SG11202105162TA - Cr-si sintered body - Google Patents

Cr-si sintered body

Info

Publication number
SG11202105162TA
SG11202105162TA SG11202105162TA SG11202105162TA SG11202105162TA SG 11202105162T A SG11202105162T A SG 11202105162TA SG 11202105162T A SG11202105162T A SG 11202105162TA SG 11202105162T A SG11202105162T A SG 11202105162TA SG 11202105162T A SG11202105162T A SG 11202105162TA
Authority
SG
Singapore
Prior art keywords
sintered body
sintered
Prior art date
Application number
SG11202105162TA
Other languages
English (en)
Inventor
Hiroyuki Hara
Hideto Kuramochi
Kenichi Itoh
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Publication of SG11202105162TA publication Critical patent/SG11202105162TA/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H01J37/3429—Plural materials
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/06—Metal silicides
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/58085—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicides
    • C04B35/58092—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicides based on refractory metal silicides
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    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23C14/0682—Silicides
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Ceramic Products (AREA)
  • Silicon Compounds (AREA)
SG11202105162TA 2018-11-22 2019-11-18 Cr-si sintered body SG11202105162TA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018218832 2018-11-22
JP2019108661 2019-06-11
PCT/JP2019/045113 WO2020105591A1 (ja) 2018-11-22 2019-11-18 Ｃｒ－Ｓｉ系焼結体

Publications (1)

Publication Number Publication Date
SG11202105162TA true SG11202105162TA (en) 2021-06-29

Family

ID=70774403

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202105162TA SG11202105162TA (en) 2018-11-22 2019-11-18 Cr-si sintered body

Country Status (8)

Country Link
US (1) US11967493B2 (zh)
EP (1) EP3885330A4 (zh)
JP (1) JP2020203821A (zh)
KR (1) KR102646469B1 (zh)
CN (1) CN113165984B (zh)
SG (1) SG11202105162TA (zh)
TW (1) TW202024000A (zh)
WO (1) WO2020105591A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230121940A1 (en) * 2020-03-26 2023-04-20 Tosoh Corporation Cr-si sintered body, sputtering target, and method for producing thin film
CN115666820A (zh) * 2020-05-26 2023-01-31 东曹株式会社 金属-Si系粉末、其制造方法、以及金属-Si系烧结体、溅射靶和金属-Si系薄膜的制造方法
EP4190762A1 (en) * 2020-07-31 2023-06-07 Tosoh Corporation Cr-si-c-based sintered body
CN112376023A (zh) * 2020-11-04 2021-02-19 宁波江丰电子材料股份有限公司 一种铬硅合金溅射靶材的制备方法
KR20230132862A (ko) * 2021-03-29 2023-09-18 도소 가부시키가이샤 Cr-Si 계 막
JP7394085B2 (ja) * 2021-04-05 2023-12-07 Ｊｘ金属株式会社 スパッタリングターゲット及びその製造方法
CN113897585B (zh) * 2021-10-11 2022-06-17 芜湖映日科技股份有限公司 一种硅铬旋转溅射靶材及其制备方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5837274B2 (ja) * 1980-08-26 1983-08-15 工業技術院長 高強度複合焼結材料
JP2570404B2 (ja) 1988-10-21 1997-01-08 三菱マテリアル株式会社 ＮａおよびＫ含有量の少ないクロムシリサイド粉末の製造法
JPH03105901A (ja) 1989-09-20 1991-05-02 Hitachi Ltd 薄膜抵抗体とその製造法
JPH05214523A (ja) * 1992-02-05 1993-08-24 Toshiba Corp スパッタリングターゲットおよびその製造方法
JPH0820863A (ja) 1995-06-12 1996-01-23 Toshiba Corp シリサイド膜およびその膜を使用した半導体装置
JP4509363B2 (ja) 2000-12-05 2010-07-21 株式会社東芝 スパッタリングターゲット、スパッタリングターゲットの製造方法、位相シフトマスクブランクの製造方法および位相シフトマスクの製造方法
JP4135357B2 (ja) * 2001-11-30 2008-08-20 日鉱金属株式会社 金属シリサイドスパッタリングターゲット及びその製造方法
JP2004204278A (ja) * 2002-12-25 2004-07-22 Hitachi Metals Ltd シリサイドターゲット材の製造方法
CN101198716B (zh) 2005-06-15 2010-12-22 日矿金属株式会社 溅射靶用氧化铬粉末及溅射靶
WO2011022058A1 (en) 2009-08-21 2011-02-24 Massachusetts Institute Of Technology Silicon-rich alloys
CN105331939B (zh) * 2014-08-15 2018-05-11 安泰科技股份有限公司 一种含硅合金靶材及其制备方法
JP6677883B2 (ja) 2015-10-30 2020-04-08 三菱マテリアル株式会社 スパッタリングターゲット及びスパッタリングターゲットの製造方法
JP6978924B2 (ja) 2017-12-15 2021-12-08 アトムリビンテック株式会社 アウトセット引戸用鎌錠

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WO2020105591A1 (ja) 2020-05-28
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