ATE13561T1 - Zylindrische magnetron-zerstaeuberkathode. - Google Patents

Zylindrische magnetron-zerstaeuberkathode.

Info

Publication number
ATE13561T1
ATE13561T1 AT80200753T AT80200753T ATE13561T1 AT E13561 T1 ATE13561 T1 AT E13561T1 AT 80200753 T AT80200753 T AT 80200753T AT 80200753 T AT80200753 T AT 80200753T AT E13561 T1 ATE13561 T1 AT E13561T1
Authority
AT
Austria
Prior art keywords
face
arch
sputtering
cathode
magnet assembly
Prior art date
Application number
AT80200753T
Other languages
English (en)
Inventor
Bogdan Zega
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Application granted granted Critical
Publication of ATE13561T1 publication Critical patent/ATE13561T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Microwave Tubes (AREA)
  • Photoreceptors In Electrophotography (AREA)
AT80200753T 1980-08-08 1980-08-08 Zylindrische magnetron-zerstaeuberkathode. ATE13561T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP80200753A EP0045822B1 (de) 1980-08-08 1980-08-08 Zylindrische Magnetron-Zerstäuberkathode

Publications (1)

Publication Number Publication Date
ATE13561T1 true ATE13561T1 (de) 1985-06-15

Family

ID=8187028

Family Applications (1)

Application Number Title Priority Date Filing Date
AT80200753T ATE13561T1 (de) 1980-08-08 1980-08-08 Zylindrische magnetron-zerstaeuberkathode.

Country Status (6)

Country Link
US (1) US4407713A (de)
EP (1) EP0045822B1 (de)
JP (1) JPS57114663A (de)
AT (1) ATE13561T1 (de)
CA (1) CA1169467A (de)
DE (1) DE3070700D1 (de)

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CN102719799A (zh) * 2012-06-08 2012-10-10 深圳市华星光电技术有限公司 旋转磁控溅射靶及相应的磁控溅射装置
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US10358713B2 (en) 2014-04-21 2019-07-23 Kurt J. Lesker Company Surrounding field sputtering source
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CN110408902A (zh) * 2019-08-22 2019-11-05 深圳市金耀玻璃机械有限公司 一种绕线式电弧靶装置
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JP7737830B2 (ja) * 2021-06-25 2025-09-11 東京エレクトロン株式会社 成膜装置、処理条件決定方法及び成膜方法
CN115491645A (zh) * 2022-09-19 2022-12-20 中核四0四有限公司 一种基于磁控溅射的镀膜系统及方法
CN119121163B (zh) * 2024-11-11 2025-02-25 中国科学院赣江创新研究院 一种中空磁控溅射阴极、磁控溅射镀膜装置及镀膜方法

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Also Published As

Publication number Publication date
EP0045822B1 (de) 1985-05-29
US4407713A (en) 1983-10-04
EP0045822A1 (de) 1982-02-17
CA1169467A (en) 1984-06-19
JPS57114663A (en) 1982-07-16
DE3070700D1 (en) 1985-07-04

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Legal Events

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UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee