06-26 2001-10-02 Advanced Technology Materials, Inc. Chemical delivery system having purge system utilizing multiple purge techniques
US6199599B1 (en) * 1997-07-11 2001-03-13 Advanced Delivery & Chemical Systems Ltd. Chemical delivery system having purge system utilizing multiple purge techniques
US6296025B1 (en) 1997-07-11 2001-10-02 Advanced Technology Materials, Inc. Chemical delivery system having purge system utilizing multiple purge techniques
US5964230A (en) 1997-10-06 1999-10-12 Air Products And Chemicals, Inc. Solvent purge mechanism
JP4598952B2 (ja) 1998-06-08 2010-12-15 アドバンスト テクノロジー マテリアルズ，インコーポレイテッド 化学物質デリバリー・システムのパージ方法
DE69916838T2 (de) 1998-06-30 2005-08-04 Advanced Technology Materials, Inc., Danbury System für die zufuhr von mehreren chemikalien zu einer prozessvorrichtung
US6170703B1 (en) 1998-10-09 2001-01-09 Scp Global Technologies, Inc Chemical Dispensing system and method
FR2790253B1 (fr) 1999-02-26 2001-04-20 Air Liquide Electronics Sys Systeme de distribution de liquide et son utilisation pour la distribution d'un liquide ultra-pur
JP2000271471A (ja) * 1999-03-24 2000-10-03 Nippon M K S Kk 液体ソース供給システム及びその洗浄方法、気化器
US6264064B1 (en) * 1999-10-14 2001-07-24 Air Products And Chemicals, Inc. Chemical delivery system with ultrasonic fluid sensors
US6341615B1 (en) * 2000-09-13 2002-01-29 Air Products And Chemicals, Inc. Self-cleaning vacuum purge system
US6431229B1 (en) * 2001-08-24 2002-08-13 Air Products And Chemicals, Inc. Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals
US7198056B2 (en) * 2005-02-10 2007-04-03 David James Silva High purity chemical delivery system

Also Published As

Publication number Publication date
EP1327603A2 (en) 2003-07-16
TW200301808A (en) 2003-07-16
TW561229B (en) 2003-11-11
US20030131885A1 (en) 2003-07-17
IL153844A (en) 2006-08-01
US20050229970A1 (en) 2005-10-20
US6953047B2 (en) 2005-10-11
EP1327603B1 (en) 2010-11-03
CN1432439A (zh) 2003-07-30
KR100561883B1 (ko) 2006-04-18
JP2003234292A (ja) 2003-08-22
IL153844A0 (en) 2003-07-31
KR20030062257A (ko) 2003-07-23
DE60334749D1 (de) 2010-12-16
US7334595B2 (en) 2008-02-26
ATE486814T1 (de) 2010-11-15
CN1264615C (zh) 2006-07-19
EP1327603A3 (en) 2003-10-15
JP4199011B2 (ja) 2008-12-17

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