SE8105918L - SET TO MAKE A METALLIZED DIELECTRIC CONSTRUCTION - Google Patents

SET TO MAKE A METALLIZED DIELECTRIC CONSTRUCTION

Info

Publication number
SE8105918L
SE8105918L SE8105918A SE8105918A SE8105918L SE 8105918 L SE8105918 L SE 8105918L SE 8105918 A SE8105918 A SE 8105918A SE 8105918 A SE8105918 A SE 8105918A SE 8105918 L SE8105918 L SE 8105918L
Authority
SE
Sweden
Prior art keywords
layer
insulating layer
make
photoresist
metallized dielectric
Prior art date
Application number
SE8105918A
Other languages
Unknown language ( )
Swedish (sv)
Inventor
R N Epifano
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Publication of SE8105918L publication Critical patent/SE8105918L/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/32051—Deposition of metallic or metal-silicide layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

A description is given of a process for producing a metal/dielectric layer structure on a substrate. In the process, a photoresist layer having a pattern provided with a hole is formed on the insulating layer. To improve the adhesion between insulating layer and metal layer, the insulating layer and photoresist layer are exposed to an oxygen plasma until the photoresist is used up, the surface of the insulating layer has been roughened and a passage hole extending through the insulating layer has been formed. A metal layer is then deposited on the roughened surface.
SE8105918A 1980-10-29 1981-10-07 SET TO MAKE A METALLIZED DIELECTRIC CONSTRUCTION SE8105918L (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20176780A 1980-10-29 1980-10-29

Publications (1)

Publication Number Publication Date
SE8105918L true SE8105918L (en) 1982-04-30

Family

ID=22747208

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8105918A SE8105918L (en) 1980-10-29 1981-10-07 SET TO MAKE A METALLIZED DIELECTRIC CONSTRUCTION

Country Status (4)

Country Link
JP (1) JPS57102023A (en)
DE (1) DE3141680A1 (en)
IT (1) IT1153991B (en)
SE (1) SE8105918L (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925246A (en) * 1982-08-02 1984-02-09 Nec Corp Manufacture of semiconductor device
DE3231457A1 (en) * 1982-08-24 1984-03-01 Siemens AG, 1000 Berlin und 8000 München Process for the production of structures for integrated semiconductor circuits by reactive ion etching
DE3234907A1 (en) * 1982-09-21 1984-03-22 Siemens AG, 1000 Berlin und 8000 München METHOD FOR PRODUCING A MONOLITHICALLY INTEGRATED CIRCUIT
JPS5955037A (en) * 1982-09-24 1984-03-29 Hitachi Ltd Semiconductor device
DE3328339A1 (en) * 1983-08-05 1985-02-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Process for metallising a plastic surface
DE3429082A1 (en) * 1984-08-07 1986-02-27 Siemens AG, 1000 Berlin und 8000 München Plate cam for a gas-discharge display
JPH0789551B2 (en) * 1986-02-13 1995-09-27 日本電気株式会社 Semiconductor device
DE3615519A1 (en) * 1986-05-07 1987-11-12 Siemens Ag METHOD FOR PRODUCING CONTACT HOLES WITH SLOPED FLANGES IN INTERMEDIATE OXIDE LAYERS
DE69219998T2 (en) * 1991-10-31 1997-12-18 Sgs Thomson Microelectronics Process for removing polymers from blind holes in semiconductor devices
DE4311807C2 (en) * 1993-04-03 1998-03-19 Atotech Deutschland Gmbh Process for coating metals and application of the process in printed circuit board technology
US5597983A (en) * 1994-02-03 1997-01-28 Sgs-Thomson Microelectronics, Inc. Process of removing polymers in semiconductor vias
US20040209190A1 (en) * 2000-12-22 2004-10-21 Yoshiaki Mori Pattern forming method and apparatus used for semiconductor device, electric circuit, display module, and light emitting device

Also Published As

Publication number Publication date
IT8124331A0 (en) 1981-10-05
JPS57102023A (en) 1982-06-24
DE3141680A1 (en) 1982-06-16
IT1153991B (en) 1987-01-21

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