EP1999293A4 - EDGE COATING IN A CONTINUOUS SEPARATION LINE - Google Patents

EDGE COATING IN A CONTINUOUS SEPARATION LINE

Info

Publication number
EP1999293A4
EP1999293A4 EP07716098A EP07716098A EP1999293A4 EP 1999293 A4 EP1999293 A4 EP 1999293A4 EP 07716098 A EP07716098 A EP 07716098A EP 07716098 A EP07716098 A EP 07716098A EP 1999293 A4 EP1999293 A4 EP 1999293A4
Authority
EP
European Patent Office
Prior art keywords
edge coating
continuous deposition
deposition line
line
continuous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07716098A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1999293A1 (en
Inventor
Mikael Schuisky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sandvik Intellectual Property AB
Original Assignee
Sandvik Intellectual Property AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Intellectual Property AB filed Critical Sandvik Intellectual Property AB
Publication of EP1999293A1 publication Critical patent/EP1999293A1/en
Publication of EP1999293A4 publication Critical patent/EP1999293A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
EP07716098A 2006-03-21 2007-03-02 EDGE COATING IN A CONTINUOUS SEPARATION LINE Withdrawn EP1999293A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE0600631A SE529426C2 (sv) 2006-03-21 2006-03-21 Apparat och metod för eggbeläggning i kontinuerlig deponeringslinje
PCT/SE2007/050124 WO2007108757A1 (en) 2006-03-21 2007-03-02 Edge coating in continuous deposition line

Publications (2)

Publication Number Publication Date
EP1999293A1 EP1999293A1 (en) 2008-12-10
EP1999293A4 true EP1999293A4 (en) 2010-07-21

Family

ID=38323926

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07716098A Withdrawn EP1999293A4 (en) 2006-03-21 2007-03-02 EDGE COATING IN A CONTINUOUS SEPARATION LINE

Country Status (7)

Country Link
EP (1) EP1999293A4 (zh)
JP (1) JP2009530500A (zh)
KR (1) KR20080102224A (zh)
CN (1) CN101405432B (zh)
CA (1) CA2645924A1 (zh)
SE (1) SE529426C2 (zh)
WO (1) WO2007108757A1 (zh)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE531749C2 (sv) * 2007-09-17 2009-07-28 Seco Tools Ab Metod att utfälla slitstarka skikt på hårdmetall med bågförångning och katod med Ti3SiC2 som huvudbeståndsdel
JP5616265B2 (ja) 2011-03-25 2014-10-29 Hoya株式会社 薄膜の成膜方法、マスクブランクの製造方法及び転写用マスクの製造方法
SE536952C2 (sv) * 2012-06-25 2014-11-11 Impact Coatings Ab Kontinuerlig rulle-till-rulle-anordning
JP6374531B2 (ja) * 2014-04-03 2018-08-15 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板表面上に材料をスパッタリングするためのスパッタリング装置
ES2631186T3 (es) * 2014-12-10 2017-08-29 Voestalpine Precision Strip Ab Cuchilla de crepado revestida de cermet de larga duración
CN107923125B (zh) * 2015-07-02 2020-09-11 福伊特专利有限公司 用于制备和/或处理纤维幅的机器的部件以及制造部件的涂层的方法
CN105870319B (zh) * 2016-04-26 2019-03-05 贝骨新材料科技（上海）有限公司 一种长条状压电薄膜传感器卷对卷制造方法
JP7382809B2 (ja) * 2019-12-02 2023-11-17 キヤノントッキ株式会社 成膜方法及び成膜装置
CN111235539B (zh) * 2020-03-10 2021-04-20 摩科斯新材料科技(苏州)有限公司 一种小孔内壁薄膜沉积方法及装置
CN111424248A (zh) * 2020-05-13 2020-07-17 沈阳理工大学 碳/碳复合材料表面高温抗氧化SiC/ZrC涂层的制备方法
CN113808935B (zh) * 2020-06-16 2023-12-15 中微半导体设备(上海)股份有限公司 耐腐蚀涂层形成方法和装置、等离子体零部件和反应装置
CN112044706A (zh) * 2020-08-05 2020-12-08 王华彬 一种涂布刮刀涂层涂敷的工艺
CN114250436B (zh) * 2020-09-25 2024-03-29 中微半导体设备(上海)股份有限公司 耐腐蚀涂层制备方法、半导体零部件和等离子体反应装置
CN112962078B (zh) * 2021-02-01 2023-07-18 肇庆宏旺金属实业有限公司 一种镀膜生产线及镀膜工艺

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002046526A1 (en) * 2000-12-07 2002-06-13 Swedev Aktiebolag Doctor or coater blade and method in connection with its manufacturing
WO2005014876A1 (en) * 2003-08-12 2005-02-17 Sandvik Intellectual Property Ab New metal strip product

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111804A (en) * 1980-02-09 1981-09-03 Dainippon Printing Co Ltd Manufacture of body differing in optical property according to direction
JP3679113B2 (ja) * 1992-12-23 2005-08-03 ウンアクシス バルツェルス アクチェンゲゼルシャフト 層堆積方法および装置
ES2262037T3 (es) * 1994-04-25 2006-11-16 The Gillette Company Recubrimiento de cuchillas con diamante amorfo.
JPH10330930A (ja) * 1997-05-28 1998-12-15 Victor Co Of Japan Ltd スパッタ装置及びこれを用いた磁気ヘッドの製造方法
JP4641596B2 (ja) * 2000-07-26 2011-03-02 株式会社アルバック 立体基板へのスパッタリング成膜装置及び成膜方法
DE10147708C5 (de) * 2001-09-27 2005-03-24 Von Ardenne Anlagentechnik Gmbh Targetanordnung
SE527386C2 (sv) * 2003-12-23 2006-02-21 Sandvik Intellectual Property Belagd rostfri stålbandsprodukt med dekorativt utseende
KR101131241B1 (ko) * 2004-09-08 2012-03-30 빅-비올렉스 에스아 면도날 에지와 면도날 상에 층을 증착하는 방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002046526A1 (en) * 2000-12-07 2002-06-13 Swedev Aktiebolag Doctor or coater blade and method in connection with its manufacturing
WO2005014876A1 (en) * 2003-08-12 2005-02-17 Sandvik Intellectual Property Ab New metal strip product

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2007108757A1 *

Also Published As

Publication number Publication date
CN101405432A (zh) 2009-04-08
CA2645924A1 (en) 2007-09-27
SE0600631L (sv) 2007-08-07
KR20080102224A (ko) 2008-11-24
WO2007108757A1 (en) 2007-09-27
CN101405432B (zh) 2011-04-13
SE529426C2 (sv) 2007-08-07
JP2009530500A (ja) 2009-08-27
EP1999293A1 (en) 2008-12-10

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