EP0468110B1 - Elektrische Lichtbogenbehandlung von Teilchen - Google Patents

Elektrische Lichtbogenbehandlung von Teilchen Download PDF

Info

Publication number
EP0468110B1
EP0468110B1 EP90308105A EP90308105A EP0468110B1 EP 0468110 B1 EP0468110 B1 EP 0468110B1 EP 90308105 A EP90308105 A EP 90308105A EP 90308105 A EP90308105 A EP 90308105A EP 0468110 B1 EP0468110 B1 EP 0468110B1
Authority
EP
European Patent Office
Prior art keywords
electrode
electrodes
arc
treatment
current supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90308105A
Other languages
English (en)
French (fr)
Other versions
EP0468110A1 (de
Inventor
Ubai Arifov
Pulat Ubaevich Arifov
Moisei Khaimovich Esterlis
Jury Valentinovich Khoroshkhin
Vladimir Nikolaevich Arustamov
Emanuel Isakharovich Aminov
Albert Evgenievich Astafiev
Ivan Filippovich Dvorzhak
Valery Nikolaevich Kazakov
Alexader Anatolievich Sokolov
Rustam Madraimovich Tangribergenov
Evgeny Nikolaevich Kvartira 49 Tokarev
Vladimir Emelyanovich Bulat
Alexei Ivanovich Beloborodov
Gennady Filippovich Pliss
Jury Moiseevich Tsai
Pavel Felixovich Kirson
Dushan Dragutinovich Gruich
Evgeny Usherovich Gershovich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut Elektroniki Imeni Ua Arifova Akademii Nauk Uzbexkoi Ssr
Original Assignee
Institut Elektroniki Imeni Ua Arifova Akademii Nauk Uzbexkoi Ssr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut Elektroniki Imeni Ua Arifova Akademii Nauk Uzbexkoi Ssr filed Critical Institut Elektroniki Imeni Ua Arifova Akademii Nauk Uzbexkoi Ssr
Priority to EP90308105A priority Critical patent/EP0468110B1/de
Priority to DE69020553T priority patent/DE69020553T2/de
Publication of EP0468110A1 publication Critical patent/EP0468110A1/de
Application granted granted Critical
Publication of EP0468110B1 publication Critical patent/EP0468110B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/48Generating plasma using an arc

Definitions

  • the invention relates to the electric arc treatment of parts, and more specifically, it deals with method and apparatuses for electric arc treatement of parts.
  • a method for treating parts wherein a part to be treated is placed between two electrodes in a vacuum chamber, and a glowing discharge is initiated between the electrodes.
  • the product is subjected to ion bombardment in the glowing discharge so that its surface is cleaned and activated.
  • a similar process is disclosed in US-A-4 534 921 for cleaning by ion bombardment in order to remove plastic residue and surface contaminants from parts and polish their surfaces.
  • the process is characterised by uniform cleaning of the part surface, but its productivity is rather inadequate because of a low rate of atomization of materials in the glowing discharge. In addition, this technique is not capable of ensuring removal of fine burs.
  • a pulsed arc discharge for cleaning allows temperature on the surface of the part being cleaned to be controlled by varying pulse rate and energy of individual pulses so as to intensify the cleaning process.
  • This method of electric arc cleaning cannot bring shout uniform treatment of a part over the entire surface area because of difficulties in controlling position of electrode spots of the pulsed discharge within a predetermined area of the surface. This results in noncleaned portions and nonuniform heating of the part. Sophisticated devices should be used to carry out this method.
  • a method for electric arc treatment preferably, for cleaning parts, e.g., inner surface of pipes (SU-A-952388, B08B), comprising connecting a part and an electrode to a power supply and initiating an arc discharge between the part being treated and the electrode under a pressure of a medium of 100 to 500 Pa.
  • the electrode is then caused to move with respect to the part so as to move plasma of the arc discharge along the surface of the part being treated which functions as a cathode.
  • This method is carried out by means of an apparatus having an electrode mounted on a holder and connected, by means of a current supply member, to one lead of the power supply having a second lead which is connected to the pipe being treated, an arc excitation system, a mechanism for reciprocating the electrode, and a system for sealing and evacuating the interior space of the pipe being treated.
  • a medium pressure in the treatment zone should be at least 100 Pa, and the residual gas reacts with the surface of the part being treated heated by the arc discharge. This results in the treated portions of the surface, which are already cleaned, being oxidized.
  • a volumetric discharge develops so that a major part of power released in the discharge is spent for heating of the part and electrode.
  • a minor part of power released in the arc is used for producing useful result, i.e., cleaning of the part surface.
  • the formation of a volumetric discharge results in plasma acting upon parts of the apparatus which are in contact with the plasma, in particular, upon the electrode holder and the system for sealing the interior of the pipe so that their service life is shortened.
  • the invention is based on the problem of providing a method for electric arc treatment of parts in which, owing to the choice of process steps ensuring a predetermined distribution of plasma over the surface of parts, the desired quality of treatment of parts, high productivity, and ecological safety of the process can be achieved. Another problem is to provide an apparatus for carrying out this method and also to provide an optimum construction of components of the apparatus so as to achieve advantages of the invention in the best possible manner.
  • the present invention provides a method for electric arc treatment of a part comprising connecting the part and at least one electrode to a power supply, and initiating an arc discharge between the part and the at least one electrode in a medium below atmospheric pressure, with the formation of plasma moving at least along the cathode, characterised in that:
  • the electrode spots of the arc in the first mode of operation (c1) of the method, can spontaneously move over the surface of the part and electrode and, if an arc is initiated in the mode of a drooping portion of the volt-ampere characteristic or, which is the same, if a power supply with a drooping external volt-ampere characteristic is used, mobility of the electrode spots substantially increases as shown by tests. If a difference of potentials of electric field equal, or close to zero is created on the surface of the treatment zone of the part and/or on the working surface of the electrode, the electrode spots of the arc will most likely occur in all areas of respective surfaces.
  • the electrode spots of the arc move to follow up the areas of extremum values of potential so as to ensure treatment of the part in accordance with a preset program.
  • the difference of potentials of electric field be created by supplying electric current to areas of the part or/and electrode remote from the zone of location of the electrode spots of the arc, the areas of the highest or/and lowest potential of electric field being moved by varying position of current supply zones on the part or/and on the electrode
  • This method does not call for additional energy expenditures for moving the electrode spots with respect to a part.
  • the part be moved with respect to at least one electrode, or/and at least one electrode be moved with respect to the part.
  • the electrode spots of the arc move along the part surface to follow the area of the arc discharge so as to achieve the desired treatment of the part.
  • the electrode spots of the arc are shifted along the part towards the current supply zone but, since their movement is limited, they are concentrated at the boundary of the area to which the arc discharge is limited and, during the relative movement of the part being treated and this area to which the arc discharge is limited, the desired treatment of the desired surface of the part with these spots is achieved.
  • the value of electric current be decreased or electric current be interrupted in accordance with a preset program in the circuit of at least one electrode, the current in the circuit of the other electrode or electrodes remaining unchange or being increased.
  • a change in direction of electric field which will thus occur in the discharge gap is capable of ensuring a respective directional movement of the electrode spots along the part without using movable electrodes so as to ensure treatment of the part in accordance with a preset program.
  • the part being treated may be connected to either negative or positive terminal of the power supply.
  • the former case is most preferable for cleaning, descaling, deburring, and vaporization of the material of a part, and the latter case is most suitable for polishing, heating, welding, and cutting of parts.
  • the value of arc current and treatment time be such that the specific energy consumption be within the range from 0.1 to 0.8 kW-h/m2 »m.
  • an apparatus for carrying out the method for electric arc treatment of parts comprising at least one electrode mounted on a holder and connected by means of a current supply member to one lead of a power supply having the other lead connected to a part being treated, and an arc excitation system, according to the invention, is provided with at least one means electrically connected to the power supply for creating, during arcing, a difference of potentials of electric field equal, or close to zero, on the surface of the treatment zone of the part and/or on the working surface of at least one electrode and with a means for limiting movement of plasma of the arc discharge to the treatment zone of the part and/or to the working surface of at least one electrode.
  • the provision of said means for creating a difference of potential of electric field equal, or close to zero and the means for limiting movement of plasma of the arc in the apparatus according to the invention ensures substantially identical probability of occurrence of the electrode spots in all areas of the treatment zone of the part and/or the working surface of the electrode and rules out movement of such spots to other areas of the surface of the part and/or electrode, whereby a sufficiently uniform treatment of the selected zone of the part with the arc is ensured with minimum erosion of the electrode.
  • the means for creating, during arcing, a difference of potentials of electric field equal, or close to zero on at least the working surface of the treatment zone of the part may be in the form of at least two current supply members connected to the part symmetrically with respect to the treatment zone, electrically connected to each other and to one of the leads of the power supply, and a similar means for creating, during arcing, a difference of potentials equal, or close to zero on the working surface of at least one electrode may be in the form of at least two current supply members connected to the electrode symmetrically with respect to the treatment zone of the part or to the working surface of the electrode, electrically connected to each other and connected to the lead of the power supply opposite to that to which current supply members of the part are connected.
  • the apparatus has at least two electrodes, it is preferred that they are positioned symmetrically with respect to the treatment zone.
  • This facility prevents asymmetry of erosion of the part being treated.
  • the apparatus has at least two electrodes, the electrodes be mounted for movement relative to each other.
  • This facility allows the width of the treatment zone to be controlled.
  • the electrodes be in the form of coaxially mounted truncated cones having coaxial holes to receive a part being treated therein, their smaller bases facing towards each other, the angle between the generant and height ranging from 35 to 85°.
  • the current supply members should be connected to the electrodes at the larger bases of the truncated cones; in addition, the current supply members should be connected to one of the electrodes with an offset towards the other electrode at one-half of the distance between the current supply members.
  • This connection of the current supply members allows a zig-zag movement of the cathode arc spots along the perimeter of the part being treated so as to enhance uniformity of treatment and lower the probability of fusion of the part during its cleaning.
  • the electrodes be made in the form of at least one pair of mirror-parallel prisms, with an angle between facets facing towards each other ranging from 35 to 85°.
  • this construction allows the major fraction of erosion products from the part being cleaned to be removed from the discharge gap area so as to enhance reliability and prolong service life of the apparatus.
  • the range of 35 to 85° for this angle is chosen as described above.
  • the electrodes in the form of at least one pair of mirror-parallel prisms be mounted with their working surfaces symmetrically with respect to the axis of the rolled stock and in parallel wherewith, and if at least two pairs of electrodes in the form of mirror-parallel prisms are provided, they are preferably positioned along the path of movement of the strip stock.
  • This facility allows a large surface area of the strip stock to be cleaned uniformly thereby enhancing productivity of the process.
  • the electrodes be mounted with respect to each other so that the threatment zone of each of the arc discharges be covered by the treatment zone of at least one other arc discharge.
  • This facility allows a part to be uniformly treated with a plurality of arcs at a time so as to acieve a respective increase in productivity of the process.
  • the apparatus in carrying out treatment of strip rolled stock, is preferably provided with at least two pairs of identical electrodes mounted on holders, the electrodes being preferably mounted pair-wise symmetrically with respect to a plane drawn at right angles with respect to the direction of movement of the rolled stock substantially through the middle of the treatment zone of the rolled stock.
  • This construction of the apparatus allows cleaning of strip rolled stock to be carried out with any section of the stock at a desired speed owing to the parallel and consecutive coverage of the surface being treated during movement of the rolled stock by arc discharges.
  • the apparatus be provided with additional electrodes mounted symmetrically with respect to the main electrodes on the opposite side of the rolled stock.
  • This facility allows the two-sided treatment of the strip stock to be carried out simultaneously.
  • the apparatus in case the apparatus has at least two electrodes, the apparatus be provided with a switch for switching the current supply members of these electrodes which is capable of ensuring permanent contact of at least one electrode with the power supply.
  • This switch is used for reversing the direction of electric field in the discharge gap without interruption of the arc so as to achieve the directional movement of the electrode spots of the arc along the part without moving the electrodes.
  • an apparatus for carrying out the method for electric arc treatment of parts comprising at least one electrode mounted on a holder connected by means of a current supply member to one lead of the power supply having the other lead connected to a part being treated, and an arc excitation system, according to the invention, is provided with at least one means for creating on the surface of the part or/and at least one electrode during arcing, areas with electrical potential which is higher or/and lower than the potential of the rest of the surface and for moving these areas along said surface, said means being connected to the power supply, and with a means for limiting movement of plasma of the arc discharge to the treatment zone of the part and/or the working surface of at least one electrode.
  • said means for creating, during arcing, areas with a higher or/and lower electrical potential with respect to the potential of the rest of the surface on the surface of the part or/and electrode and for moving these areas along said surface (or surfaces), as well as a means for limiting movement of plasma of the arc in the apparatus according to the invention ensures movement of the extremum potential of the electrode spots of the arc to follow up said areas and eliminates movement of these spots to other areas of the part and/or electrode so as to ensure treatment of a selected zone of the part in accordance with a preset program.
  • the means for creating, during arcing, areas with a higher or/and lower electric potential on the surface of the part and for moving these areas along said surface be in the form of at least two current supply members connected to different portions of the part and a switch of these current supply members which is capable of ensuring permanent contact between the part and the power supply.
  • the means for creating, during arcing, areas with higher or/and lower electrical potential on the surface of the electrode and for moving these areas along said surface may be in the form of at least two current supply members connected to different areas of the electrode, and a switch of these current supply members which is capable of ensuring permanent contact between the electrode and the power supply.
  • the current supply members be connected to the part or/and electrode symmetrically with respect to the treatment zone of the part or/and working surface of the electrode.
  • the means for limiting movement of plasma of the arc discharge to the treatment zone and/or the working surface of at least one electrode be made in the form of screens insulated from the electric circuit, positioned in a spaced relation to the part and/or electrode, and protecting portions of the part that do not have to be treated and/or non-working surface of the electrode, at least those portions of the screens which are located adjacent to the treatment zone of the part and/or working surface of the electrode being either made of a high-temperature material or positively cooled.
  • the form and position of the screens may vary.
  • the screens are preferably mounted in these holes.
  • the screens be positioned between the electrodes located on either side of the strip rolled stock being treated, the screens being installed in the spaces between the electrodes and the surface of the rolled stock being treated.
  • an apparatus for carrying out the method for electric arc treatment of parts comprising at least one electrode mounted on a holder, connected by means of a current supply member to one lead of a power supply having its second lead connected by means of at least one other current supply member to a part being treated, and an arc excitation system, according to the invention, is provided with a means for compression or partial restriction of the area of the arc discharge in the space between the part being treated and the electrode and with a mechanism for relative movement of the part and said means for compression or partial restriction of the area of the arc discharge.
  • said means for compression or partial restriction of the area of the arc discharge in the space between the part being treated and the electrode and the mechanism for relative movement of the part and said means allows the desired treatment of the part to be carried out in accordance with a preset program owing to the movement of the electrode spots along the part to follow up the area of compression or partial restriction of the arc.
  • the means for compression of the area of the arc discharge in the space between the part being treated and the electrode be in the form of a screen positioned between the electrode and the part and having an opening corresponding to the area of the part being treated.
  • the electrode spots of the arc are thus shifted along the part towards the current supply member and are concentrated adjacent to the boundary of the screen, and, during the relative movement of the part being treated and the screen, these spots carry out the desired treatment of the desired surface of the part.
  • a method for electric arc treatment of parts resides in the fact that a part 1 to be treated (Fig. 1) is placed into a vacuum chamber (not shown in the drawing), and part 1 and at least one electrode 2 surrounding part 1 arc connected to a power supply 3.
  • An arc discharge is excited under a pressure of a medium below 10 Pa between part 1 and electrode 2 in the mode of a drooping portion of the volt-ampere characteristic of the arc or, which is an equivalent, a power supply 3 is used which has a drooping external volt-ampere characteristic.
  • Arc excitation is effected by injecting a small amount of plasma into the interelectrode gap to form a conducting path between part 1 and electrode 2, e.g., by opening up the contact between electrode 2 and an auxiliary firing electrode 4 having its current limited by means of a resistor 5.
  • the arcing mode is set up by controlling discharge current, e.g., by means of a ballast rheostat 6.
  • a difference of potential of electric field equal or close to zero is created on the surface of the treatment zone of part 1 and on the working surface of electrode 2.
  • This can be achieved by connecting part 1 to power supply 3 by means of two current supply members 7 and 8 connected to part 1 symmetrically with respect to its treatment zone, electrically connected to each other and to one lead of power supply 3 and by connecting electrode 2 to power supply 3 by means of similar symmetrically connected current supply members 9 and 10.
  • the area of movement of plasma of the arc is limited to the treated zone of part 1 e.g., by means of screens 11 and 12 and to the working surface of electrode 2, e.g., by means of a screen 13.
  • Electrode especially cathode spots of the arc at a pressure of a medium below 10 Pa, including the purely vacuum discharge, continually spontaneously move along the surface of part 1 and electrode 2 and, if the arc is excited in the mode of a drooping portion of its volt-ampere characteristic, or if the discharge is supplied by a power supply 3 having a drooping external volt-ampere characteristic, mobility of the spots is substantially enhanced.
  • This phenomenon which is most frequently undesired in case of a low-pressure arc, is used in the method according to the invention to achieve the useful result - uniform or otherwise programmed treatment of the part surface.
  • the embodiment of the method is characterized by extreme simplicity of an apparatus for its implementation, and electrode 2 may be in the form of the inner surface of the vacuum chamber.
  • electrode 2 may be in the form of the inner surface of the vacuum chamber.
  • a method for electric arc treatment of parts in the second embodiment differs from that described above in that, during arcing, a difference of potentials of electric field other then zero is created on the surface of a part 14 (Fig. 2), and areas with the highest or lowest potential are directionally moved in accordance with a preset program depending on polarity of the electric arc treatment. It should be noted that the electrode spots of the arc move directionally to follow up these areas of extremum potential along the surface of part 14 so as to ensure treatment of part 14 in accordance with a preset program, and a casing of a vacuum chamber along which the discharge is sufficiently uniformly distributed over the whole inner surface is used as an electrode 15 (cathode).
  • Another application of the second embodiment of the method according to the invention differs from that described above by the fact that, during arcing, a difference of potentials of electric field other than zero is created on the surface of at least one electrode 16 (Figs. 3,4), and areas with the highest or lowest potential depending on polarity of the electric arc treatment are directionally moved in accordance with a preset program.
  • the electrode spots of the arc will directionally move to follow up these areas of extremum potential along the surface of electrode 16 (Figs. 3,4), and the surface of the treatment zone of a part 17, depending on specific application, is either sufficiently uniformly surrounded by a plasma cloud, or the electrode spots of the arc move directionally therealong to follow up the electrode spots moving along electrode 16.
  • a difference of potentials of electric field be provided by supplying electric current to areas of part 14 (Fig.2) or electrode 16 (Figs.3,4) remote from the zone in which electrode spots of the arc are located, and that movement of the areas of the highest or/and lowest potential of electric field be effected by varying position of current supply zones on part 14 (Fig.2) or electrode 16 (Figs.3,4), e.g., by means of current supply members 18, 19, 20 (Figs.2,3) connected to different portions of part 14 (Fig.2) or electrode 16 (Figs.3,4) and by means of a switch 21 (Figs.2,3) of these current supply members which is capable of ensuring permanent contact between part 14 (Fig.2) or electrode 16 (Figs.3,4) on the one hand and power supply 3 (Figs.2,3,4) on the other.
  • the gist of this step of providing and moving the areas of extremum electric potential ensuring movement of the electrode spots of the arc is in the following.
  • Supplying electric current to areas of part 14 (Fig. 2) or electrode 16 (Figs. 3,4) remote from the zone of location of the electrode spots of the arc causes current to flow through parts 14 (Fig. 2) or electrode 16 (Figs. 3,4) whereby the equilibrium distribution of charges on their surface is brloken, and a tangential component of intensity of electric field emerges.
  • the current supply members 18, 19, 20 (Figs. 2,3,4) are switched by switch 21 to change the position of current supply zones on part 14 (Fig. 2) or electrode 16 (Figs. 3,4), areas of extremum potential will move on the surface of the part and electrode, and the electrode spots of the discharge will follow suit.
  • the time during which each of the current supply members 18, 19, 20 is energized may be the same or different so as to treat part 14 (Fig.2) or part 17 (Fig. 4) in accordance with a preset program.
  • both the above-described embodiments of the method according to the invention may be used for treating elongated parts.
  • part 1 (Fig. 1) or part 17 (Figs. 3,4) should be moved relative to electrode 2 (Fig. 1) or electrode 16 (Figs. 3,4), respectively, or/and electrode 2 (Fig. 1) or electrode 16 (Figs. 3,4) should be moved relative to part 1 (Fig. 1) or part 17 (Fig. 4), respectively, so as to ensure uniform or otherwise movement-programmed electric arc treatment of elongated parts along the whole length thereof.
  • the third embodiment of the method differs from those described above by the fact that an area occupied by arc discharge plasma is positively compressed or partly restricted in the space between the part being treated and at least one electrode, and this area is moved in accordance with a preset program with respect to the part or/and the part is moved with respect to this area of the arc discharge.
  • the positive compression of the area occupied by plasma of the arc discharge in the space between a part 22 being treated (Fig. 5) and an electrode 23 is preferably carried out by means for compression of this area of the arc discharge in the form of a screen 24 positioned between electrode 23 and part 22 and having an opening 25 corresponding to a treatment zone 26 of part 22, and movement of this area of the arc with respect to part 22 or/and movement of part 22 with respect to this area is carried out by means of a mechanism 27 for their relative movement which in this case is connected to screen 24.
  • This step of the electric arc treatment is based on the fact that when the electrode spots of the arc move beyond the limits of treatment zone 26 of part 22 disposed opposite to opening 25 and corresponding to the shape of opening 25 of screen 24, the length of the discharge column increases to result in its increased resistance and to impair conditions for arcing. The electrode spots will thus either move back to portion 26 or disappear. In the latter case, new electrode spots of the arc are formed in zone 26 through splitting of the available electrode spots.
  • zone 26 disposed opposite to opening 25 moves along part 22.
  • FIG. 3, 4 and 6,7 An example of partial restriction of the area of the arc discharge in the space between the part and electrode is shown in Figs. 3, 4 and 6,7 where such restriction is achieved by means of a screen 28 (Fig. 4) positioned between electrode 16 and part 17 of a screen 28' (Fig. 7) positioned between electrodes 29,30,31 (Figs. 6,7) and part 17 to cover a portion of this part 17 between the treatment zone and a current supply member 32 of the part, the current being supplied to part 17 on the side opposite to the side of arc excitation.
  • the electrode spots of the arc move along paint 17 towards current supply member 32 and concentrate adjacent to the boundary of screen 28, 28', and in case of the relative movement of part 17 and screen 28 with electrode 16 (Fig. 4) or screen 28' (Fig.7) with electrodes 29, 30, 31 (Figs. 6, 7) the necessary treatment of the desired surface of part 17 is achieved by these spots.
  • Another approach to the positive movement of the electrode spots of the arc used in this method resides in the fact that, in case at least two electrodes are used, the value of electric current is lowered, or the electric current is interrupted in accordance with a preset program in the circuit of at least one electrode, the current in the circuit of the electrodes remaining unchanged or being increased.
  • Current can be interrupted in this manner in the circuit of electrodes 29, 30, 31 (Fig.6) by means of a switch 21 of current supply members 33, 34, 35 of these electrodes 29, 30, 31 as described above, and current can be decreased or increased in the circuit of these electrodes 29, 30, 31 in the most simple manner by means of rheostats (not shown in the drawing) connected in series with current supply members 33, 34, 35.
  • a part being treated can be connected either to negative or to positive terminal of power supply 3, except for examples shown in Figs. 2 and 6,7 in which it is preferred that part 14 (Fig. 2) or part 17 (Figs. 6,7) be connected to the negative terminal of power supply 3.
  • part 14 Fig. 2
  • part 17 Figs. 6,7
  • erosion of the electrode 15 which functions as the casing of the vacuum chamber (Fig. 2), will take place under the action of the cathode spots, and in the example shown in Figs.
  • arc breakage can occur during switching of electrodes 29,30,31, and the probability of such breakage increases with an increase in the switching rate since the cathode spot of the arc may not have time to form on the switched electrodes 29,30,31, and this spot is decisive for discharge to occur.
  • the negative polarity of the part is preferably used for its cleaning, descaling and deburring and for varporization of the material of the part and the positive polarity is preferably used for heating, welding, cutting, and polishing of parts.
  • the process of electric arc cleaning is based on the fact that the cathode spots of the arc are moved along the surface of the part being treated, the temperature in the area of the spots being as high as 3000 to 5000 °C.
  • the cathode spots move at a speed of 10 ⁇ 2 to 102 m/s depending on the kind of scale and contamination of the surface of the part, and they remove scale and vaporize it as they move so as to clean the surface. Deburring and removal of minor irregularities from the surface of parts occurs in the same manner.
  • the arc current and treatment time during the treatment be maintained at a level at which the specific energy consumption should be within the range from 0.1 to 0.8 kW-h/m2/ »m so as to ensure complete removal of scale from the surface being cleaned without appreciable erosion of the part being treated and with a high enough productivity of the process.
  • the apparatus also comprises a means for creating, during arcing, a difference of potentials of electric field equal or close to zero on the surface of the treatment zone of part 1, which is in the form of two current supply members 7 and 8 connected to part 1 symmetrically with respect to the treatment zone, electrically connected to each other and connected to the negative terminal of power supply 3, and a means for creating a difference of potentials of electric field equal or close to zero on the working surface of electrodes 36, 37 in the form of current supply members 40, 41, 42 (Fig. 9) and 43, 44, 45 (Fig. 10) electrically connected to one another and connected to the positive terminal of power supply 3 (Fig.
  • Electrodes 36, 37 are mounted for movement with respect to each other for controlling the width of the treatment zone, and part 1 is capable of reciprocating during the treatment by means of a mechanism 46. At least the portion of part 1 being treated, electrodes 36, 37, firing electrode 4, and screens 38, 39 are mounted inside a vacuum chamber (not shown in the drawing).
  • the apparatus is used for the implementation of the first embodiment of the method according to the invention and functions in the following manner.
  • the cleaning process is based on the fact that the cathode spots of the arc move along the surface being treated of part 1, and temperature at these spots is as high as 3000 to 5000°C.
  • the cathode spots move at a speed of 10 ⁇ 2 to 102 m/s depending on the kind of scale and contamination of the surface of part 1 and remove scale and vaporize it as they move thus cleaning the surface.
  • the best cleaning quality is ensured by making choice of the arcing conditions, distance between electrodes 36 and 37, and speed of movement of part 1.
  • FIG. 11 An apparatus for electric arc treatment, preferably for cleaning of strip rolled stock is shown in Figs. 11, 12, 13.
  • the apparatus comprises a vacuum chamber 47 (Fig. 11) accommodating in its casing electrodes 48 and firing electrodes 4 and 4'. Electrodes 48 are rigidly mounted on a common holder (not shown in the drawings).
  • the end parts of vacuum chamber 47 incorporate an inlet lock system 49 and an outlet lock system 50.
  • Vacuum chamber 47 is connected, by means of pipelines 51, to a vacuum pump 52 of a vacuum system.
  • Driven pull rollers 53 and 54 are mounted at the inlet and outlet of lock systems 49 and 50, respectively, and are designed for transporting (with tension) strip stock 55 with respect to electrodes 48.
  • the apparatus is also provided with a means for creating, during arcing, a difference of potentials of electric field equal, or close to zero on the surface of the treatment zone of rolled stock 55, which is in the form of current supply members 7' and 8' connected to the rolled stock 55 being treated symmetrically with respect to the treatment zone, electrically connected to each other and connected to the negative terminals of power supplies 3 having their positive terminals connected to electrodes 48.
  • Electrodes 48 are made in the form of at least one pair (four pairs in this embodiment) of mirror-parallel prisms having their facets facing each other which are inclined at an angle of 35 to 85° and which have their working surfaces positioned symmetrically with respect to the axis of strip stock 55 and in parallel with this axis as shown in Fig. 13. If there are two or more pairs of electrodes 48 in the form of mirror-parallel prisms in the apparatus, they are mounted along the path of movement of strip rolled stock 55 (Fig. 12).
  • auxiliary electrodes 56 (Figs. 11, 12, 13) mounted symmetrically with respect to the main electrodes 48 on the opposite side of rolled stock 55 and connected to power supplies 3 similarly to electrodes 48.
  • Positively cooled screens 57 are designed for limiting movement of plasma of the arc discharge to the treatment zone of rolled stock 55 and to the working surface of electrodes 48 and 56. With the two-sided treatment (cleaning) fof rolled stock, these screens 57 should be preferably placed between electrodes 48 and 56 mounted on the opposite sides of rolled stock 55 (Fig. 13) with a gap to lateral sides of rolled stock 55. It is preferred that screens 57 be secured to the outer facets of electrodes 48 and 56 and insulated therefrom by means of insulating sleeves 58 (Fig. 13). Hoppers 59 having vacuum-tight gates 60 are provided in the bottom part of the casing of vacuum chamber 47.
  • Strip stock 55 (Fig. 11) is fed by means of pull rollers 53 and 54 to vacuum chamber 47 and is positioned under tension in the space between electrodes 48 and 56.
  • Vacuum pump 52 reduces pressure to a level below 10 Pa in vacuum chamber 47 through pipeline 51.
  • Power supplies 3 are turned on, and an arc discharge is initiated between electrodes 48, 56 and strip stock 55 by means of firing electrodes 4 and 4'.
  • pull rollers 53 and 54 start transporting strip stock 55 through vacuum chamber 47.
  • the exposure to the arc discharge results in a for action of scale being reduced to pure metal, the rest of the scale being vaporized and deposited on the walls of chamber 47.
  • This fraction of the scale is removed by brushes to the bottom of chamber 47, into hoppers 59 having special lock chambers with gates 60, and is transferred outside the chamber without loss of tightness of chamber 47.
  • the released gas it is removed by continually operating pumps.
  • electrodes 48, 56 in the form of truncated mirror-positioned prisms brings solution simultaneously to two problems: on the one hand it allows eroded fraction to leave the arcing zone unobstructed and do not allow it to be deposited on electrodes 48, 56 (the range of the prism facet inclination angle was discussed above) and, on the other hand, this facility provides uniform electric field adjacent to the cathode surface, i.e., on strip stock 55 being cleaned so as to create conditions for uniform distribution of the cathode spots on this surface to ensure high-quality cleaning of the surface.
  • the number of cathode spots is proportional to the discharge current, but it is not infinite.
  • the above-described apparatus can be used for cleaning strip rolled stock by electric arc discharge in vacuum in dealing with medal strips of ferrous and non-ferrous metals and alloys with high-quality and uniform cleaning of both surfaces of strip stock since power supplies 3 can work independently.
  • Strip stock 55 treated by electric arc discharge in vacuum has good vendible appearance; its corrosion resistance is enhanced and surface area is increased which is especially important for coating deposition.
  • Electrodes 61 and 62 in the form of mirror-parallel prisms are installed pairwise symmetrically with respect to a plane 63 (Fig. 16) drawn at right angles with respect to the direction of movement of strip stock 64 through the middle of the treatment zone of this rolled stock 64, the adjacent electrodes 61 or 62 (Fig. 15) being mounted with respect to each other for covering the treatment zone of each of the arc discharges by the treatment zone of at least one other discharge, and screens 65 and 66 (Figs. 14, 15, 16) are positioned in spaces between electrodes 61, 62 and the surface being treated of strip stock 64.
  • This construction of the apparatus allows cleaning of strip rolled stock of any section to be carried out at a desired speed owing to the parallel and consecutive coverage of the surface being treated during movement of the rolled stock.
  • the methods and apparatuses for electric arc treatment of parts according to the invention ensure the provision of ecologically safe production processes for descaling, cleaning and deburring of parts, for heating, welding and cutting various parts and for any other kinds of electric arc treatment of parts with moving arc in vacuum. It should be noted that movable electrode or external fields are not required for moving the arc, which simplifies the equipment.
  • Welding of various parts in vacuum according to the invention allows edges of parts being welded to be preliminary cleaned, and reaction of molten metal with the medium is ruled out so as to enhance quality of welded joint, especially in welding parts of active materials such as titanium and its alloys.
  • the methods and apparatuses according to the invention allow production processes to be carried out both on the Earth and in space and may be used as the basis for the development of promising advanced production equipment for various fields of technology.
  • the invention may be used in the mechanical engineering, metallurgy, electrical engineering and electronic technology for cleaning and activation of surfaces before application of coatings, for improvement or tempering of the surface layer, for deburring, welding and cutting of parts, etc.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Claims (28)

  1. Verfahren zum Lichtbogenabtragen bei Werkstücken (1; 14; 17; 22) bestehend darin, daß das Werkstück und mindestens eine Elektrode (2; 15; 16; 23; 29-31) an die Speisequelle (3) angeschlossen werden und eine Lichtbogenentladung zwischen dem Werkstück und mindestens einer Elektrode bei einem Druck des Umgebungsmediums unterhalb des atmosphärischen unter Bildung eines mindestens entlang der Kathode wandernden Plasmas initiiert wird, ist dadurch gekennzeichnet, daß
    a) der Druck des genannten Mediums unter 10 Pa liegt;
    b) die Lichtbogenentladung im Betrieb mit einem fallenden Ast der Stromspannungskennlinie des Lichtbogens initiiert und/oder eine Speisequelle (3) mit fallender äußerer Stromspannungskennlinie verwendet wird;
    c1) beim Brennen da Lichtbogens eine Null gleiche oder nahe Potentialdifferenz des elektrischen Feldes zumindest an der bearbeiteten Oberfläche des Werkstücks (1) und/oder an der Arbeitsfläche mindestens einer Elektrode (2), oder
    c2) an der bearbeiteten Oberfläche des Werkstücks (14, 17) oder/und an der Arbeitsfläche mindestens einer Elektrode (15, 16) eine von Null unterschiedlichen Potentialdifferenz des elektrischen Feldes geschaffen wird, wobei die Bereiche mit dem höchsten oder/und niedrigsten Potential entlang der bezeichneten bearbeiteten und/oder bezeichneten Arbeitsoberfläche wandern, und
    c3) an den Werkstücken (17, 22) und mindestens eine Elektrode (16, 23, 29-31) begrenzt wird, der genannte Bereich oder/und das Werkstück gemäß dem genannten Programm umeinander verschoben werden, und
    d) der Wanderungsbereich des Plasmabogens durch die bearbeitete Oberfläche der Werkzeugs und/oder die Arbeitsfläche mindestens einer Elektrode begrenzt wird.
  2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß gemäß Schritt (c2) die Potentialdifferenz des elektrischen Feldes durch Zuführen elektrischen Stroms zu den von den Kathodenflecken des Bogens entfernt liegenden Bereichen des Werkstücks (14) oder/und der Elektrode (16) erzeugt und die Wanderung der Bereiche mit dem höchsten oder/und niedrigsten Potentials des elektrischen Feldes durch Änderung der Lage der Stromzuführungszonen auf dem Werkstück (14) oder/und der Elektrode (16) verwirklicht wird.
  3. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß das Werkstück bezüglich mindestens einer Elektrode oder/und mindestens eine Elektrode bezüglich des Werkstücks bewegt wird.
  4. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß mindestens zwei Elektroden (29, 30, 31) verwendet werden und die Größe des elektrischen Stromes im Stromkreis mindestens einer oder irgendeiner Elektrode (29, 30, 31) in Übereinstimmung mit dem gewählten Programm verringert oder unterbrochen wird, wobei der elektrische Strom im Stromkreis der anderen Elektroden unverändert bleibt oder zunimmt.
  5. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß das bearbeitete Werkstück (1, 14, 17, 22) an den Minuspol der Stromquelle (3) angeschlossen wird.
  6. Einrichtung für die Durchführung des Verfahrens zum Lichtbogenabtragen nach Anspruch 1, die mindestens eine an einem Halter befestigte Elektrode (36, 37, 48, 56, 61, 62) enthält, die mittels einer Stromzuführung (40, 41, 42, 43, 44, 45) mit einem Anschluß der Stromquelle (3) verbunden ist, deren anderer Anschluß an das zu bearbeitende Werkstück (1, 55, 64) angeschlossen ist, und ein System der Lichtbogenzündung enthält, dadurch gekennzeichnet, daß es mindestens mit einem an die Stromquelle (3) angeschlossenen Mittel zur Erzeugung einer Null gleichen oder nahen Potentialdifferenz des elektrischen Feldes zumindest auf der Oberfläche des Bearbeitungsbereichs des Werkstücks (1, 55, 64) und/oder der Arbeitsfläche mindestens einer Elektrode (36, 37) beim Brennen des Lichtbogens, daß und mit einem Mittel zur Begrenzung der Wanderung des Lichtbogenplasmas auf den Bearbeitungsbereich des Werkstücks (1, 55, 64) und/oder die Arbeitsfläche mindestens einer Elektrode (36, 37, 48, 56, 61, 62) ausgestattet ist.
  7. Einrichtung nach Anspruch 6, dadurch gekennzeichnet, daß das Mittel zur Erzeugung einer Null gleichen oder nahen Potentialdifferenz des elektrischen Feldes mindestens auf der Oberfläche des Bearbeitungsbereichs des Werkstücks (1, 55, 64) beim Brennen des Lichtbogens in Form von mindestens zwei Stromzuführungen (7, 8, 7', 8') ausgebildet ist, die an da Werkstück (1, 55, 64) symmetrisch in bezug auf den Bearbeitungsbereich angeschlossen, miteinander elektrisch verbunden und an einen der Anschlüsse der Stromquelle (3) gelegt sind.
  8. Einrichtung nach Anspruch 6, dadurch gekennzeichnet, daß das Mittel zur Erzeugung einer Null gleichen oder nahen Potentialdifferenz des elektrischen Feldes mindestens an der Arbeitsfläche mindestens einer Elektrode (36, 37) beim Brennen des Lichtbogens in Form von mindestens zwei Stromzuführungen (40, 41, 42, 43, 44, 45) ausgebildet ist, die an die Elektrode (36, 37) symmetrisch in bezug auf den Bearbeitungsbereich des Werkstücks (1) oder die Arbeitsfläche der Elektrode (36, 37) angeschlossen, miteinander elektrisch verbunden und an den Anschluß der Stromquelle (3) gelegt sind, der dem Anschluß entgegengesetzt ist, an den die Stromzuführungen (7, 8) des Werkstücks (1) geschaltet sind.
  9. Einrichtung nach Anspruch 6, dadurch gekennzeichnet, daß beim Vorhandersein von mindestens zwei Elektroden (36, 37) diese symmetrisch in bezug auf den Arbeitsbereich angeordnet sind.
  10. Einrichtung nach Anspruch 10, dadurch gekennzeichnet, daß beim Vorhandensein von mindestens zwei Elektroden (36, 37) sie verschiebbar zueinander angeordnet sind, um die Breite des Bearbeitungsbereichs regeln zu können.
  11. Einrichtung nach Anspruch 9 und/oder nach Anspruch 10, dadurch gekennzeichnet, daß während des Lichtbogenabtragens bei Werkstücken (1) mit der Form eines Rotationskörpers, die Elektroden (36, 37) in Form gleichachsig angeordneter Kegelstümpfe mit Koaxialbohrungen zur Unterbringung des Werkstücks (1) in ihnen ausgeführt sind, deren Deckflächen einander zugewandt sind und deren Winkel zwischen Mantellinie und Höhe 35-85° beträgt.
  12. Einrichtung nach Anspruch 8 und 11, dadurch gekennzeichnet, daß die Stromzuführungen (40, 42, 42, 43, 44, 45) zu den Elektroden (36, 37) an die Grundflächen der Kegelstümpfe als Elektroden (36, 37) angeschlossen sind, wobei die Stromzuführungen (40, 41, 42) an eine der Elektroden (36) mit einer Versetzung um den halben Abstand zwischen den Stromzuführungen (43, 44, 45) der anderen Elektrode (37) angeschaltet sind.
  13. Einrichtung nach Anspruch 6, dadurch gekennzeichnet, daß während des Lichtbogenabtragens bei Walzgut (55, 64) die Elektroden (48, 56, 61, 62) in Form mindestens eines Paares spiegelbildlich paralleler Prismen mit einem Neigungswinkel der einander zugewandten Flächen von 35-85° ausgeführt sind.
  14. Einrichtung nach Anspruch 13, dadurch gekennzeichnet, daß während des Lichtbogenabtragens bei Bandgut (55) die Elektroden (48) mit den Arbeitsflächen symmetrisch zu der Achse des Bandgutes (55) und parallel zu dieser Achse angeordnet sind.
  15. Einrichtung nach Anspruch 14, dadurch gekennzeichnet, daß bei Vorhandensein von mindestens zwei Elektrodenpaaren (48), die als spiegelbildlich parallele Prismen ausgeführt sind, sie in Bewegungsrichtung des Bandgutes (55) angeordnet sind.
  16. Einrichtung nach Anspruch 6, dadurch gekennzeichnet, daß bei Vorhandensein von mindestens zwei Elektroden (61) sie in bezug aufeinander derart angeordnet sind, daß der Bearbeitungsbereichs jeder der Lichtbogenentladungen durch den Bearbeitungsbereich mindestens einer weiteren Lichtbogenentladung überdeckt werden kann.
  17. Einrichtung nach Anspruch 13 und 16, dadurch gekennzeichnet, daß während des Lichtbogenabtragens bei Bandgut (64) sie mindestens zwei Paare an Haltern befestigte Elektroden (61) enthält, wobei die Elektroden paarweise symmetrisch zu einer zur Bewegungsrichtung des Bandgutes (64) senkrechten Ebene (63) angeordnet sind, die praktisch durch die Mitte des Bearbeitungsbereichs des Bandguts (64) gelegt ist.
  18. Einrichtung nach Anspruch 13 und 17, dadurch gekennzeichnet, daß während eines zweiseitigen Abtragens des Bandgutes (55, 64) sie mit zusätzlichen Elektroden (56, 62) versehen ist, die symmetrisch zu da Hauptelektroden (48, 61) von der entgegengesetzten Seite des Walzgutes (55, 64) angeordnet sind.
  19. Einrichtung nach Anspruch 6 oder Anspruch 9 für die Durchführung des Verfahrens nach Anspruch 4, die mindestens zwei Elektroden (29, 30, 31) enthält, dadurch gekennzeichnet, daß der Umschalter (21) der Stromzuführungen (33, 34, 35) der Elektroden (29, 30, 31) die ständige Kontaktführung mindestens einer der Elektroden (29, 30, 31) mit der Stromquelle sichert.
  20. Einrichtung für die Durchführung des Verfahrens zum Lichtbogenabtragen bei Werkstücken nach Anspruch 1, die mindestens eine an einem Halter befestigte Elektrode (15, 16), die mit einer Stromzuführung (18, 19, 20) mit einem Anschluß der Stromquelle (3) verbunden ist, deren zweiter Auschluß an das Werkstück (14, 17) gelegt ist, und ein System zur Lichtbogenzündung enthält, dadurch gekennzeichnet, daß sie mit mindestens einem Mittel zur Erzeugung von Bereichen mit einem höheren oder/und niedrigeren elektrischen Potential bezüglich des Potentials der übrigen Oberfläche auf der Oberfläche des Werkstücks (14) beim Brennen des Lichtbogens oder/und mindestens einer Elektrode (16) und zur Bewegung dieser Bereiche auf der genannten Oberfläche, das mit der Stromquelle (3) elektrisch verbunden ist, und mit einem Mittel zur Begrenzung der Wanderung des Lichtbogenplasmas auf den Bearbeitungsbereich des Werkstücks (14) und/oder auf die Arbeitsfläche mindestens einer Elektrcde (16) versehen ist.
  21. Einrichtung nach Anspruch 20 für die Durchführung des Verfahrens nach Anspruch 2, dadurch gekennzeichnet, daß das Mittel zur Erzeugung von Bereichen mit einem höheren oder/und niedrigeren Potential auf der Oberfläche des Werkstücks beim Brennen des Lichtbogens und zur Bewegung dieser Bereiche auf der genannten Oberfläche in Form von mindestens zwei an verschiedene Bereiche des Werkstücks (14) gelegte Stromzuführungen (18, 19, 20) und eines mit der Möglichkeit einer ständigen Kontaktführung des Werkstücks (14) mit der Stromquelle (3) ausgeführten Umschalters (21) dieser Stromzuführungen ausgebildet ist.
  22. Einrichtung nach Anspruch 20 für die Durchführung des Verfahrens nach Anspruch 2, dadurch gekennzeichnet, daß das Mittel zur Erzeugung von Bereichen mit einem höheren oder/und niedrigeren Potential auf der Oberfläche mindestens einer Elektrode (16) beim Brennen des Lichtbogens und zur Bewegung dieser Bereiche auf der genannten Oberfläche in Form von mindestens zwei an verschiedene Bereiche der Elektrode (16) gelegten Stromzuführungen (18, 19, 20) und eines mit der Möglichkeit der ständigen Kontaktführung der Elektrode (16) mit der Stromquelle (3) ausgeführten Umschalters dieser Stromzuführungen (21) ansgebildet ist.
  23. Einrichtung nach Anspruch 21 und/oder 22, dadurch gekennzeichnet, daß die Stromzuführungen (18, 19, 20) an das Werkstück (14) und/oder die Elektrode (16) symmetrisch um den Bearbeitungsbereich de Werkstücks (14) und/oder die Arbeitsfläche der Elektrode (16) angeschlossen sind.
  24. Einrichtung nach Anspruch 6 und 20, dadurch gekennzeichnet, daß das Mittel zur Begrenzung der Wanderung des Lichtbogenplasmas auf dem Bearbeitungsbereich des Werkstücks (1, 14, 55, 64) und/oder auf der Arbeitsfläche mindestens einer Elektrode (2, 16,36, 37, 48, 56, 61, 62) in Form von Abschirmungen (11, 12, 13, 38, 39, 57, 65, 66) ausgeführt ist, die mit Abstand gegen das Werkstück (1, 14, 55, 64) und/oder mindestens eine Elektrode (2, 16, 36, 37, 48, 56, 61, 62) angeordnet sind, die Teile des Werkstücks (1, 14, 55, 64) außerhalb des Bearbeitungsbreichs und/oder die unwirksame Oberfläche der Elektrode (2, 16, 36, 37, 48, 56, 61, 62) schützen, wobei mindestens die am Bearbeitungsbereich des Werkstücks (1, 14, 55, 64) und/oder an der wirksamen Fläche der Elektrode (2, 16, 36, 37, 48, 56, 61, 62) unmittelbar anliegenden Bereiche dieser Abschirmungen (11, 12, 13, 38, 39, 57, 65, 66) entweder aus einem hitzebständigen Werkstoff oder zwangsgekühlt ausgeführt sind.
  25. Einrichtung nach Anspruch 13 oder 14, oder/und 15 und den Ansprüchen 18 und 24, dadurch gekennzeichnet, daß bei einer zweiseitigen Bearbeitung des Bandguts (55) die Abschirmungen (57) zwischen den Elektroden (48, 56) montiert sind, die von verschiedenen Seiten des zu bearbeitenden Bandguts angeordnet sind.
  26. Einrichtung nach den Ansprüchen 15 bis 18 und 24, dadurch gekennzeichnet, daß bei der Bearbeitung des Bandguts (64) die Abschirmungen (65, 66) in den Spalten zwischen den Elektroden (61, 62) und der zu bearbeitenden Oberfläche des Bandgutes (64) angeordnet sind.
  27. Einrichtung für die Durchführung des Verfahrens zum Lichtbogenabtragen bei Werkstücken im Vakuum nach Anspruch 1, die mindestens eine am Halter befestigte Elektrode (16; 23; 29-31) enthält, die mit Hilfe mindestens einer Stromzuführung (18-20; 33-35) mit einem Anschluß der Stromquelle (3), dessen anderer Anschluß mit Hilfe mindestens einer anderen Stromzuführung (32) an das Werkstück (17; 22) und das System zur Lichtbogenzündung angeschlossen ist, dadurch gekennzeichnet, daß sie mit einem Mittel zur Verengung oder teilweisen Begrenzung des Lichtbogenbereichs im Zwischenraum zwischen dem Werkstück (17; 22) und mindestens einer Elektrode (16; 23; 29-31) und mit einer Vorrichtung (27) zur gegenseitigen Bewegung des Werkstücks und des genannten Mittels zur Verengung und teilweisen Begrenzung des Lichtbogenbereichs versehen ist.
  28. Einrichtung nach Anspruch 27, dadurch gekennzeichnet, daß das Mittel zur Verengung des Lichtbogenbereichs im Zwischenraum zwischen dem Werkstück (22) und der Elektrode (23) in Form einer zwischen der Elektrode (23) und dem Werkstück (22) angeordneten Abschirmung (24) mit einem dem Bearbeitungsbereich (26) des Werkstücks (22) entsprechenden Durchbruch (25) ausgeführt ist.
EP90308105A 1990-07-24 1990-07-24 Elektrische Lichtbogenbehandlung von Teilchen Expired - Lifetime EP0468110B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP90308105A EP0468110B1 (de) 1990-07-24 1990-07-24 Elektrische Lichtbogenbehandlung von Teilchen
DE69020553T DE69020553T2 (de) 1990-07-24 1990-07-24 Elektrische Lichtbogenbehandlung von Teilchen.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90308105A EP0468110B1 (de) 1990-07-24 1990-07-24 Elektrische Lichtbogenbehandlung von Teilchen

Publications (2)

Publication Number Publication Date
EP0468110A1 EP0468110A1 (de) 1992-01-29
EP0468110B1 true EP0468110B1 (de) 1995-06-28

Family

ID=8205500

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90308105A Expired - Lifetime EP0468110B1 (de) 1990-07-24 1990-07-24 Elektrische Lichtbogenbehandlung von Teilchen

Country Status (2)

Country Link
EP (1) EP0468110B1 (de)
DE (1) DE69020553T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101537524B (zh) * 2009-04-16 2010-11-10 西安交通大学 一种去除铁磁性管状材料表面氧化层的方法
DE102009052436A1 (de) * 2009-11-10 2011-05-12 Elena Nikitina Einrichtung für die Lichtbogenbehandlung der Oberfläche von Metallerzeugnissen

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2028841C1 (ru) * 1991-07-23 1995-02-20 Научно-технический комплекс "Элион" Способ обработки изделий и устройство для его осуществления
US5393575A (en) * 1992-03-03 1995-02-28 Esterlis; Moisei Method for carrying out surface processes
IL119634A (en) * 1996-11-18 2000-12-06 Omerco Ltd Method and apparatus for the treatment of surfaces of large metal objects
RU2152271C1 (ru) * 1999-06-29 2000-07-10 Сенокосов Евгений Степанович Устройство для очистки поверхности изделий дуговым разрядом
EP3391031B1 (de) 2015-12-17 2021-11-10 Oulun Yliopisto Vorrichtung und verfahren zum optischen erfassen von emissionen eines plasmas in einer leitenden flüssigkeit mittels zweier elektroden mit unterschiedlich grossen kontaktflächen in kontakt mit der flüssigkeit

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2086788B (en) * 1980-10-30 1984-07-18 Vnii Metiznoi Pro Method of electric arc cleaning of stock
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
US4534921A (en) * 1984-03-06 1985-08-13 Asm Fico Tooling, B.V. Method and apparatus for mold cleaning by reverse sputtering
CA1330831C (en) * 1988-09-13 1994-07-19 Ashley Grant Doolette Electric arc generating device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
& JP-A-1 218 626 (HITACHI LTD) 31 August 1989 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101537524B (zh) * 2009-04-16 2010-11-10 西安交通大学 一种去除铁磁性管状材料表面氧化层的方法
DE102009052436A1 (de) * 2009-11-10 2011-05-12 Elena Nikitina Einrichtung für die Lichtbogenbehandlung der Oberfläche von Metallerzeugnissen
DE202009018474U1 (de) 2009-11-10 2011-12-05 Elena Nikitina Einrichtung für die Lichtbogenbehandlung der Oberfläche von Metallerzeugnissen

Also Published As

Publication number Publication date
DE69020553T2 (de) 1995-12-21
EP0468110A1 (de) 1992-01-29
DE69020553D1 (de) 1995-08-03

Similar Documents

Publication Publication Date Title
US6929727B2 (en) Rectangular cathodic arc source and method of steering an arc spot
EP1390964B1 (de) Dipol-ionenquelle
CA2205576C (en) An apparatus for generation of a linear arc discharge for plasma processing
EP0899772B1 (de) Kathodenbogen-Beschichtungsgerät
EP0905272A2 (de) Dampfphasenabscheidungsgerät mit kathodischem Lichtbogen (Ringförmige Kathode)
WO2004038754A2 (en) Method of cleaning ion source, and corresponding apparatus/system
US4769101A (en) Apparatus for surface-treating workpieces
EP0468110B1 (de) Elektrische Lichtbogenbehandlung von Teilchen
EP0818801A2 (de) Plasmabehandlungsgerät
EP0131367B1 (de) Verfahren und Einrichtung zum Bearbeiten von keramischen Werkstoffen
EP0063493B1 (de) Verfahren und Vorrichtung für die Bearbeitung von Werkstücken mittels Ionen
EP0560526B1 (de) Verfahren und Vorrichtung zur Oberflächenbehandlung
US7023128B2 (en) Dipole ion source
US6009829A (en) Apparatus for driving the arc in a cathodic arc coater
CA2016893C (en) Apparatus for the continuous etching and aluminum plating of stainless steel strips
AU3950900A (en) Rectangular cathodic arc source and method of steering an arc spot
US5948294A (en) Device for cathodic cleaning of wire
US5843293A (en) Arc-type evaporator
EP0677595A1 (de) Anlage zum vakuum-plasma-behandlen von werkstücken
EP0899773B1 (de) Kathodisches Bogen-Beschichtungsgerät mit einer Vorrichtung zur Bogenführung
RU2068305C1 (ru) Способ электродуговой обработки изделий и устройство для его осуществления
WO2024048261A1 (ja) イオンボンバードメント装置及びイオンボンバードメント処理方法
UA10775A (uk) Спосіб вакуумhо-дугового hаhесеhhя покриттів та пристрій для його здійсhеhhя
RU2026414C1 (ru) Способ обработки изделий
JPH0763689B2 (ja) 部品のアーク処理方法及びその装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19900816

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): BE CH DE FR GB IT LI

17Q First examination report despatched

Effective date: 19930422

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): BE CH DE FR GB IT LI

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRE;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.SCRIBED TIME-LIMIT

Effective date: 19950628

Ref country code: LI

Effective date: 19950628

Ref country code: CH

Effective date: 19950628

Ref country code: BE

Effective date: 19950628

Ref country code: FR

Effective date: 19950628

REF Corresponds to:

Ref document number: 69020553

Country of ref document: DE

Date of ref document: 19950803

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

EN Fr: translation not filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20010716

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20010718

Year of fee payment: 12

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20020724

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20030201

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20020724