SG10201900469PA - Thin-film resistive-based sensor - Google Patents

Thin-film resistive-based sensor

Info

Publication number
SG10201900469PA
SG10201900469PA SG10201900469PA SG10201900469PA SG10201900469PA SG 10201900469P A SG10201900469P A SG 10201900469PA SG 10201900469P A SG10201900469P A SG 10201900469PA SG 10201900469P A SG10201900469P A SG 10201900469PA SG 10201900469P A SG10201900469P A SG 10201900469PA
Authority
SG
Singapore
Prior art keywords
thin
sensing layer
active
sensor
film resistive
Prior art date
Application number
SG10201900469PA
Other languages
English (en)
Inventor
Ryan E Giedd
Vijaya Kayastha
Jonathan Fury
Robert Christian Cox
Original Assignee
Brewer Science Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brewer Science Inc filed Critical Brewer Science Inc
Publication of SG10201900469PA publication Critical patent/SG10201900469PA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
SG10201900469PA 2014-07-22 2015-07-22 Thin-film resistive-based sensor SG10201900469PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462027753P 2014-07-22 2014-07-22
US201562172546P 2015-06-08 2015-06-08

Publications (1)

Publication Number Publication Date
SG10201900469PA true SG10201900469PA (en) 2019-02-27

Family

ID=55163709

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201900469PA SG10201900469PA (en) 2014-07-22 2015-07-22 Thin-film resistive-based sensor
SG11201700395XA SG11201700395XA (en) 2014-07-22 2015-07-22 Thin-film resistive-based sensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201700395XA SG11201700395XA (en) 2014-07-22 2015-07-22 Thin-film resistive-based sensor

Country Status (9)

Country Link
US (1) US10352726B2 (zh)
EP (1) EP3172582A4 (zh)
JP (1) JP2017531163A (zh)
KR (1) KR20170033865A (zh)
CN (1) CN106716152A (zh)
SG (2) SG10201900469PA (zh)
TW (1) TWI711806B (zh)
WO (1) WO2016014689A1 (zh)
ZA (1) ZA201700388B (zh)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11426717B2 (en) * 2014-11-17 2022-08-30 The Regents Of The University Of Colorado, A Body Corporate Catalyst, structures, reactors, and methods of forming same
CN107949784A (zh) * 2015-06-30 2018-04-20 通用汽车环球科技运作有限责任公司 传感器装置以及制造和使用该传感器装置的方法
WO2017027334A1 (en) 2015-08-07 2017-02-16 Brewer Science Inc. Environmental sensor system and signal processor
US20170179199A1 (en) * 2015-12-18 2017-06-22 Dpix, Llc Method of screen printing in manufacturing an image sensor device
US11513091B2 (en) * 2016-05-27 2022-11-29 Carrier Corporation Gas detection device and method of manufacturing the same
JP6792141B2 (ja) * 2016-06-23 2020-11-25 富士通株式会社 ガスセンサ及びその使用方法
WO2018045377A1 (en) 2016-09-05 2018-03-08 Brewer Science Inc. Energetic pulse clearing of environmentally sensitive thin-film devices
CN109906373A (zh) * 2016-09-21 2019-06-18 盛思锐股份公司 用含氟聚合物过滤器涂覆的电阻金属氧化物气体传感器
DE112016007246T5 (de) 2016-09-21 2019-05-29 Sensirion Ag Gassensor
CN107966165B (zh) 2016-10-19 2020-12-22 华邦电子股份有限公司 电阻式环境传感器及电阻式环境传感器阵列
US10836639B1 (en) 2016-10-26 2020-11-17 Air Stations Llc/Elevated Analytics Llc Joint Venture Air quality measurement system
US10768158B2 (en) 2016-11-30 2020-09-08 City University Of Hong Kong Electrochemical detector
CN108614013B (zh) 2016-12-12 2023-12-08 华邦电子股份有限公司 传感装置、哺乳内衣及其制造方法
US10866226B1 (en) 2017-02-07 2020-12-15 Air Stations Llc/Elevated Analytics Llc Joint Venture Multi-point ground emission source sensor system
CN108426602B (zh) * 2017-02-13 2020-12-22 华邦电子股份有限公司 多功能传感器
US10928371B1 (en) 2017-03-31 2021-02-23 Air Stations Llc/Elevated Analytics Llc Joint Venture Hand-held sensor and monitor system
EP3401674B1 (en) 2017-05-09 2020-07-15 ams International AG Capacitive-type humidity sensor with superhydrophobic top surface and corresponding fabrication method
JP6958258B2 (ja) * 2017-11-08 2021-11-02 富士通株式会社 センサデバイス及びその製造方法、ガスセンサ、情報処理システム
US11214500B2 (en) 2018-01-15 2022-01-04 Ddp Specialty Electronic Materials Us, Llc Spiral wound assembly with integrated flow restrictor and sensor
JP7046357B2 (ja) * 2018-04-04 2022-04-04 国立大学法人山形大学 温度センサおよびその製造方法
JP7217488B2 (ja) * 2018-04-04 2023-02-03 国立大学法人山形大学 湿度センサおよびその製造方法
JP7046356B2 (ja) * 2018-04-04 2022-04-04 国立大学法人山形大学 温度センサおよびその製造方法
KR102007446B1 (ko) * 2018-05-21 2019-10-21 해성디에스 주식회사 센서 유닛, 이를 포함하는 온도 센서, 센서 유닛의 제조방법 및 이를 이용하여 제조된 온도 센서
CN109060891A (zh) * 2018-06-25 2018-12-21 江苏双良低碳产业技术研究院有限公司 一种石墨烯基气体传感探头及其制备与应用
TWI665416B (zh) * 2018-08-07 2019-07-11 捷騰光電股份有限公司 Sensing method of temperature and humidity sensing module
WO2020031723A1 (ja) * 2018-08-10 2020-02-13 フィガロ技研株式会社 ガス検出器
US11280685B2 (en) * 2018-10-01 2022-03-22 Goodrich Corporation Additive manufactured resistance temperature detector
KR102240943B1 (ko) 2019-06-07 2021-04-15 영남대학교 산학협력단 종이 기반 탄소나노튜브-전이금속 디칼코게나이드 하이브리드 가스 센서의 제조 방법
JP7313678B2 (ja) * 2019-09-10 2023-07-25 国立研究開発法人物質・材料研究機構 アルデヒド検知センサ、および、それを用いたシステム
IT201900018611A1 (it) * 2019-10-11 2021-04-11 Univ Degli Studi Di Salerno Dispositivo e sistema per la misurazione di concentrazioni di sostanze chimiche di una soluzione e relativo metodo
CN111513686B (zh) * 2020-04-30 2023-11-07 业成科技（成都）有限公司 温度感测组件、温度检测器及穿戴装置
TWI788671B (zh) * 2020-06-02 2023-01-01 晶極光電科技股份有限公司 多孔壓力感測器的製造方法及其裝置
US11656193B2 (en) 2020-06-12 2023-05-23 Analog Devices, Inc. Self-calibrating polymer nano composite (PNC) sensing element
KR102426908B1 (ko) 2020-06-29 2022-07-29 중앙대학교 산학협력단 가스 감지 센서의 제조방법 및 이에 의하여 제조된 가스 감지 센서를 이용한 가스 감지 키트
EP4036565A1 (en) * 2021-01-27 2022-08-03 Université Libre de Bruxelles Device and method for detecting the formation of ice
CN113588730A (zh) * 2021-08-05 2021-11-02 广州钰芯智能科技研究院有限公司 一种半导体式气敏传感器及其在呼气式酒精检测中的应用
CN113960845B (zh) * 2021-11-04 2023-08-29 业成科技（成都）有限公司 变色膜及其制备方法、窗户和显示屏

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584552A (en) 1982-03-26 1986-04-22 Pioneer Electronic Corporation Hall element with improved composite substrate
US4556814A (en) * 1984-02-21 1985-12-03 Ngk Spark Plug Co., Ltd. Piezoelectric ultrasonic transducer with porous plastic housing
WO1998041822A1 (en) * 1997-03-20 1998-09-24 Crotzer David R Dust sensor apparatus
DE10011562C2 (de) 2000-03-09 2003-05-22 Daimler Chrysler Ag Gassensor
US7948041B2 (en) * 2005-05-19 2011-05-24 Nanomix, Inc. Sensor having a thin-film inhibition layer
US20040093928A1 (en) * 2002-11-20 2004-05-20 Dimeo Frank Rare earth metal sensor
EP1730490B1 (en) * 2004-03-31 2013-02-27 Agency for Science, Technology and Research A sensor for measuring gas permeability of a test material
US20060201247A1 (en) 2004-05-06 2006-09-14 Honeywell International, Inc. Relative humidity sensor enclosed with formed heating element
JP4881554B2 (ja) 2004-09-28 2012-02-22 日立オートモティブシステムズ株式会社 流量センサ
US20060213251A1 (en) * 2005-03-24 2006-09-28 University Of Florida Research Foundation, Inc. Carbon nanotube films for hydrogen sensing
CN100420021C (zh) * 2005-04-07 2008-09-17 中国科学院电子学研究所 基于聚合物材料的单片集成温度、湿度、压力传感器芯片
JP4008456B2 (ja) * 2005-04-27 2007-11-14 Ｔｄｋ株式会社 磁界検出センサ、薄膜磁気ヘッド、薄膜磁気ヘッドのウエハ、ヘッドジンバルアセンブリ、およびハードディスク装置
US20070039385A1 (en) 2005-08-18 2007-02-22 Mujie Yang Resistive thin film humidity sensitive device based on silicone-containing copolymer and its preparation method
EP1790977A1 (en) 2005-11-23 2007-05-30 SONY DEUTSCHLAND GmbH Nanoparticle/nanofiber based chemical sensor, arrays of such sensors, uses and method of fabrication thereof, and method of detecting an analyte
GB0605576D0 (en) * 2006-03-20 2006-04-26 Oligon Ltd MEMS device
US20080022180A1 (en) * 2006-07-06 2008-01-24 Innovative Sonic Limited Method and apparatus for handling transmission errors in a wireless communications system
JP4925835B2 (ja) 2007-01-12 2012-05-09 日東電工株式会社 物質検知センサ
EP2230507A1 (en) 2009-03-17 2010-09-22 Nxp B.V. Humidity or gas sensor
US20110127446A1 (en) 2009-05-21 2011-06-02 Alexander Star Nanostructure systems and methods for sensing an analyte
US9013102B1 (en) 2009-05-23 2015-04-21 Imaging Systems Technology, Inc. Radiation detector with tiled substrates
US9017867B2 (en) 2009-08-10 2015-04-28 Battelle Memorial Institute Self assembled multi-layer nanocomposite of graphene and metal oxide materials
US8161811B2 (en) * 2009-12-18 2012-04-24 Honeywell International Inc. Flow sensors having nanoscale coating for corrosion resistance
WO2011082178A1 (en) * 2009-12-29 2011-07-07 Nanosense Inc. Fet - based nanotube sensor array
US9134270B2 (en) 2010-03-25 2015-09-15 Stichting Imec Nederland Amorphous thin film for sensing
CN103069269B (zh) 2010-06-15 2016-08-03 3M创新有限公司 可变电容传感器及其制造方法
WO2012012437A2 (en) 2010-07-20 2012-01-26 The Regents Of The University Of California Temperature response sensing and classification of analytes with porous optical films
JP5806316B2 (ja) 2010-09-13 2015-11-10 ピーエスティ・センサーズ・（プロプライエタリー）・リミテッドＰｓｔ Ｓｅｎｓｏｒｓ （Ｐｒｏｐｒｉｅｔａｒｙ） Ｌｉｍｉｔｅｄ 印刷された温度センサ
CN103154714A (zh) 2010-09-30 2013-06-12 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
IT1402406B1 (it) 2010-10-22 2013-09-04 St Microelectronics Srl Metodo di fabbricazione di un dispositivo sensore di una sostanza gassosa di interesse.
WO2013009875A2 (en) 2011-07-12 2013-01-17 University Of Pittsburgh----Of The Commonwealth System Of Higher Education pH SENSOR SYSTEMS AND METHODS OF SENSING pH
US8759153B2 (en) 2011-09-06 2014-06-24 Infineon Technologies Ag Method for making a sensor device using a graphene layer
US8581400B2 (en) 2011-10-13 2013-11-12 Taiwan Semiconductor Manufacturing Company, Ltd. Post-passivation interconnect structure
EP2810033B1 (en) 2012-01-30 2018-06-20 PST Sensors (Pty) Limited Large area temperature sensor
EP2623969B1 (en) 2012-01-31 2014-05-14 Nxp B.V. Integrated circuit and manufacturing method
JP6289454B2 (ja) 2012-06-25 2018-03-07 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びその使用方法
US20140016779A1 (en) * 2012-07-12 2014-01-16 Raytheon Bbn Technologies Corp. Tamper resistant electronic packages with quantum interconnects
US9588073B2 (en) * 2012-12-19 2017-03-07 Robert Bosch Gmbh Resistive MEMS humidity sensor

Also Published As

Publication number Publication date
EP3172582A4 (en) 2018-02-28
US10352726B2 (en) 2019-07-16
EP3172582A1 (en) 2017-05-31
ZA201700388B (en) 2019-05-29
KR20170033865A (ko) 2017-03-27
TW201617585A (zh) 2016-05-16
SG11201700395XA (en) 2017-02-27
JP2017531163A (ja) 2017-10-19
TWI711806B (zh) 2020-12-01
WO2016014689A1 (en) 2016-01-28
CN106716152A (zh) 2017-05-24
US20160025517A1 (en) 2016-01-28

Similar Documents

Publication Publication Date Title
SG10201900469PA (en) Thin-film resistive-based sensor
WO2013106773A3 (en) Single layer capacitive imaging sensors
MX2013010528A (es) Dispositivo para medir características físicas y/o cambio en las características físicas en un material de hoja y una hoja adaptada para uso con dicho dispositivo.
AU2012282773A8 (en) Combined force and proximity sensing
EP4324921A3 (en) Biointerface layer for analyte sensors
WO2015198208A9 (en) Capacitive based digitizer sensor
WO2015022516A3 (en) Position sensor
WO2012027087A3 (en) Touch and hover sensor compensation
WO2014085649A3 (en) Differential proximity sensing and side detection for an electronic device
WO2009016594A3 (en) Humidity sensor based on progressive corrosion of exposed material
JP2013514853A5 (zh)
JP2015228014A5 (ja) 表示装置
GB2555980A (en) Underwater measurement of bioelectric signals
FR2951826B1 (fr) Capteur a detection piezoresistive dans le plan
WO2011100117A3 (en) Compact and robust load and moment sensor
EP3076136A4 (en) Capacitive sensor and combined capacitive displacement measurement sensing system
GB2571497B (en) Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity
WO2015148005A3 (en) Micro-pirani vacuum gauges
WO2011109736A3 (en) Obscured feature detector
WO2017050044A1 (zh) 电容式传感装置和电容式感测系统
WO2016049243A9 (en) Serial electrochemical measurements of blood components
GB2528423A (en) Flow sensor arrangement and method for using a flow sensor arrangement
WO2016020762A3 (en) A system and method for assessing sensors' reliability
DE602008005251D1 (de) Dickensensor zum Messen der Dicke von blattartigen Objekten
WO2017097960A3 (en) Method and device for sensing pressure applied to a screen with at least one sensor means