SE0100336L - Adresseringsmetod och apparat som använder densamma tekniskt område - Google Patents

Adresseringsmetod och apparat som använder densamma tekniskt område

Info

Publication number
SE0100336L
SE0100336L SE0100336A SE0100336A SE0100336L SE 0100336 L SE0100336 L SE 0100336L SE 0100336 A SE0100336 A SE 0100336A SE 0100336 A SE0100336 A SE 0100336A SE 0100336 L SE0100336 L SE 0100336L
Authority
SE
Sweden
Prior art keywords
movable micro
potential
deltat
addressed
same technical
Prior art date
Application number
SE0100336A
Other languages
Unknown language ( )
English (en)
Other versions
SE0100336D0 (sv
Inventor
Ulric Ljungblad
Peter Duerr
Hubert Karl Lakner
Original Assignee
Micronic Laser Systems Ab
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronic Laser Systems Ab, Fraunhofer Ges Forschung filed Critical Micronic Laser Systems Ab
Priority to SE0100336A priority Critical patent/SE0100336L/sv
Publication of SE0100336D0 publication Critical patent/SE0100336D0/sv
Priority to PCT/SE2002/000142 priority patent/WO2002063371A1/en
Priority to JP2002563057A priority patent/JP2004520618A/ja
Priority to EP02710598A priority patent/EP1364246A1/en
Priority to US10/467,184 priority patent/US6885493B2/en
Publication of SE0100336L publication Critical patent/SE0100336L/sv

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
SE0100336A 2001-02-05 2001-02-05 Adresseringsmetod och apparat som använder densamma tekniskt område SE0100336L (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE0100336A SE0100336L (sv) 2001-02-05 2001-02-05 Adresseringsmetod och apparat som använder densamma tekniskt område
PCT/SE2002/000142 WO2002063371A1 (en) 2001-02-05 2002-01-28 A method and a device for reducing hysteresis or imprinting in a movable micro-element
JP2002563057A JP2004520618A (ja) 2001-02-05 2002-01-28 可動マイクロ素子におけるヒステリシス又は履歴効果を減少させるための方法と装置
EP02710598A EP1364246A1 (en) 2001-02-05 2002-01-28 A method and a device for reducing hysteresis or imprinting in a movable micro-element
US10/467,184 US6885493B2 (en) 2001-02-05 2002-01-28 Method and a device for reducing hysteresis or imprinting in a movable micro-element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0100336A SE0100336L (sv) 2001-02-05 2001-02-05 Adresseringsmetod och apparat som använder densamma tekniskt område

Publications (2)

Publication Number Publication Date
SE0100336D0 SE0100336D0 (sv) 2001-02-05
SE0100336L true SE0100336L (sv) 2002-08-06

Family

ID=20282834

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0100336A SE0100336L (sv) 2001-02-05 2001-02-05 Adresseringsmetod och apparat som använder densamma tekniskt område

Country Status (5)

Country Link
US (1) US6885493B2 (sv)
EP (1) EP1364246A1 (sv)
JP (1) JP2004520618A (sv)
SE (1) SE0100336L (sv)
WO (1) WO2002063371A1 (sv)

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KR101695034B1 (ko) 2008-05-28 2017-01-10 가부시키가이샤 니콘 공간 광 변조기의 검사 장치, 조명 광학계, 노광 장치, 검사 방법, 조명 광학계의 조정 방법, 조명 방법, 노광 방법, 및 디바이스 제조 방법
JPWO2010024106A1 (ja) * 2008-08-28 2012-01-26 株式会社ニコン 照明光学系、露光装置、およびデバイス製造方法
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WO2011078070A1 (ja) 2009-12-23 2011-06-30 株式会社ニコン 空間光変調ユニット、照明光学系、露光装置、およびデバイス製造方法
JP5842808B2 (ja) 2010-02-20 2016-01-13 株式会社ニコン 瞳強度分布を調整する方法
US20110205519A1 (en) * 2010-02-25 2011-08-25 Nikon Corporation Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method
KR102117986B1 (ko) 2010-09-27 2020-06-02 가부시키가이샤 니콘 공간 광변조기의 구동 방법, 노광용 패턴의 생성 방법, 노광 방법, 및 노광 장치
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US9061883B2 (en) 2010-11-15 2015-06-23 DigitalOptics Corporation MEMS Actuator motion control features
US8337103B2 (en) 2010-11-15 2012-12-25 DigitalOptics Corporation MEMS Long hinge actuator snubbing
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US8608393B2 (en) 2010-11-15 2013-12-17 DigitalOptics Corporation MEMS Capillary actuator deployment
US8884381B2 (en) 2010-11-15 2014-11-11 DigitalOptics Corporation MEMS Guard trench
US9515579B2 (en) 2010-11-15 2016-12-06 Digitaloptics Corporation MEMS electrical contact systems and methods
US8358925B2 (en) 2010-11-15 2013-01-22 DigitalOptics Corporation MEMS Lens barrel with MEMS actuators
US8521017B2 (en) 2010-11-15 2013-08-27 DigitalOptics Corporation MEMS MEMS actuator alignment
US8941192B2 (en) 2010-11-15 2015-01-27 DigitalOptics Corporation MEMS MEMS actuator device deployment
US9019390B2 (en) 2011-09-28 2015-04-28 DigitalOptics Corporation MEMS Optical image stabilization using tangentially actuated MEMS devices
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US9052567B2 (en) 2010-11-15 2015-06-09 DigitalOptics Corporation MEMS Actuator inside of motion control
US8430580B2 (en) 2010-11-15 2013-04-30 DigitalOptics Corporation MEMS Rotationally deployed actuators
US8803256B2 (en) 2010-11-15 2014-08-12 DigitalOptics Corporation MEMS Linearly deployed actuators
US8605375B2 (en) 2010-11-15 2013-12-10 DigitalOptics Corporation MEMS Mounting flexure contacts
US8947797B2 (en) 2010-11-15 2015-02-03 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
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TWI684788B (zh) 2011-06-13 2020-02-11 日商尼康股份有限公司 照明光學系統、曝光裝置以及元件製造方法
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KR102170875B1 (ko) 2011-10-24 2020-10-28 가부시키가이샤 니콘 조명 광학계, 노광 장치, 및 디바이스 제조 방법
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Also Published As

Publication number Publication date
SE0100336D0 (sv) 2001-02-05
US6885493B2 (en) 2005-04-26
JP2004520618A (ja) 2004-07-08
WO2002063371A1 (en) 2002-08-15
US20040150868A1 (en) 2004-08-05
EP1364246A1 (en) 2003-11-26

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