SG10201603415XA - Article transport facility - Google Patents

Article transport facility

Info

Publication number
SG10201603415XA
SG10201603415XA SG10201603415XA SG10201603415XA SG10201603415XA SG 10201603415X A SG10201603415X A SG 10201603415XA SG 10201603415X A SG10201603415X A SG 10201603415XA SG 10201603415X A SG10201603415X A SG 10201603415XA SG 10201603415X A SG10201603415X A SG 10201603415XA
Authority
SG
Singapore
Prior art keywords
article transport
transport facility
facility
article
transport
Prior art date
Application number
SG10201603415XA
Other languages
English (en)
Inventor
Wada Yoshinari
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG10201603415XA publication Critical patent/SG10201603415XA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L5/00—Current collectors for power supply lines of electrically-propelled vehicles
    • B60L5/005—Current collectors for power supply lines of electrically-propelled vehicles without mechanical contact between the collector and the power supply line
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60M—POWER SUPPLY LINES, AND DEVICES ALONG RAILS, FOR ELECTRICALLY- PROPELLED VEHICLES
    • B60M7/00—Power lines or rails specially adapted for electrically-propelled vehicles of special types, e.g. suspension tramway, ropeway, underground railway
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L2200/00—Type of vehicles
    • B60L2200/26—Rail vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Transportation (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Robotics (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Current-Collector Devices For Electrically Propelled Vehicles (AREA)
SG10201603415XA 2015-05-13 2016-04-28 Article transport facility SG10201603415XA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015098232A JP6304122B2 (ja) 2015-05-13 2015-05-13 物品搬送設備

Publications (1)

Publication Number Publication Date
SG10201603415XA true SG10201603415XA (en) 2016-12-29

Family

ID=57275876

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201603415XA SG10201603415XA (en) 2015-05-13 2016-04-28 Article transport facility

Country Status (6)

Country Link
US (1) US9895977B2 (ja)
JP (1) JP6304122B2 (ja)
KR (1) KR102422565B1 (ja)
CN (1) CN106144452B (ja)
SG (1) SG10201603415XA (ja)
TW (1) TWI694048B (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105392683B (zh) * 2013-12-18 2018-08-14 路易斯.R.扎莫拉诺莫芬 个性化高架城市交通
US10358147B2 (en) * 2013-12-18 2019-07-23 Luis Rodolfo Zamorano Morfín Personalized elevated urban transport
JP6358142B2 (ja) * 2015-03-26 2018-07-18 株式会社ダイフク 物品搬送設備
DE102015111124A1 (de) * 2015-05-08 2016-11-10 AFT Automatisierungs- und Fördertechnik GmbH & Co. KG Mechanisch-elektrischer Antrieb
JP6304122B2 (ja) * 2015-05-13 2018-04-04 株式会社ダイフク 物品搬送設備
JP6690497B2 (ja) * 2016-10-28 2020-04-28 株式会社ダイフク 物品搬送設備
JP6863224B2 (ja) 2017-10-23 2021-04-21 株式会社ダイフク 車両
CN110255111B (zh) * 2019-07-24 2020-10-09 西安市红会医院 一种空中液体运输装置
KR102217233B1 (ko) * 2019-10-07 2021-02-18 세메스 주식회사 반송차 제어 시스템 및 반송차 제어 방법
JP7455008B2 (ja) 2020-06-23 2024-03-25 株式会社ダイフク 物品搬送設備
CN116344423B (zh) * 2023-05-29 2023-08-11 上海新创达半导体设备技术有限公司 基于无线供电的物料搬运天车及其控制方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2128918C (en) * 1993-07-29 1999-09-21 Eiji Orisaka Conveying system and method for a production line
DE9406061U1 (de) * 1994-04-12 1995-08-10 Mts Modulare Transport Systeme Gmbh, Vomp Sortieranlage zum Sortieren von einzeln geförderten Gegenständen
JP3298348B2 (ja) * 1995-01-26 2002-07-02 株式会社豊田自動織機 非接触給電システム
DE19725644A1 (de) * 1997-06-18 1998-12-24 Alsthom Cge Alcatel Bahn für mittels Weichen verzweigte Schienenstränge
US5893437A (en) * 1997-08-06 1999-04-13 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Non-contact electric power supplying system for a vehicle
JP2000142386A (ja) * 1998-11-05 2000-05-23 Toyota Autom Loom Works Ltd 搬送台車
US6629502B2 (en) * 2000-09-14 2003-10-07 Daifuku Co., Ltd. Conveyance system
JP3508130B2 (ja) * 2000-09-21 2004-03-22 村田機械株式会社 搬送システム
JP3601454B2 (ja) * 2001-02-07 2004-12-15 村田機械株式会社 無人搬送車システム
JP4048409B2 (ja) * 2001-10-22 2008-02-20 株式会社ダイフク 搬送設備
US6655297B2 (en) * 2002-04-19 2003-12-02 Daifuku Co., Ltd. Transfer system using movable bodies
JP3981885B2 (ja) * 2003-05-20 2007-09-26 株式会社ダイフク 搬送装置
JP2005031873A (ja) * 2003-07-10 2005-02-03 Trecenti Technologies Inc 搬送システムおよび半導体製造システム
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JP5527619B2 (ja) * 2011-11-24 2014-06-18 株式会社ダイフク 天井設置型の物品搬送設備
JP5720954B2 (ja) * 2012-03-06 2015-05-20 株式会社ダイフク 天井搬送車の清掃装置
EP2957974B1 (en) * 2013-02-15 2020-03-11 Murata Machinery, Ltd. Conveyance system
JP6007880B2 (ja) * 2013-10-10 2016-10-12 株式会社ダイフク 天井搬送車
US9881824B2 (en) * 2014-01-07 2018-01-30 Murata Machinery, Ltd. Transfer apparatus and control method thereof
JP6079672B2 (ja) * 2014-03-10 2017-02-15 村田機械株式会社 搬送車システム
JP6269535B2 (ja) * 2015-03-04 2018-01-31 株式会社ダイフク 物品搬送設備
JP6358142B2 (ja) * 2015-03-26 2018-07-18 株式会社ダイフク 物品搬送設備
JP6278341B2 (ja) * 2015-04-06 2018-02-14 株式会社ダイフク 物品搬送設備
JP6304122B2 (ja) * 2015-05-13 2018-04-04 株式会社ダイフク 物品搬送設備
JP6327213B2 (ja) * 2015-06-30 2018-05-23 株式会社ダイフク 物品搬送設備
JP6507897B2 (ja) * 2015-07-10 2019-05-08 株式会社ダイフク 物品搬送設備

Also Published As

Publication number Publication date
US20160332523A1 (en) 2016-11-17
TW201700388A (zh) 2017-01-01
CN106144452A (zh) 2016-11-23
US9895977B2 (en) 2018-02-20
KR102422565B1 (ko) 2022-07-18
TWI694048B (zh) 2020-05-21
JP2016210371A (ja) 2016-12-15
CN106144452B (zh) 2019-09-17
JP6304122B2 (ja) 2018-04-04
KR20160134508A (ko) 2016-11-23

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