RU2673834C2 - Геттерный насос - Google Patents

Геттерный насос Download PDF

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Publication number
RU2673834C2
RU2673834C2 RU2016143194A RU2016143194A RU2673834C2 RU 2673834 C2 RU2673834 C2 RU 2673834C2 RU 2016143194 A RU2016143194 A RU 2016143194A RU 2016143194 A RU2016143194 A RU 2016143194A RU 2673834 C2 RU2673834 C2 RU 2673834C2
Authority
RU
Russia
Prior art keywords
getter
pump according
getter pump
metals
elements
Prior art date
Application number
RU2016143194A
Other languages
English (en)
Russian (ru)
Other versions
RU2016143194A3 (enExample
RU2016143194A (ru
Inventor
Антонио БОНУЧЧИ
Паоло МИНИНИ
Андреа КОНТЕ
Лука Виале
Original Assignee
Саес Геттерс С.П.А.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Саес Геттерс С.П.А. filed Critical Саес Геттерс С.П.А.
Publication of RU2016143194A publication Critical patent/RU2016143194A/ru
Publication of RU2016143194A3 publication Critical patent/RU2016143194A3/ru
Application granted granted Critical
Publication of RU2673834C2 publication Critical patent/RU2673834C2/ru

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
RU2016143194A 2014-04-03 2015-03-25 Геттерный насос RU2673834C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI2014A000595 2014-04-03
ITMI20140595 2014-04-03
PCT/IB2015/052174 WO2015150974A1 (en) 2014-04-03 2015-03-25 Getter pump

Publications (3)

Publication Number Publication Date
RU2016143194A RU2016143194A (ru) 2018-05-04
RU2016143194A3 RU2016143194A3 (enExample) 2018-09-06
RU2673834C2 true RU2673834C2 (ru) 2018-11-30

Family

ID=50819846

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2016143194A RU2673834C2 (ru) 2014-04-03 2015-03-25 Геттерный насос

Country Status (9)

Country Link
US (1) US9541078B2 (enExample)
EP (1) EP2989327B1 (enExample)
JP (1) JP6317471B2 (enExample)
KR (1) KR101887292B1 (enExample)
CN (1) CN106133314B (enExample)
ES (1) ES2604969T3 (enExample)
RU (1) RU2673834C2 (enExample)
TW (1) TWI660125B (enExample)
WO (1) WO2015150974A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107076133B (zh) * 2014-06-26 2019-06-18 工程吸气公司 吸气剂泵送系统
RU2661493C1 (ru) * 2017-07-24 2018-07-17 ООО "Инновационные Вакуумные Решения" Способ управления скоростью распыления материала в геттерном насосе и устройство геттерного насоса
RU187265U1 (ru) * 2018-10-25 2019-02-27 Закрытое акционерное общество "Время - Ч" Комбинированный магниторазрядный геттерный насос для откачки вакуумных объемов рубидиевого стандарта частоты
CN114928934B (zh) * 2022-06-20 2024-06-18 中国科学院近代物理研究所 加速器真空室非蒸散型吸气剂片固定装置及其使用方法
WO2024028240A1 (en) 2022-08-01 2024-02-08 Saes Getters S.P.A. Snap-on getter pump assembly and its use

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0742370A1 (en) * 1995-05-11 1996-11-13 Saes Getters S.P.A. Heating assembly for getter pumps and gas purifiers
EP0753663A1 (en) * 1995-07-10 1997-01-15 SAES GETTERS S.p.A. Improved getter pump, particularly for a portable chemical analysis instrument
US6149392A (en) * 1997-10-15 2000-11-21 Saes Getters S.P.A. Getter pump with high gas sorption velocity
WO2009118398A1 (en) * 2008-03-28 2009-10-01 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
WO2010105944A1 (en) * 2009-03-17 2010-09-23 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
RU2639293C2 (ru) * 2012-10-15 2017-12-21 Саес Геттерс С.П.А. Геттерный насос

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2034633C3 (de) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
IT1255439B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
IT1292175B1 (it) 1997-06-17 1999-01-25 Getters Spa Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare
IT1297013B1 (it) * 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
US7045958B2 (en) 2003-04-14 2006-05-16 Hewlett-Packard Development Company, L.P. Vacuum device having a getter
ITMI20080282A1 (it) * 2008-02-22 2009-08-23 Getters Spa Apparato per litografia con radiazione nell'uv estremo con un elemento assorbitore di idrocarburi comprendente un materiale getter

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0742370A1 (en) * 1995-05-11 1996-11-13 Saes Getters S.P.A. Heating assembly for getter pumps and gas purifiers
EP0753663A1 (en) * 1995-07-10 1997-01-15 SAES GETTERS S.p.A. Improved getter pump, particularly for a portable chemical analysis instrument
US6149392A (en) * 1997-10-15 2000-11-21 Saes Getters S.P.A. Getter pump with high gas sorption velocity
WO2009118398A1 (en) * 2008-03-28 2009-10-01 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
WO2010105944A1 (en) * 2009-03-17 2010-09-23 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
RU2639293C2 (ru) * 2012-10-15 2017-12-21 Саес Геттерс С.П.А. Геттерный насос

Also Published As

Publication number Publication date
RU2016143194A3 (enExample) 2018-09-06
US9541078B2 (en) 2017-01-10
TWI660125B (zh) 2019-05-21
KR101887292B1 (ko) 2018-08-09
JP2017510748A (ja) 2017-04-13
ES2604969T3 (es) 2017-03-10
CN106133314B (zh) 2017-09-22
CN106133314A (zh) 2016-11-16
WO2015150974A1 (en) 2015-10-08
RU2016143194A (ru) 2018-05-04
JP6317471B2 (ja) 2018-04-25
TW201538855A (zh) 2015-10-16
EP2989327A1 (en) 2016-03-02
US20160069337A1 (en) 2016-03-10
EP2989327B1 (en) 2016-09-07
KR20160142299A (ko) 2016-12-12

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