SE450539B - Plasmabagapparat for paleggning av overdrag - Google Patents

Plasmabagapparat for paleggning av overdrag

Info

Publication number
SE450539B
SE450539B SE8205250A SE8205250A SE450539B SE 450539 B SE450539 B SE 450539B SE 8205250 A SE8205250 A SE 8205250A SE 8205250 A SE8205250 A SE 8205250A SE 450539 B SE450539 B SE 450539B
Authority
SE
Sweden
Prior art keywords
cathode
anode
cathodes
anode chamber
workpiece
Prior art date
Application number
SE8205250A
Other languages
English (en)
Swedish (sv)
Other versions
SE8205250L (sv
SE8205250D0 (sv
Inventor
Gennady Vasilievich Kljuchko
Valentin Glebovich Padalka
Leonid Pavlovich Sablev
Rimma Ivanovna Stupak
Original Assignee
Kljuchko Gennady V
Padalka Valentin G
Sablev Leonid P
Rimma Ivanovna Stupak
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kljuchko Gennady V, Padalka Valentin G, Sablev Leonid P, Rimma Ivanovna Stupak filed Critical Kljuchko Gennady V
Publication of SE8205250D0 publication Critical patent/SE8205250D0/xx
Publication of SE8205250L publication Critical patent/SE8205250L/xx
Publication of SE450539B publication Critical patent/SE450539B/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32614—Consumable cathodes for arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
SE8205250A 1982-09-17 1982-09-14 Plasmabagapparat for paleggning av overdrag SE450539B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08226496A GB2127043B (en) 1982-09-17 1982-09-17 Plasma arc apparatus for applying coatings

Publications (3)

Publication Number Publication Date
SE8205250D0 SE8205250D0 (sv) 1982-09-14
SE8205250L SE8205250L (sv) 1984-03-15
SE450539B true SE450539B (sv) 1987-06-29

Family

ID=10532967

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8205250A SE450539B (sv) 1982-09-17 1982-09-14 Plasmabagapparat for paleggning av overdrag

Country Status (7)

Country Link
US (1) US4492845A (de)
AT (1) AT376460B (de)
CH (1) CH656400A5 (de)
DE (1) DE3234100C2 (de)
FR (1) FR2533398A1 (de)
GB (1) GB2127043B (de)
SE (1) SE450539B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989006708A1 (en) * 1988-01-18 1989-07-27 Asko Anttila Procedure and apparatus for the coating of materials by means of a pulsating plasma beam

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989006708A1 (en) * 1988-01-18 1989-07-27 Asko Anttila Procedure and apparatus for the coating of materials by means of a pulsating plasma beam
US5078848A (en) * 1988-01-18 1992-01-07 Asko Anttila Procedure and apparatus for the coating of materials by means of a pulsating plasma beam

Also Published As

Publication number Publication date
FR2533398A1 (fr) 1984-03-23
DE3234100C2 (de) 1985-04-11
CH656400A5 (de) 1986-06-30
AT376460B (de) 1984-11-26
SE8205250L (sv) 1984-03-15
SE8205250D0 (sv) 1982-09-14
ATA330782A (de) 1984-04-15
GB2127043B (en) 1985-10-23
GB2127043A (en) 1984-04-04
DE3234100A1 (de) 1984-03-15
FR2533398B1 (de) 1985-02-08
US4492845A (en) 1985-01-08

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