CN106133314B - 吸气剂泵 - Google Patents

吸气剂泵 Download PDF

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Publication number
CN106133314B
CN106133314B CN201580017115.4A CN201580017115A CN106133314B CN 106133314 B CN106133314 B CN 106133314B CN 201580017115 A CN201580017115 A CN 201580017115A CN 106133314 B CN106133314 B CN 106133314B
Authority
CN
China
Prior art keywords
getter
pump according
getter pump
housing
central support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580017115.4A
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English (en)
Chinese (zh)
Other versions
CN106133314A (zh
Inventor
安东尼奥·博努奇
保罗·马尼尼
安德烈亚·康特
卢卡·维亚勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Publication of CN106133314A publication Critical patent/CN106133314A/zh
Application granted granted Critical
Publication of CN106133314B publication Critical patent/CN106133314B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CN201580017115.4A 2014-04-03 2015-03-25 吸气剂泵 Active CN106133314B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI20140595 2014-04-03
ITMI2014A000595 2014-04-03
PCT/IB2015/052174 WO2015150974A1 (en) 2014-04-03 2015-03-25 Getter pump

Publications (2)

Publication Number Publication Date
CN106133314A CN106133314A (zh) 2016-11-16
CN106133314B true CN106133314B (zh) 2017-09-22

Family

ID=50819846

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580017115.4A Active CN106133314B (zh) 2014-04-03 2015-03-25 吸气剂泵

Country Status (9)

Country Link
US (1) US9541078B2 (enExample)
EP (1) EP2989327B1 (enExample)
JP (1) JP6317471B2 (enExample)
KR (1) KR101887292B1 (enExample)
CN (1) CN106133314B (enExample)
ES (1) ES2604969T3 (enExample)
RU (1) RU2673834C2 (enExample)
TW (1) TWI660125B (enExample)
WO (1) WO2015150974A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107076133B (zh) * 2014-06-26 2019-06-18 工程吸气公司 吸气剂泵送系统
RU2661493C1 (ru) * 2017-07-24 2018-07-17 ООО "Инновационные Вакуумные Решения" Способ управления скоростью распыления материала в геттерном насосе и устройство геттерного насоса
RU187265U1 (ru) * 2018-10-25 2019-02-27 Закрытое акционерное общество "Время - Ч" Комбинированный магниторазрядный геттерный насос для откачки вакуумных объемов рубидиевого стандарта частоты
CN114928934B (zh) * 2022-06-20 2024-06-18 中国科学院近代物理研究所 加速器真空室非蒸散型吸气剂片固定装置及其使用方法
CN119487297A (zh) 2022-08-01 2025-02-18 工程吸气公司 卡扣式吸气剂泵组件及其应用

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3662522A (en) * 1969-07-24 1972-05-16 Getters Spa Getter pump cartridge
WO1994002957A1 (en) * 1992-07-17 1994-02-03 Saes Getters S.P.A. High capacity getter pump
EP0742370A1 (en) * 1995-05-11 1996-11-13 Saes Getters S.P.A. Heating assembly for getter pumps and gas purifiers
EP0753663A1 (en) * 1995-07-10 1997-01-15 SAES GETTERS S.p.A. Improved getter pump, particularly for a portable chemical analysis instrument
WO1998058173A1 (en) * 1997-06-17 1998-12-23 Saes Getters S.P.A Getter pump especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump
CN1215799A (zh) * 1997-10-15 1999-05-05 工程吸气公司 高气体吸附速度的吸气泵
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US7045958B2 (en) * 2003-04-14 2006-05-16 Hewlett-Packard Development Company, L.P. Vacuum device having a getter
WO2009118398A1 (en) * 2008-03-28 2009-10-01 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
WO2010105944A1 (en) * 2009-03-17 2010-09-23 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
IT1297013B1 (it) * 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
ITMI20080282A1 (it) * 2008-02-22 2009-08-23 Getters Spa Apparato per litografia con radiazione nell'uv estremo con un elemento assorbitore di idrocarburi comprendente un materiale getter
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3662522A (en) * 1969-07-24 1972-05-16 Getters Spa Getter pump cartridge
WO1994002957A1 (en) * 1992-07-17 1994-02-03 Saes Getters S.P.A. High capacity getter pump
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
EP0742370A1 (en) * 1995-05-11 1996-11-13 Saes Getters S.P.A. Heating assembly for getter pumps and gas purifiers
EP0753663A1 (en) * 1995-07-10 1997-01-15 SAES GETTERS S.p.A. Improved getter pump, particularly for a portable chemical analysis instrument
WO1998058173A1 (en) * 1997-06-17 1998-12-23 Saes Getters S.P.A Getter pump especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump
CN1215799A (zh) * 1997-10-15 1999-05-05 工程吸气公司 高气体吸附速度的吸气泵
US7045958B2 (en) * 2003-04-14 2006-05-16 Hewlett-Packard Development Company, L.P. Vacuum device having a getter
WO2009118398A1 (en) * 2008-03-28 2009-10-01 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
WO2010105944A1 (en) * 2009-03-17 2010-09-23 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump

Also Published As

Publication number Publication date
CN106133314A (zh) 2016-11-16
EP2989327B1 (en) 2016-09-07
TW201538855A (zh) 2015-10-16
RU2016143194A (ru) 2018-05-04
RU2016143194A3 (enExample) 2018-09-06
KR20160142299A (ko) 2016-12-12
EP2989327A1 (en) 2016-03-02
KR101887292B1 (ko) 2018-08-09
US20160069337A1 (en) 2016-03-10
RU2673834C2 (ru) 2018-11-30
US9541078B2 (en) 2017-01-10
ES2604969T3 (es) 2017-03-10
JP6317471B2 (ja) 2018-04-25
TWI660125B (zh) 2019-05-21
WO2015150974A1 (en) 2015-10-08
JP2017510748A (ja) 2017-04-13

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