SG10201608964TA - Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surface - Google Patents

Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surface

Info

Publication number
SG10201608964TA
SG10201608964TA SG10201608964TA SG10201608964TA SG10201608964TA SG 10201608964T A SG10201608964T A SG 10201608964TA SG 10201608964T A SG10201608964T A SG 10201608964TA SG 10201608964T A SG10201608964T A SG 10201608964TA SG 10201608964T A SG10201608964T A SG 10201608964TA
Authority
SG
Singapore
Prior art keywords
substrate surface
cleaning agent
semiconductor substrate
processing
semiconductor substrates
Prior art date
Application number
SG10201608964TA
Other languages
English (en)
Inventor
Hiromi Kawada
Hironori Mizuta
Tsuneaki Maesawa
Original Assignee
Wako Pure Chem Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wako Pure Chem Ind Ltd filed Critical Wako Pure Chem Ind Ltd
Publication of SG10201608964TA publication Critical patent/SG10201608964TA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3218—Alkanolamines or alkanolimines
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/36—Organic compounds containing phosphorus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
    • H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
    • H01L21/31055—Planarisation of the insulating layers involving a dielectric removal step the removal being a chemical etching step, e.g. dry etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/7684—Smoothing; Planarisation
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)
SG10201608964TA 2012-04-27 2013-04-26 Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surface SG10201608964TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012103921 2012-04-27

Publications (1)

Publication Number Publication Date
SG10201608964TA true SG10201608964TA (en) 2016-12-29

Family

ID=49483316

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201608964TA SG10201608964TA (en) 2012-04-27 2013-04-26 Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surface
SG11201406961PA SG11201406961PA (en) 2012-04-27 2013-04-26 Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surface

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201406961PA SG11201406961PA (en) 2012-04-27 2013-04-26 Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surface

Country Status (8)

Country Link
US (1) US9803161B2 (fr)
EP (1) EP2843689A4 (fr)
JP (1) JP6128118B2 (fr)
KR (1) KR101966635B1 (fr)
CN (1) CN104254906B (fr)
SG (2) SG10201608964TA (fr)
TW (1) TWI589691B (fr)
WO (1) WO2013162020A1 (fr)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015189829A (ja) * 2014-03-27 2015-11-02 株式会社フジミインコーポレーテッド 研磨用組成物
JP6373029B2 (ja) * 2014-03-27 2018-08-15 株式会社フジミインコーポレーテッド 研磨用組成物
JP6436638B2 (ja) * 2014-03-27 2018-12-12 株式会社フジミインコーポレーテッド 研磨用組成物
JP6343160B2 (ja) * 2014-03-28 2018-06-13 株式会社フジミインコーポレーテッド 研磨用組成物
KR102360224B1 (ko) * 2015-02-16 2022-03-14 삼성디스플레이 주식회사 세정용 조성물
KR101731523B1 (ko) 2015-04-22 2017-04-28 제이에스알 가부시끼가이샤 화학 기계 연마용 처리 조성물, 화학 기계 연마 방법 및 세정 방법
KR101654900B1 (ko) * 2016-02-04 2016-09-07 주식회사 한국루베 저독성 화생방 제독제
US10954479B2 (en) 2016-07-26 2021-03-23 Fujimi Incorporated Composition for surface treatment and surface treatment method using the same
CN106283092B (zh) * 2016-08-05 2018-06-19 宁波金特信钢铁科技有限公司 一种无氨氟化物盐电子基板清洗组合物的制备方法
JP6791680B2 (ja) * 2016-08-09 2020-11-25 株式会社フジミインコーポレーテッド 表面処理組成物およびこれを用いた洗浄方法
JP6697362B2 (ja) * 2016-09-23 2020-05-20 株式会社フジミインコーポレーテッド 表面処理組成物、ならびにこれを用いた表面処理方法および半導体基板の製造方法
CN110178204B (zh) * 2017-01-17 2022-11-04 株式会社大赛璐 半导体基板清洗剂
JP7140745B2 (ja) * 2017-03-08 2022-09-21 株式会社フジミインコーポレーテッド 表面処理組成物及びその製造方法、表面処理方法、並びに半導体基板の製造方法
JP7156266B2 (ja) 2017-03-17 2022-10-19 三菱ケミカル株式会社 半導体デバイス用基板の洗浄剤組成物、半導体デバイス用基板の洗浄方法、半導体デバイス用基板の製造方法及び半導体デバイス用基板
JP7028592B2 (ja) 2017-09-19 2022-03-02 株式会社フジミインコーポレーテッド 表面処理組成物、表面処理組成物の製造方法、表面処理方法、および半導体基板の製造方法
JP6849564B2 (ja) 2017-09-19 2021-03-24 株式会社フジミインコーポレーテッド 表面処理組成物およびこれを用いた表面処理方法
US11060051B2 (en) * 2018-10-12 2021-07-13 Fujimi Incorporated Composition for rinsing or cleaning a surface with ceria particles adhered
CN110394694A (zh) * 2019-07-26 2019-11-01 浙江天马轴承集团有限公司 一种等离子尖端放电除毛刺加工方法
WO2021131453A1 (fr) * 2019-12-26 2021-07-01 富士フイルムエレクトロニクスマテリアルズ株式会社 Liquide de nettoyage, et procédé de nettoyage
WO2021210308A1 (fr) * 2020-04-16 2021-10-21 富士フイルムエレクトロニクスマテリアルズ株式会社 Fluide de nettoyage et procédé de nettoyage
CN113862088B (zh) * 2021-10-27 2023-11-10 福建省佑达环保材料有限公司 一种oled用掩膜版清洗剂
WO2023182142A1 (fr) * 2022-03-25 2023-09-28 富士フイルム株式会社 Composition, procédé de fabrication d'élément semi-conducteur et procédé de lavage de substrat semi-conducteur

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3219020B2 (ja) 1996-06-05 2001-10-15 和光純薬工業株式会社 洗浄処理剤
TW416987B (en) 1996-06-05 2001-01-01 Wako Pure Chem Ind Ltd A composition for cleaning the semiconductor substrate surface
US6410494B2 (en) 1996-06-05 2002-06-25 Wako Pure Chemical Industries, Ltd. Cleaning agent
JPH1140526A (ja) * 1997-07-22 1999-02-12 Hitachi Ltd 配線形成方法及び半導体装置の製造方法
US6395693B1 (en) * 1999-09-27 2002-05-28 Cabot Microelectronics Corporation Cleaning solution for semiconductor surfaces following chemical-mechanical polishing
WO2001071789A1 (fr) 2000-03-21 2001-09-27 Wako Pure Chemical Industries, Ltd. Agent de nettoyage de tranche de semi-conducteur et procede de nettoyage
JP2002299300A (ja) * 2001-03-30 2002-10-11 Kaijo Corp 基板処理方法
JP4752270B2 (ja) 2002-11-08 2011-08-17 和光純薬工業株式会社 洗浄液及びそれを用いた洗浄方法
JP2005101479A (ja) * 2002-11-08 2005-04-14 Sumitomo Chemical Co Ltd 半導体基板用洗浄液
TWI362415B (en) * 2003-10-27 2012-04-21 Wako Pure Chem Ind Ltd Novel detergent and method for cleaning
KR100795364B1 (ko) * 2004-02-10 2008-01-17 삼성전자주식회사 반도체 기판용 세정액 조성물, 이를 이용한 세정 방법 및도전성 구조물의 제조 방법
DK1720966T3 (da) * 2004-03-01 2011-02-28 Avantor Performance Mat Inc Nanoelektroniske og mikroelektroniske rensesammensætninger
WO2006129538A1 (fr) 2005-06-01 2006-12-07 Nissan Chemical Industries, Ltd. Composition de nettoyage de galette semi-conductrice contenant de l'acide phosphonique et procede de nettoyage
JP2008181955A (ja) * 2007-01-23 2008-08-07 Fujifilm Corp 金属用研磨液及びそれを用いた研磨方法
JP5121273B2 (ja) * 2007-03-29 2013-01-16 富士フイルム株式会社 金属用研磨液及び研磨方法
JP2009194049A (ja) * 2008-02-13 2009-08-27 Sanyo Chem Ind Ltd 銅配線半導体用洗浄剤
JP2009239206A (ja) * 2008-03-28 2009-10-15 Sanyo Chem Ind Ltd 銅配線半導体用洗浄剤
JP2010258014A (ja) * 2009-04-21 2010-11-11 Jsr Corp 洗浄用組成物および洗浄方法
US8148310B2 (en) * 2009-10-24 2012-04-03 Wai Mun Lee Composition and method for cleaning semiconductor substrates comprising an alkyl diphosphonic acid
WO2011094568A2 (fr) * 2010-01-29 2011-08-04 Advanced Technology Materials, Inc. Agent de nettoyage pour semiconducteur comportant un câblage métallique
JP5858597B2 (ja) * 2010-01-29 2016-02-10 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド タングステン配線半導体用洗浄剤
JP5508158B2 (ja) * 2010-06-22 2014-05-28 富士フイルム株式会社 洗浄組成物、洗浄方法、及び、半導体装置の製造方法

Also Published As

Publication number Publication date
JP6128118B2 (ja) 2017-05-17
JPWO2013162020A1 (ja) 2015-12-24
TW201402806A (zh) 2014-01-16
TWI589691B (zh) 2017-07-01
CN104254906B (zh) 2017-07-21
CN104254906A (zh) 2014-12-31
KR101966635B1 (ko) 2019-08-27
EP2843689A4 (fr) 2015-05-13
US20150140820A1 (en) 2015-05-21
SG11201406961PA (en) 2014-11-27
KR20150003217A (ko) 2015-01-08
EP2843689A1 (fr) 2015-03-04
US9803161B2 (en) 2017-10-31
WO2013162020A1 (fr) 2013-10-31

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