SG114755A1 - Lithographic apparatus and device manufacturing method - Google Patents
Lithographic apparatus and device manufacturing methodInfo
- Publication number
- SG114755A1 SG114755A1 SG200501101A SG200501101A SG114755A1 SG 114755 A1 SG114755 A1 SG 114755A1 SG 200501101 A SG200501101 A SG 200501101A SG 200501101 A SG200501101 A SG 200501101A SG 114755 A1 SG114755 A1 SG 114755A1
- Authority
- SG
- Singapore
- Prior art keywords
- substrate
- device manufacturing
- lithographic apparatus
- patterned beam
- array
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/7025—Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
- B65G39/09—Arrangements of bearing or sealing means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70816—Bearings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
- B65G13/06—Roller driving means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
- B65G39/08—Adaptations of individual rollers and supports therefor the rollers being magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C13/00—Rolls, drums, discs, or the like; Bearings or mountings therefor
- F16C13/006—Guiding rollers, wheels or the like, formed by or on the outer element of a single bearing or bearing unit, e.g. two adjacent bearings, whose ratio of length to diameter is generally less than one
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/788,024 US7081947B2 (en) | 2004-02-27 | 2004-02-27 | Lithographic apparatus and device manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
SG114755A1 true SG114755A1 (en) | 2006-11-29 |
Family
ID=34750522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200501101A SG114755A1 (en) | 2004-02-27 | 2005-02-24 | Lithographic apparatus and device manufacturing method |
Country Status (7)
Country | Link |
---|---|
US (2) | US7081947B2 (ja) |
EP (1) | EP1569035A1 (ja) |
JP (4) | JP4694221B2 (ja) |
KR (1) | KR100660503B1 (ja) |
CN (1) | CN1684002B (ja) |
SG (1) | SG114755A1 (ja) |
TW (1) | TWI282489B (ja) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6618117B2 (en) | 1997-07-12 | 2003-09-09 | Silverbrook Research Pty Ltd | Image sensing apparatus including a microcontroller |
US7110024B1 (en) | 1997-07-15 | 2006-09-19 | Silverbrook Research Pty Ltd | Digital camera system having motion deblurring means |
US6879341B1 (en) | 1997-07-15 | 2005-04-12 | Silverbrook Research Pty Ltd | Digital camera system containing a VLIW vector processor |
US6948794B2 (en) | 1997-07-15 | 2005-09-27 | Silverbrook Reserach Pty Ltd | Printhead re-capping assembly for a print and demand digital camera system |
US6690419B1 (en) | 1997-07-15 | 2004-02-10 | Silverbrook Research Pty Ltd | Utilising eye detection methods for image processing in a digital image camera |
US7081947B2 (en) * | 2004-02-27 | 2006-07-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR100704031B1 (ko) * | 2004-04-29 | 2007-04-04 | 삼성전자주식회사 | 이중 슬라이딩 타입 휴대용 통신 장치 |
KR100616197B1 (ko) * | 2004-08-24 | 2006-08-25 | 삼성전자주식회사 | 이중 슬라이딩 타입 휴대용 통신 장치의 슬라이딩 장치 |
US7756660B2 (en) * | 2004-12-28 | 2010-07-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2006208432A (ja) * | 2005-01-25 | 2006-08-10 | Fuji Photo Film Co Ltd | 露光方法および装置 |
JP2007003829A (ja) * | 2005-06-23 | 2007-01-11 | Fujifilm Holdings Corp | 画像露光装置 |
US20070013889A1 (en) * | 2005-07-12 | 2007-01-18 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufactured thereby having an increase in depth of focus |
US7830493B2 (en) * | 2005-10-04 | 2010-11-09 | Asml Netherlands B.V. | System and method for compensating for radiation induced thermal distortions in a substrate or projection system |
US7332733B2 (en) * | 2005-10-05 | 2008-02-19 | Asml Netherlands B.V. | System and method to correct for field curvature of multi lens array |
US20070127005A1 (en) * | 2005-12-02 | 2007-06-07 | Asml Holding N.V. | Illumination system |
US20070153249A1 (en) * | 2005-12-20 | 2007-07-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method using multiple exposures and multiple exposure types |
US8896808B2 (en) * | 2006-06-21 | 2014-11-25 | Asml Netherlands B.V. | Lithographic apparatus and method |
CN102203674B (zh) * | 2008-09-22 | 2015-08-12 | Asml荷兰有限公司 | 光刻设备、可编程图案形成装置和光刻方法 |
CN102203675B (zh) * | 2008-10-31 | 2014-02-26 | 卡尔蔡司Smt有限责任公司 | 用于euv微光刻的照明光学部件 |
EP2267534A1 (en) * | 2009-06-22 | 2010-12-29 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Illumination system |
KR101706918B1 (ko) * | 2009-09-01 | 2017-02-27 | 마이크로닉 마이데이타 에이비 | 패턴 발생 시스템 |
TWI448830B (zh) * | 2010-02-09 | 2014-08-11 | Asml Netherlands Bv | 微影裝置及元件製造方法 |
JP5584786B2 (ja) * | 2010-02-23 | 2014-09-03 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置 |
KR101457460B1 (ko) * | 2010-02-23 | 2014-11-03 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 및 디바이스 제조 방법 |
JP5603956B2 (ja) * | 2010-02-23 | 2014-10-08 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置 |
NL2006257A (en) * | 2010-02-23 | 2011-08-24 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
KR101496878B1 (ko) * | 2010-02-23 | 2015-03-02 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 및 디바이스 제조 방법 |
JP5438848B2 (ja) * | 2010-02-23 | 2014-03-12 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置及びデバイス製造方法 |
KR101475305B1 (ko) * | 2010-05-18 | 2014-12-22 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 및 디바이스 제조 방법 |
KR101714005B1 (ko) * | 2010-07-13 | 2017-03-09 | 삼성전자 주식회사 | 광학 소자 및 이를 포함하는 노광 장치 |
JP5704525B2 (ja) * | 2010-08-19 | 2015-04-22 | 株式会社ブイ・テクノロジー | マイクロレンズアレイを使用したスキャン露光装置 |
KR101689802B1 (ko) * | 2010-10-26 | 2016-12-27 | 삼성전자 주식회사 | 겐트리 장치 |
JP5515120B2 (ja) | 2010-10-29 | 2014-06-11 | 株式会社ブイ・テクノロジー | マイクロレンズアレイを使用したスキャン露光装置 |
NL2008083A (nl) * | 2011-03-02 | 2012-09-04 | Asml Netherlands Bv | Lithographic apparatus and method. |
DE102012212064A1 (de) | 2012-07-11 | 2014-01-16 | Carl Zeiss Smt Gmbh | Lithographianlage mit segmentiertem Spiegel |
TWI561327B (en) | 2013-10-16 | 2016-12-11 | Asm Tech Singapore Pte Ltd | Laser scribing apparatus comprising adjustable spatial filter and method for etching semiconductor substrate |
JP7096676B2 (ja) * | 2018-02-26 | 2022-07-06 | 株式会社Screenホールディングス | 光学ユニットおよび光学装置 |
WO2020014344A1 (en) * | 2018-07-10 | 2020-01-16 | 3D Systems, Inc. | Three dimensional (3d) printer with high resolution light engine |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6461716A (en) * | 1987-08-31 | 1989-03-08 | Canon Kk | Illuminator |
US5523193A (en) * | 1988-05-31 | 1996-06-04 | Texas Instruments Incorporated | Method and apparatus for patterning and imaging member |
JP2663560B2 (ja) * | 1988-10-12 | 1997-10-15 | 日本電気株式会社 | レーザ加工装置 |
DE59105735D1 (de) * | 1990-05-02 | 1995-07-20 | Fraunhofer Ges Forschung | Belichtungsvorrichtung. |
US5229872A (en) * | 1992-01-21 | 1993-07-20 | Hughes Aircraft Company | Exposure device including an electrically aligned electronic mask for micropatterning |
US6219015B1 (en) * | 1992-04-28 | 2001-04-17 | The Board Of Directors Of The Leland Stanford, Junior University | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
JP3224041B2 (ja) * | 1992-07-29 | 2001-10-29 | 株式会社ニコン | 露光方法及び装置 |
US5729331A (en) * | 1993-06-30 | 1998-03-17 | Nikon Corporation | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus |
JP3339149B2 (ja) * | 1993-12-08 | 2002-10-28 | 株式会社ニコン | 走査型露光装置ならびに露光方法 |
US5677703A (en) * | 1995-01-06 | 1997-10-14 | Texas Instruments Incorporated | Data loading circuit for digital micro-mirror device |
US5530482A (en) * | 1995-03-21 | 1996-06-25 | Texas Instruments Incorporated | Pixel data processing for spatial light modulator having staggered pixels |
AU1975197A (en) * | 1996-02-28 | 1997-10-01 | Kenneth C. Johnson | Microlens scanner for microlithography and wide-field confocal microscopy |
JPH10206714A (ja) * | 1997-01-20 | 1998-08-07 | Canon Inc | レンズ移動装置 |
AU2048097A (en) | 1997-01-29 | 1998-08-18 | Micronic Laser Systems Ab | Method and apparatus for the production of a structure by focused laser radiation on a photosensitively coated substrate |
US6177980B1 (en) * | 1997-02-20 | 2001-01-23 | Kenneth C. Johnson | High-throughput, maskless lithography system |
SE509062C2 (sv) | 1997-02-28 | 1998-11-30 | Micronic Laser Systems Ab | Dataomvandlingsmetod för en laserskrivare med flera strålar för mycket komplexa mikrokolitografiska mönster |
US5982553A (en) * | 1997-03-20 | 1999-11-09 | Silicon Light Machines | Display device incorporating one-dimensional grating light-valve array |
SE9800665D0 (sv) * | 1998-03-02 | 1998-03-02 | Micronic Laser Systems Ab | Improved method for projection printing using a micromirror SLM |
US6424404B1 (en) * | 1999-01-11 | 2002-07-23 | Kenneth C. Johnson | Multi-stage microlens array |
US6379867B1 (en) * | 2000-01-10 | 2002-04-30 | Ball Semiconductor, Inc. | Moving exposure system and method for maskless lithography system |
US6811953B2 (en) * | 2000-05-22 | 2004-11-02 | Nikon Corporation | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice |
CN1791839A (zh) * | 2001-11-07 | 2006-06-21 | 应用材料有限公司 | 光点格栅阵列光刻机 |
JP3563384B2 (ja) * | 2001-11-08 | 2004-09-08 | 大日本スクリーン製造株式会社 | 画像記録装置 |
US6879376B2 (en) * | 2001-11-19 | 2005-04-12 | Pixelligent Technologies Llc | Method and apparatus for exposing photoresists using programmable masks |
JP4114184B2 (ja) * | 2001-12-28 | 2008-07-09 | 株式会社オーク製作所 | 多重露光描画装置および多重露光描画方法 |
FR2837937B1 (fr) | 2002-03-28 | 2004-08-27 | Pascal Joffre | Systeme de traitement optique de surfaces |
JP2004009595A (ja) * | 2002-06-07 | 2004-01-15 | Fuji Photo Film Co Ltd | 露光ヘッド及び露光装置 |
JP2004062156A (ja) * | 2002-06-07 | 2004-02-26 | Fuji Photo Film Co Ltd | 露光ヘッド及び露光装置 |
EP1372036A1 (en) * | 2002-06-12 | 2003-12-17 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US6870554B2 (en) * | 2003-01-07 | 2005-03-22 | Anvik Corporation | Maskless lithography with multiplexed spatial light modulators |
EP1482375B1 (en) | 2003-05-30 | 2014-09-17 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP1482373A1 (en) * | 2003-05-30 | 2004-12-01 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7081947B2 (en) * | 2004-02-27 | 2006-07-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
2004
- 2004-02-27 US US10/788,024 patent/US7081947B2/en not_active Expired - Lifetime
-
2005
- 2005-02-23 TW TW094105491A patent/TWI282489B/zh active
- 2005-02-24 EP EP05251081A patent/EP1569035A1/en not_active Withdrawn
- 2005-02-24 SG SG200501101A patent/SG114755A1/en unknown
- 2005-02-25 KR KR1020050016002A patent/KR100660503B1/ko active IP Right Grant
- 2005-02-25 JP JP2005050816A patent/JP4694221B2/ja active Active
- 2005-02-25 CN CN2005100697350A patent/CN1684002B/zh active Active
-
2006
- 2006-07-14 US US11/485,958 patent/US7324186B2/en not_active Expired - Lifetime
-
2008
- 2008-09-11 JP JP2008233332A patent/JP5044513B2/ja active Active
- 2008-09-11 JP JP2008233350A patent/JP2009021625A/ja active Pending
- 2008-09-11 JP JP2008233562A patent/JP5044514B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US7081947B2 (en) | 2006-07-25 |
US7324186B2 (en) | 2008-01-29 |
KR100660503B1 (ko) | 2006-12-22 |
TWI282489B (en) | 2007-06-11 |
KR20060042384A (ko) | 2006-05-12 |
JP2009044165A (ja) | 2009-02-26 |
US20060256309A1 (en) | 2006-11-16 |
TW200538887A (en) | 2005-12-01 |
JP2008306216A (ja) | 2008-12-18 |
JP2005244238A (ja) | 2005-09-08 |
US20050190353A1 (en) | 2005-09-01 |
JP5044513B2 (ja) | 2012-10-10 |
CN1684002B (zh) | 2011-09-14 |
CN1684002A (zh) | 2005-10-19 |
EP1569035A1 (en) | 2005-08-31 |
JP2009021625A (ja) | 2009-01-29 |
JP5044514B2 (ja) | 2012-10-10 |
JP4694221B2 (ja) | 2011-06-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG114755A1 (en) | Lithographic apparatus and device manufacturing method | |
TW200602813A (en) | Lithographic apparatus and device manufacturing method | |
WO2005064400A3 (en) | Chuck system, lithographic apparatus using the same and device manufacturing method | |
EP1882987A3 (en) | System and method to compensate for critical dimension non-uniformity in a lithography system | |
TW200611084A (en) | Lithographic apparatus and device manufacturing method | |
TW200627084A (en) | Lithographic apparatus and device manufacturing method | |
WO2010032224A3 (en) | Lithographic apparatus, programmable patterning device and lithographic method | |
PT1866144T (pt) | Aparelho para a conformação de um filme plano numa lente ótica, processo para a funcionalização de uma lente ótica por meio do referido aparelho e a lente ótica obtida deste modo | |
TW200707122A (en) | Exposure method and apparatus | |
TWI263859B (en) | Lithographic apparatus and device manufacturing method | |
TW200600978A (en) | Lithographic apparatus and device manufacturing method | |
SG164330A1 (en) | Lithographic apparatus and device manufacturing method | |
WO2002088843A3 (en) | Exposure method and apparatus | |
TW200622506A (en) | Lithogrpahic apparatus and device manufacturing method | |
TWI265381B (en) | Method for coating a substrate for EUV lithography and substrate with photoresist layer | |
EP2343749A3 (en) | Method of manufacturing high resolution organic thin film pattern | |
WO2003021352A1 (fr) | Reticule et procede de mesure de caracteristiques optiques | |
WO2005064412A3 (en) | Lithographic apparatus and device manufacturing method | |
JP2009260362A5 (ja) | ||
WO2008090942A1 (ja) | 露光方法、露光装置、及びマイクロデバイスの製造方法 | |
ATE380117T1 (de) | Flachdruckplattenvorläufer und flachdruckverfahren. | |
TW200731023A (en) | System and method for compensating for radiation induced thermal distortions | |
TW200951645A (en) | Lithographic apparatus and device manufacturing method | |
WO2008058671A3 (de) | Projektions-vorrichtung mit verbesserter projektionseigenschaft | |
ATE547234T1 (de) | Optische formungsvorrichtung und optisches formungsverfahren |