SE0200788D0 - Method using a movable micro-element - Google Patents
Method using a movable micro-elementInfo
- Publication number
- SE0200788D0 SE0200788D0 SE0200788A SE0200788A SE0200788D0 SE 0200788 D0 SE0200788 D0 SE 0200788D0 SE 0200788 A SE0200788 A SE 0200788A SE 0200788 A SE0200788 A SE 0200788A SE 0200788 D0 SE0200788 D0 SE 0200788D0
- Authority
- SE
- Sweden
- Prior art keywords
- movable
- modulator element
- movable modulator
- electromagnetic radiation
- present
- Prior art date
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0200788A SE0200788D0 (sv) | 2002-03-15 | 2002-03-15 | Method using a movable micro-element |
PCT/SE2003/000428 WO2003079091A1 (en) | 2002-03-15 | 2003-03-14 | An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece |
AU2003212763A AU2003212763A1 (en) | 2002-03-15 | 2003-03-14 | An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0200788A SE0200788D0 (sv) | 2002-03-15 | 2002-03-15 | Method using a movable micro-element |
Publications (1)
Publication Number | Publication Date |
---|---|
SE0200788D0 true SE0200788D0 (sv) | 2002-03-15 |
Family
ID=20287277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0200788A SE0200788D0 (sv) | 2002-03-15 | 2002-03-15 | Method using a movable micro-element |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2003212763A1 (sv) |
SE (1) | SE0200788D0 (sv) |
WO (1) | WO2003079091A1 (sv) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE0100336L (sv) | 2001-02-05 | 2002-08-06 | Micronic Laser Systems Ab | Adresseringsmetod och apparat som använder densamma tekniskt område |
US6876440B1 (en) | 2003-09-30 | 2005-04-05 | Asml Holding N.V. | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region |
US7023526B2 (en) | 2003-09-30 | 2006-04-04 | Asml Holding N.V. | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap without an explicit attenuation |
US7410736B2 (en) | 2003-09-30 | 2008-08-12 | Asml Holding N.V. | Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones |
US10831018B2 (en) * | 2017-12-08 | 2020-11-10 | Texas Instruments Incorporated | Methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5212582A (en) * | 1992-03-04 | 1993-05-18 | Texas Instruments Incorporated | Electrostatically controlled beam steering device and method |
US5285196A (en) * | 1992-10-15 | 1994-02-08 | Texas Instruments Incorporated | Bistable DMD addressing method |
US5583688A (en) * | 1993-12-21 | 1996-12-10 | Texas Instruments Incorporated | Multi-level digital micromirror device |
US6046840A (en) * | 1995-06-19 | 2000-04-04 | Reflectivity, Inc. | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
US6312134B1 (en) * | 1996-07-25 | 2001-11-06 | Anvik Corporation | Seamless, maskless lithography system using spatial light modulator |
US5771116A (en) * | 1996-10-21 | 1998-06-23 | Texas Instruments Incorporated | Multiple bias level reset waveform for enhanced DMD control |
US6266178B1 (en) * | 1998-12-28 | 2001-07-24 | Texas Instruments Incorporated | Guardring DRAM cell |
-
2002
- 2002-03-15 SE SE0200788A patent/SE0200788D0/sv unknown
-
2003
- 2003-03-14 AU AU2003212763A patent/AU2003212763A1/en not_active Abandoned
- 2003-03-14 WO PCT/SE2003/000428 patent/WO2003079091A1/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
AU2003212763A1 (en) | 2003-09-29 |
WO2003079091A1 (en) | 2003-09-25 |
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