FR2154293A1 - Sputtering thin films - to produce homogeneous coatings on cylindrical articles - Google Patents

Sputtering thin films - to produce homogeneous coatings on cylindrical articles

Info

Publication number
FR2154293A1
FR2154293A1 FR7134685A FR7134685A FR2154293A1 FR 2154293 A1 FR2154293 A1 FR 2154293A1 FR 7134685 A FR7134685 A FR 7134685A FR 7134685 A FR7134685 A FR 7134685A FR 2154293 A1 FR2154293 A1 FR 2154293A1
Authority
FR
France
Prior art keywords
article
thin films
cathode
cylindrical articles
produce homogeneous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7134685A
Other languages
French (fr)
Other versions
FR2154293B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INST FIZ AKAD NAUK
Original Assignee
INST FIZ AKAD NAUK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST FIZ AKAD NAUK filed Critical INST FIZ AKAD NAUK
Priority to FR7134685A priority Critical patent/FR2154293A1/en
Publication of FR2154293A1 publication Critical patent/FR2154293A1/en
Application granted granted Critical
Publication of FR2154293B1 publication Critical patent/FR2154293B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

An article to be coated is located between the ends of two aligned tubes which comprise the anode of a gas discharge chamber defined by a cylindrical sputter cathode within a vacuum chamber, the anode tubes being located along the axis of symmetry of the cathode, along which axis the lines of force of a magnetic field are created to produce a low-pressure discharge causing sputtering material from the cathode to coat the portion of the article between the anode tubes. Since the article is located outside the zone of the high voltage gas discharge it does not influence the discharge conditions. A cylindrical article may be coated without having to rotate it.
FR7134685A 1971-09-27 1971-09-27 Sputtering thin films - to produce homogeneous coatings on cylindrical articles Granted FR2154293A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7134685A FR2154293A1 (en) 1971-09-27 1971-09-27 Sputtering thin films - to produce homogeneous coatings on cylindrical articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7134685A FR2154293A1 (en) 1971-09-27 1971-09-27 Sputtering thin films - to produce homogeneous coatings on cylindrical articles

Publications (2)

Publication Number Publication Date
FR2154293A1 true FR2154293A1 (en) 1973-05-11
FR2154293B1 FR2154293B1 (en) 1974-05-31

Family

ID=9083509

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7134685A Granted FR2154293A1 (en) 1971-09-27 1971-09-27 Sputtering thin films - to produce homogeneous coatings on cylindrical articles

Country Status (1)

Country Link
FR (1) FR2154293A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2533398A1 (en) * 1982-09-17 1984-03-23 Kljuchko Gennady ARC PLASMA DEVICE FOR OBTAINING COATINGS

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2533398A1 (en) * 1982-09-17 1984-03-23 Kljuchko Gennady ARC PLASMA DEVICE FOR OBTAINING COATINGS

Also Published As

Publication number Publication date
FR2154293B1 (en) 1974-05-31

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Legal Events

Date Code Title Description
ST Notification of lapse