SE462997B - Accelerometer - Google Patents

Accelerometer

Info

Publication number
SE462997B
SE462997B SE8603209A SE8603209A SE462997B SE 462997 B SE462997 B SE 462997B SE 8603209 A SE8603209 A SE 8603209A SE 8603209 A SE8603209 A SE 8603209A SE 462997 B SE462997 B SE 462997B
Authority
SE
Sweden
Prior art keywords
substrate
acceleration
sensitive mass
accelerometer
mass
Prior art date
Application number
SE8603209A
Other languages
English (en)
Swedish (sv)
Other versions
SE8603209L (sv
SE8603209D0 (sv
Inventor
R E Stewart
Original Assignee
Litton Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Systems Inc filed Critical Litton Systems Inc
Publication of SE8603209D0 publication Critical patent/SE8603209D0/xx
Publication of SE8603209L publication Critical patent/SE8603209L/
Publication of SE462997B publication Critical patent/SE462997B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/54—Flexible member is joint component

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
SE8603209A 1985-07-25 1986-07-24 Accelerometer SE462997B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/758,692 US4679434A (en) 1985-07-25 1985-07-25 Integrated force balanced accelerometer

Publications (3)

Publication Number Publication Date
SE8603209D0 SE8603209D0 (sv) 1986-07-24
SE8603209L SE8603209L (sv) 1987-01-26
SE462997B true SE462997B (sv) 1990-09-24

Family

ID=25052723

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8603209A SE462997B (sv) 1985-07-25 1986-07-24 Accelerometer

Country Status (11)

Country Link
US (1) US4679434A (it)
JP (1) JPS6227666A (it)
CA (1) CA1273222A (it)
CH (1) CH671290A5 (it)
DE (1) DE3621585A1 (it)
FR (1) FR2585474B1 (it)
GB (1) GB2178856B (it)
IL (1) IL79175A (it)
IT (1) IT1195083B (it)
NO (1) NO862550L (it)
SE (1) SE462997B (it)

Families Citing this family (109)

* Cited by examiner, † Cited by third party
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US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
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US4882933A (en) * 1988-06-03 1989-11-28 Novasensor Accelerometer with integral bidirectional shock protection and controllable viscous damping
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US5060504A (en) * 1988-09-23 1991-10-29 Automotive Systems Laboratory, Inc. Self-calibrating accelerometer
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US5085079A (en) * 1990-06-11 1992-02-04 Sundstrand Data Control, Inc. Accelerometer with mounting/coupling structure for an electronics assembly
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US5428996A (en) * 1990-12-24 1995-07-04 Litton Systems, Inc. Hinge assembly for integrated accelerometer
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US6474160B1 (en) 2001-05-24 2002-11-05 Northrop Grumman Corporation Counterbalanced silicon tuned multiple accelerometer-gyro
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Also Published As

Publication number Publication date
IT1195083B (it) 1988-10-12
IL79175A0 (en) 1986-09-30
NO862550D0 (no) 1986-06-25
CH671290A5 (it) 1989-08-15
FR2585474B1 (fr) 1989-06-30
SE8603209L (sv) 1987-01-26
FR2585474A1 (fr) 1987-01-30
JPS6227666A (ja) 1987-02-05
DE3621585A1 (de) 1987-02-05
CA1273222A (en) 1990-08-28
IT8648238A0 (it) 1986-07-07
NO862550L (no) 1987-01-26
IL79175A (en) 1990-09-17
JPH0455267B2 (it) 1992-09-02
GB2178856B (en) 1989-08-09
GB8617299D0 (en) 1986-08-20
SE8603209D0 (sv) 1986-07-24
US4679434A (en) 1987-07-14
GB2178856A (en) 1987-02-18

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