JP6317471B2 - ゲッターポンプ - Google Patents
ゲッターポンプ Download PDFInfo
- Publication number
- JP6317471B2 JP6317471B2 JP2016559888A JP2016559888A JP6317471B2 JP 6317471 B2 JP6317471 B2 JP 6317471B2 JP 2016559888 A JP2016559888 A JP 2016559888A JP 2016559888 A JP2016559888 A JP 2016559888A JP 6317471 B2 JP6317471 B2 JP 6317471B2
- Authority
- JP
- Japan
- Prior art keywords
- getter
- cartridge
- casing
- pump
- getter pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/183—Composition or manufacture of getters
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
11 シャフト
12、12’、12n ゲッター要素
20 ゲッターポンプ部
21、21’ 側壁
22 ゲッターカートリッジ
23 ゲッターカートリッジ
24 ゲッターカートリッジ
25 ゲッターカートリッジ
26 回転軸
27 垂直要素
40 ゲッターポンプ
41 41’ 側壁
42 ゲッターカートリッジ
43 ゲッターカートリッジ
44 開口
45 開口
46 回転軸
100 ゲッターカートリッジ
221 支持体
222 位置決め平面
231 支持体
232 位置決め平面
241 支持体
242 位置決め平面
251 支持体
252 位置決め平面
310 ゲッターポンプ
311 ケーシング
312 開口
314 ゲッターカートリッジ
315 ゲッターカートリッジ
316 サブケーシング
317 内部支持体
320 ポンプ
411 ケーシング
421 支持要素
422 平面
431 支持要素
432 平面
α、α’、α’’、α’’’ 角度
β、β’ 角度
Claims (9)
- 回転軸を有する回転体として成形されるゲッターポンプケーシングと、
前記ゲッターポンプケーシング内に載置される複数のゲッターカートリッジと、を備えるゲッターポンプであって、
各ゲッターカートリッジが、直線状の中心支持体と、前記直線状の中心支持体に載置され、間隔が空けられた複数のゲッター要素と、を備え、
前記回転軸に直交し、直線状の中心支持体の中点と交差するゲッターカートリッジ位置決め平面に沿って各ゲッターカートリッジが位置し、
各ゲッターカートリッジにおいて、前記位置決め平面と前記直線状の中心支持体とによって形成される角度が35°から75°であることを特徴とする、ゲッターポンプ。 - 前記直線状の中心支持体の各々が、前記ケーシングの壁に平行である、請求項1に記載のゲッターポンプ。
- 各ゲッターカートリッジにおいて、前記直線状の中心支持体の少なくとも第1の端部が、前記ケーシングに接触する、請求項1に記載のゲッターポンプ。
- 前記少なくとも1つのゲッターカートリッジの直線状の中心支持体の第2の端部が、支持体要素に接触する、請求項3に記載のゲッターポンプ。
- 前記支持体要素が、前記回転軸と同軸である、請求項4に記載のゲッターポンプ。
- 前記ケーシングが、一端部がベースによって閉じられ、反対側の端部がフランジによって閉じられる、請求項1に記載のゲッターポンプ。
- 前記ケーシングが開口端部を有する、請求項1に記載のゲッターポンプ。
- 1つのゲッターカートリッジにおける少なくとも1つの角度が、他のゲッターカートリッジにおける1つ又はそれ以上の他の角度と異なる、請求項1に記載のゲッターポンプ。
- 請求項1に記載のゲッターポンプに結合される真空ポンプを備えるポンプシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI2014A000595 | 2014-04-03 | ||
ITMI20140595 | 2014-04-03 | ||
PCT/IB2015/052174 WO2015150974A1 (en) | 2014-04-03 | 2015-03-25 | Getter pump |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017510748A JP2017510748A (ja) | 2017-04-13 |
JP2017510748A5 JP2017510748A5 (ja) | 2018-03-08 |
JP6317471B2 true JP6317471B2 (ja) | 2018-04-25 |
Family
ID=50819846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016559888A Active JP6317471B2 (ja) | 2014-04-03 | 2015-03-25 | ゲッターポンプ |
Country Status (9)
Country | Link |
---|---|
US (1) | US9541078B2 (ja) |
EP (1) | EP2989327B1 (ja) |
JP (1) | JP6317471B2 (ja) |
KR (1) | KR101887292B1 (ja) |
CN (1) | CN106133314B (ja) |
ES (1) | ES2604969T3 (ja) |
RU (1) | RU2673834C2 (ja) |
TW (1) | TWI660125B (ja) |
WO (1) | WO2015150974A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107076133B (zh) * | 2014-06-26 | 2019-06-18 | 工程吸气公司 | 吸气剂泵送系统 |
RU2661493C1 (ru) * | 2017-07-24 | 2018-07-17 | ООО "Инновационные Вакуумные Решения" | Способ управления скоростью распыления материала в геттерном насосе и устройство геттерного насоса |
RU187265U1 (ru) * | 2018-10-25 | 2019-02-27 | Закрытое акционерное общество "Время - Ч" | Комбинированный магниторазрядный геттерный насос для откачки вакуумных объемов рубидиевого стандарта частоты |
WO2024028240A1 (en) | 2022-08-01 | 2024-02-08 | Saes Getters S.P.A. | Snap-on getter pump assembly and its use |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2034633C3 (de) * | 1969-07-24 | 1979-10-25 | S.A.E.S. Getters S.P.A., Mailand (Italien) | Kartusche für eine Getterpumpe |
US4137012A (en) * | 1976-11-03 | 1979-01-30 | S.A.E.S. Getters S.P.A. | Modular getter pumps |
IT1255439B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
IT1274478B (it) * | 1995-05-11 | 1997-07-17 | Getters Spa | Insieme di riscaldamento per pompe getter e purificatori di gas |
IT237018Y1 (it) * | 1995-07-10 | 2000-08-31 | Getters Spa | Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile |
IT1292175B1 (it) * | 1997-06-17 | 1999-01-25 | Getters Spa | Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare |
IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
IT1297013B1 (it) * | 1997-12-23 | 1999-08-03 | Getters Spa | Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore |
US7045958B2 (en) * | 2003-04-14 | 2006-05-16 | Hewlett-Packard Development Company, L.P. | Vacuum device having a getter |
ITMI20080282A1 (it) * | 2008-02-22 | 2009-08-23 | Getters Spa | Apparato per litografia con radiazione nell'uv estremo con un elemento assorbitore di idrocarburi comprendente un materiale getter |
BRPI0910238A2 (pt) * | 2008-03-28 | 2015-09-29 | Getters Spa | sistema de bombeamento combinado. |
ITMI20090402A1 (it) * | 2009-03-17 | 2010-09-18 | Getters Spa | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
ITMI20121732A1 (it) * | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
-
2015
- 2015-03-20 TW TW104108930A patent/TWI660125B/zh active
- 2015-03-25 EP EP15715853.6A patent/EP2989327B1/en active Active
- 2015-03-25 JP JP2016559888A patent/JP6317471B2/ja active Active
- 2015-03-25 US US14/786,138 patent/US9541078B2/en active Active
- 2015-03-25 WO PCT/IB2015/052174 patent/WO2015150974A1/en active Application Filing
- 2015-03-25 KR KR1020167027026A patent/KR101887292B1/ko active IP Right Grant
- 2015-03-25 ES ES15715853.6T patent/ES2604969T3/es active Active
- 2015-03-25 RU RU2016143194A patent/RU2673834C2/ru active
- 2015-03-25 CN CN201580017115.4A patent/CN106133314B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2017510748A (ja) | 2017-04-13 |
RU2016143194A (ru) | 2018-05-04 |
CN106133314B (zh) | 2017-09-22 |
RU2016143194A3 (ja) | 2018-09-06 |
EP2989327A1 (en) | 2016-03-02 |
WO2015150974A1 (en) | 2015-10-08 |
KR101887292B1 (ko) | 2018-08-09 |
RU2673834C2 (ru) | 2018-11-30 |
ES2604969T3 (es) | 2017-03-10 |
TWI660125B (zh) | 2019-05-21 |
KR20160142299A (ko) | 2016-12-12 |
EP2989327B1 (en) | 2016-09-07 |
CN106133314A (zh) | 2016-11-16 |
US20160069337A1 (en) | 2016-03-10 |
TW201538855A (zh) | 2015-10-16 |
US9541078B2 (en) | 2017-01-10 |
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