SE529426C2 - Apparat och metod för eggbeläggning i kontinuerlig deponeringslinje - Google Patents

Apparat och metod för eggbeläggning i kontinuerlig deponeringslinje

Info

Publication number
SE529426C2
SE529426C2 SE0600631A SE0600631A SE529426C2 SE 529426 C2 SE529426 C2 SE 529426C2 SE 0600631 A SE0600631 A SE 0600631A SE 0600631 A SE0600631 A SE 0600631A SE 529426 C2 SE529426 C2 SE 529426C2
Authority
SE
Sweden
Prior art keywords
source
deposition
substrate
coating
strip
Prior art date
Application number
SE0600631A
Other languages
English (en)
Swedish (sv)
Other versions
SE0600631L (sv
Inventor
Mikael Schuisky
Original Assignee
Sandvik Intellectual Property
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Intellectual Property filed Critical Sandvik Intellectual Property
Priority to SE0600631A priority Critical patent/SE529426C2/sv
Priority to JP2009501384A priority patent/JP2009530500A/ja
Priority to CN2007800102183A priority patent/CN101405432B/zh
Priority to EP07716098A priority patent/EP1999293A4/en
Priority to CA002645924A priority patent/CA2645924A1/en
Priority to KR1020087023078A priority patent/KR20080102224A/ko
Priority to PCT/SE2007/050124 priority patent/WO2007108757A1/en
Publication of SE0600631L publication Critical patent/SE0600631L/xx
Publication of SE529426C2 publication Critical patent/SE529426C2/sv

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
SE0600631A 2006-03-21 2006-03-21 Apparat och metod för eggbeläggning i kontinuerlig deponeringslinje SE529426C2 (sv)

Priority Applications (7)

Application Number Priority Date Filing Date Title
SE0600631A SE529426C2 (sv) 2006-03-21 2006-03-21 Apparat och metod för eggbeläggning i kontinuerlig deponeringslinje
JP2009501384A JP2009530500A (ja) 2006-03-21 2007-03-02 連続堆積ラインにおけるエッジ被覆
CN2007800102183A CN101405432B (zh) 2006-03-21 2007-03-02 连续沉积生产线中的边缘涂布
EP07716098A EP1999293A4 (en) 2006-03-21 2007-03-02 EDGE COATING IN A CONTINUOUS SEPARATION LINE
CA002645924A CA2645924A1 (en) 2006-03-21 2007-03-02 Edge coating in continuous deposition line
KR1020087023078A KR20080102224A (ko) 2006-03-21 2007-03-02 연속 적층 라인에서의 날 코팅
PCT/SE2007/050124 WO2007108757A1 (en) 2006-03-21 2007-03-02 Edge coating in continuous deposition line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0600631A SE529426C2 (sv) 2006-03-21 2006-03-21 Apparat och metod för eggbeläggning i kontinuerlig deponeringslinje

Publications (2)

Publication Number Publication Date
SE0600631L SE0600631L (sv) 2007-08-07
SE529426C2 true SE529426C2 (sv) 2007-08-07

Family

ID=38323926

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0600631A SE529426C2 (sv) 2006-03-21 2006-03-21 Apparat och metod för eggbeläggning i kontinuerlig deponeringslinje

Country Status (7)

Country Link
EP (1) EP1999293A4 (zh)
JP (1) JP2009530500A (zh)
KR (1) KR20080102224A (zh)
CN (1) CN101405432B (zh)
CA (1) CA2645924A1 (zh)
SE (1) SE529426C2 (zh)
WO (1) WO2007108757A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009038532A1 (en) * 2007-09-17 2009-03-26 Seco Tools Ab Method of producing a layer by arc-evaporation from ceramic cathodes

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5616265B2 (ja) 2011-03-25 2014-10-29 Hoya株式会社 薄膜の成膜方法、マスクブランクの製造方法及び転写用マスクの製造方法
SE536952C2 (sv) * 2012-06-25 2014-11-11 Impact Coatings Ab Kontinuerlig rulle-till-rulle-anordning
JP6374531B2 (ja) * 2014-04-03 2018-08-15 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板表面上に材料をスパッタリングするためのスパッタリング装置
ES2631186T3 (es) * 2014-12-10 2017-08-29 Voestalpine Precision Strip Ab Cuchilla de crepado revestida de cermet de larga duración
CN107923125B (zh) * 2015-07-02 2020-09-11 福伊特专利有限公司 用于制备和/或处理纤维幅的机器的部件以及制造部件的涂层的方法
CN105870319B (zh) * 2016-04-26 2019-03-05 贝骨新材料科技（上海）有限公司 一种长条状压电薄膜传感器卷对卷制造方法
JP7382809B2 (ja) * 2019-12-02 2023-11-17 キヤノントッキ株式会社 成膜方法及び成膜装置
CN111235539B (zh) * 2020-03-10 2021-04-20 摩科斯新材料科技(苏州)有限公司 一种小孔内壁薄膜沉积方法及装置
CN111424248A (zh) * 2020-05-13 2020-07-17 沈阳理工大学 碳/碳复合材料表面高温抗氧化SiC/ZrC涂层的制备方法
CN113808935B (zh) * 2020-06-16 2023-12-15 中微半导体设备(上海)股份有限公司 耐腐蚀涂层形成方法和装置、等离子体零部件和反应装置
CN112044706A (zh) * 2020-08-05 2020-12-08 王华彬 一种涂布刮刀涂层涂敷的工艺
CN114250436B (zh) * 2020-09-25 2024-03-29 中微半导体设备(上海)股份有限公司 耐腐蚀涂层制备方法、半导体零部件和等离子体反应装置
CN112962078B (zh) * 2021-02-01 2023-07-18 肇庆宏旺金属实业有限公司 一种镀膜生产线及镀膜工艺

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JPS56111804A (en) * 1980-02-09 1981-09-03 Dainippon Printing Co Ltd Manufacture of body differing in optical property according to direction
JP3679113B2 (ja) * 1992-12-23 2005-08-03 ウンアクシス バルツェルス アクチェンゲゼルシャフト 層堆積方法および装置
ES2262037T3 (es) * 1994-04-25 2006-11-16 The Gillette Company Recubrimiento de cuchillas con diamante amorfo.
JPH10330930A (ja) * 1997-05-28 1998-12-15 Victor Co Of Japan Ltd スパッタ装置及びこれを用いた磁気ヘッドの製造方法
JP4641596B2 (ja) * 2000-07-26 2011-03-02 株式会社アルバック 立体基板へのスパッタリング成膜装置及び成膜方法
SE519466C2 (sv) * 2000-12-07 2003-03-04 Swedev Ab Schaber - eller rakelblad med beläggning av nickel innefattandes nötningsbeständiga partiklar och metod vid dess framställning
DE10147708C5 (de) * 2001-09-27 2005-03-24 Von Ardenne Anlagentechnik Gmbh Targetanordnung
SE527180C2 (sv) * 2003-08-12 2006-01-17 Sandvik Intellectual Property Rakel- eller schaberblad med nötningsbeständigt skikt samt metod för tillverkning därav
SE527386C2 (sv) * 2003-12-23 2006-02-21 Sandvik Intellectual Property Belagd rostfri stålbandsprodukt med dekorativt utseende
KR101131241B1 (ko) * 2004-09-08 2012-03-30 빅-비올렉스 에스아 면도날 에지와 면도날 상에 층을 증착하는 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009038532A1 (en) * 2007-09-17 2009-03-26 Seco Tools Ab Method of producing a layer by arc-evaporation from ceramic cathodes
US8440327B2 (en) 2007-09-17 2013-05-14 Seco Tools Ab Method of producing a layer by arc-evaporation from ceramic cathodes

Also Published As

Publication number Publication date
CN101405432A (zh) 2009-04-08
CA2645924A1 (en) 2007-09-27
SE0600631L (sv) 2007-08-07
KR20080102224A (ko) 2008-11-24
WO2007108757A1 (en) 2007-09-27
CN101405432B (zh) 2011-04-13
EP1999293A4 (en) 2010-07-21
JP2009530500A (ja) 2009-08-27
EP1999293A1 (en) 2008-12-10

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