SE8105918L - SET TO MAKE A METALLIZED DIELECTRIC CONSTRUCTION - Google Patents
SET TO MAKE A METALLIZED DIELECTRIC CONSTRUCTIONInfo
- Publication number
- SE8105918L SE8105918L SE8105918A SE8105918A SE8105918L SE 8105918 L SE8105918 L SE 8105918L SE 8105918 A SE8105918 A SE 8105918A SE 8105918 A SE8105918 A SE 8105918A SE 8105918 L SE8105918 L SE 8105918L
- Authority
- SE
- Sweden
- Prior art keywords
- layer
- insulating layer
- make
- photoresist
- metallized dielectric
- Prior art date
Links
- 238000010276 construction Methods 0.000 title 1
- 239000002184 metal Substances 0.000 abstract 3
- 229920002120 photoresistant polymer Polymers 0.000 abstract 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/32051—Deposition of metallic or metal-silicide layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
A description is given of a process for producing a metal/dielectric layer structure on a substrate. In the process, a photoresist layer having a pattern provided with a hole is formed on the insulating layer. To improve the adhesion between insulating layer and metal layer, the insulating layer and photoresist layer are exposed to an oxygen plasma until the photoresist is used up, the surface of the insulating layer has been roughened and a passage hole extending through the insulating layer has been formed. A metal layer is then deposited on the roughened surface.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US20176780A | 1980-10-29 | 1980-10-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
SE8105918L true SE8105918L (en) | 1982-04-30 |
Family
ID=22747208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8105918A SE8105918L (en) | 1980-10-29 | 1981-10-07 | SET TO MAKE A METALLIZED DIELECTRIC CONSTRUCTION |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS57102023A (en) |
DE (1) | DE3141680A1 (en) |
IT (1) | IT1153991B (en) |
SE (1) | SE8105918L (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5925246A (en) * | 1982-08-02 | 1984-02-09 | Nec Corp | Manufacture of semiconductor device |
DE3231457A1 (en) * | 1982-08-24 | 1984-03-01 | Siemens AG, 1000 Berlin und 8000 München | Process for the production of structures for integrated semiconductor circuits by reactive ion etching |
DE3234907A1 (en) * | 1982-09-21 | 1984-03-22 | Siemens AG, 1000 Berlin und 8000 München | METHOD FOR PRODUCING A MONOLITHICALLY INTEGRATED CIRCUIT |
JPS5955037A (en) * | 1982-09-24 | 1984-03-29 | Hitachi Ltd | Semiconductor device |
DE3328339A1 (en) * | 1983-08-05 | 1985-02-14 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Process for metallising a plastic surface |
DE3429082A1 (en) * | 1984-08-07 | 1986-02-27 | Siemens AG, 1000 Berlin und 8000 München | Plate cam for a gas-discharge display |
JPH0789551B2 (en) * | 1986-02-13 | 1995-09-27 | 日本電気株式会社 | Semiconductor device |
DE3615519A1 (en) * | 1986-05-07 | 1987-11-12 | Siemens Ag | METHOD FOR PRODUCING CONTACT HOLES WITH SLOPED FLANGES IN INTERMEDIATE OXIDE LAYERS |
DE69219998T2 (en) * | 1991-10-31 | 1997-12-18 | Sgs Thomson Microelectronics | Process for removing polymers from blind holes in semiconductor devices |
DE4311807C2 (en) * | 1993-04-03 | 1998-03-19 | Atotech Deutschland Gmbh | Process for coating metals and application of the process in printed circuit board technology |
US5597983A (en) * | 1994-02-03 | 1997-01-28 | Sgs-Thomson Microelectronics, Inc. | Process of removing polymers in semiconductor vias |
US20040209190A1 (en) * | 2000-12-22 | 2004-10-21 | Yoshiaki Mori | Pattern forming method and apparatus used for semiconductor device, electric circuit, display module, and light emitting device |
-
1981
- 1981-10-05 IT IT24331/81A patent/IT1153991B/en active
- 1981-10-07 SE SE8105918A patent/SE8105918L/en not_active Application Discontinuation
- 1981-10-21 DE DE19813141680 patent/DE3141680A1/en not_active Withdrawn
- 1981-10-26 JP JP56171941A patent/JPS57102023A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
IT8124331A0 (en) | 1981-10-05 |
JPS57102023A (en) | 1982-06-24 |
DE3141680A1 (en) | 1982-06-16 |
IT1153991B (en) | 1987-01-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NAV | Patent application has lapsed |
Ref document number: 8105918-0 |