SG11201606865RA - Method for manufacturing semiconductor device, semiconductor device, and wire bonding device - Google Patents
Method for manufacturing semiconductor device, semiconductor device, and wire bonding deviceInfo
- Publication number
- SG11201606865RA SG11201606865RA SG11201606865RA SG11201606865RA SG11201606865RA SG 11201606865R A SG11201606865R A SG 11201606865RA SG 11201606865R A SG11201606865R A SG 11201606865RA SG 11201606865R A SG11201606865R A SG 11201606865RA SG 11201606865R A SG11201606865R A SG 11201606865RA
- Authority
- SG
- Singapore
- Prior art keywords
- semiconductor device
- wire bonding
- manufacturing semiconductor
- manufacturing
- bonding device
- Prior art date
Links
Classifications
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- H01—ELECTRIC ELEMENTS
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- H01L24/02—Bonding areas ; Manufacturing methods related thereto
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Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014032217 | 2014-02-21 | ||
PCT/JP2015/053666 WO2015125670A1 (ja) | 2014-02-21 | 2015-02-10 | 半導体装置の製造方法、半導体装置及びワイヤボンディング装置 |
Publications (1)
Publication Number | Publication Date |
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SG11201606865RA true SG11201606865RA (en) | 2016-10-28 |
Family
ID=53878175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201606865RA SG11201606865RA (en) | 2014-02-21 | 2015-02-10 | Method for manufacturing semiconductor device, semiconductor device, and wire bonding device |
Country Status (7)
Country | Link |
---|---|
US (1) | US9887174B2 (ja) |
JP (1) | JP6166458B2 (ja) |
KR (1) | KR101867921B1 (ja) |
CN (1) | CN106165077B (ja) |
SG (1) | SG11201606865RA (ja) |
TW (1) | TWI585927B (ja) |
WO (1) | WO2015125670A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5686912B1 (ja) * | 2014-02-20 | 2015-03-18 | 株式会社新川 | バンプ形成方法、バンプ形成装置及び半導体装置の製造方法 |
EP3603826B1 (en) * | 2018-07-31 | 2023-05-10 | Infineon Technologies AG | Method for calibrating an ultrasonic bonding machine |
TWI739379B (zh) * | 2019-04-24 | 2021-09-11 | 日商新川股份有限公司 | 半導體裝置、半導體裝置的製造方法、以及打線接合裝置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS631039A (ja) * | 1986-06-20 | 1988-01-06 | Toshiba Corp | ワイヤボンデイング方法 |
TW359014B (en) * | 1997-09-15 | 1999-05-21 | Winbond Electronics Corp | Anti-stripping IC bonding pad structure |
JP4132792B2 (ja) * | 2001-11-22 | 2008-08-13 | ローム株式会社 | ワイヤボンディングに使用するキャピラリの構造 |
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TWI248186B (en) * | 2004-01-09 | 2006-01-21 | Unaxis Internat Tranding Ltd | Method for producing a wedge-wedge wire connection |
JP4397326B2 (ja) * | 2004-12-27 | 2010-01-13 | 株式会社新川 | ボンディング装置 |
JP4369401B2 (ja) * | 2005-06-28 | 2009-11-18 | 株式会社新川 | ワイヤボンディング方法 |
JP4679427B2 (ja) * | 2006-04-24 | 2011-04-27 | 株式会社新川 | ボンディング装置のテールワイヤ切断方法及びプログラム |
KR100932680B1 (ko) * | 2007-02-21 | 2009-12-21 | 가부시키가이샤 신가와 | 반도체 장치 및 와이어 본딩 방법 |
MY152355A (en) * | 2011-04-11 | 2014-09-15 | Carsem M Sdn Bhd | Short and low loop wire bonding |
JP5734236B2 (ja) * | 2011-05-17 | 2015-06-17 | 株式会社新川 | ワイヤボンディング装置及びボンディング方法 |
US20130119117A1 (en) | 2011-11-04 | 2013-05-16 | Invensas Corporation | Bonding wedge |
JP6002437B2 (ja) | 2012-05-17 | 2016-10-05 | 新日本無線株式会社 | 半導体装置及びその製造方法 |
US20150187729A1 (en) * | 2014-01-02 | 2015-07-02 | Texas Instruments Incorporated | Wire Stitch Bond Having Strengthened Heel |
-
2014
- 2014-12-15 TW TW103143596A patent/TWI585927B/zh active
-
2015
- 2015-02-10 WO PCT/JP2015/053666 patent/WO2015125670A1/ja active Application Filing
- 2015-02-10 JP JP2016504053A patent/JP6166458B2/ja active Active
- 2015-02-10 CN CN201580019530.3A patent/CN106165077B/zh active Active
- 2015-02-10 SG SG11201606865RA patent/SG11201606865RA/en unknown
- 2015-02-10 KR KR1020167025889A patent/KR101867921B1/ko active IP Right Grant
-
2016
- 2016-08-18 US US15/239,849 patent/US9887174B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US9887174B2 (en) | 2018-02-06 |
WO2015125670A1 (ja) | 2015-08-27 |
KR20160121578A (ko) | 2016-10-19 |
CN106165077A (zh) | 2016-11-23 |
TW201533877A (zh) | 2015-09-01 |
CN106165077B (zh) | 2019-01-01 |
JPWO2015125670A1 (ja) | 2017-03-30 |
US20160358880A1 (en) | 2016-12-08 |
TWI585927B (zh) | 2017-06-01 |
KR101867921B1 (ko) | 2018-06-18 |
JP6166458B2 (ja) | 2017-07-19 |
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