TWI660125B - 吸氣泵 - Google Patents
吸氣泵 Download PDFInfo
- Publication number
- TWI660125B TWI660125B TW104108930A TW104108930A TWI660125B TW I660125 B TWI660125 B TW I660125B TW 104108930 A TW104108930 A TW 104108930A TW 104108930 A TW104108930 A TW 104108930A TW I660125 B TWI660125 B TW I660125B
- Authority
- TW
- Taiwan
- Prior art keywords
- suction
- suction pump
- patent application
- pump
- scope
- Prior art date
Links
- 238000005086 pumping Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 108010083687 Ion Pumps Proteins 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 2
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/183—Composition or manufacture of getters
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ??MI2014A000595 | 2014-04-03 | ||
| ITMI20140595 | 2014-04-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201538855A TW201538855A (zh) | 2015-10-16 |
| TWI660125B true TWI660125B (zh) | 2019-05-21 |
Family
ID=50819846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104108930A TWI660125B (zh) | 2014-04-03 | 2015-03-20 | 吸氣泵 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9541078B2 (enExample) |
| EP (1) | EP2989327B1 (enExample) |
| JP (1) | JP6317471B2 (enExample) |
| KR (1) | KR101887292B1 (enExample) |
| CN (1) | CN106133314B (enExample) |
| ES (1) | ES2604969T3 (enExample) |
| RU (1) | RU2673834C2 (enExample) |
| TW (1) | TWI660125B (enExample) |
| WO (1) | WO2015150974A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107076133B (zh) * | 2014-06-26 | 2019-06-18 | 工程吸气公司 | 吸气剂泵送系统 |
| RU2661493C1 (ru) * | 2017-07-24 | 2018-07-17 | ООО "Инновационные Вакуумные Решения" | Способ управления скоростью распыления материала в геттерном насосе и устройство геттерного насоса |
| RU187265U1 (ru) * | 2018-10-25 | 2019-02-27 | Закрытое акционерное общество "Время - Ч" | Комбинированный магниторазрядный геттерный насос для откачки вакуумных объемов рубидиевого стандарта частоты |
| CN114928934B (zh) * | 2022-06-20 | 2024-06-18 | 中国科学院近代物理研究所 | 加速器真空室非蒸散型吸气剂片固定装置及其使用方法 |
| WO2024028240A1 (en) | 2022-08-01 | 2024-02-08 | Saes Getters S.P.A. | Snap-on getter pump assembly and its use |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0753663B1 (en) * | 1995-07-10 | 1999-03-31 | SAES GETTERS S.p.A. | Improved getter pump, particularly for a portable chemical analysis instrument |
| CN1215799A (zh) * | 1997-10-15 | 1999-05-05 | 工程吸气公司 | 高气体吸附速度的吸气泵 |
| US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
| WO2009118398A1 (en) * | 2008-03-28 | 2009-10-01 | Saes Getters S.P.A. | Combined pumping system comprising a getter pump and an ion pump |
| TW201102505A (en) * | 2009-03-17 | 2011-01-16 | Getters Spa | Combined pumping system comprising a getter pump and an ion pump |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2034633C3 (de) * | 1969-07-24 | 1979-10-25 | S.A.E.S. Getters S.P.A., Mailand (Italien) | Kartusche für eine Getterpumpe |
| US4137012A (en) * | 1976-11-03 | 1979-01-30 | S.A.E.S. Getters S.P.A. | Modular getter pumps |
| IT1255439B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
| IT1274478B (it) | 1995-05-11 | 1997-07-17 | Getters Spa | Insieme di riscaldamento per pompe getter e purificatori di gas |
| IT1292175B1 (it) | 1997-06-17 | 1999-01-25 | Getters Spa | Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare |
| IT1297013B1 (it) * | 1997-12-23 | 1999-08-03 | Getters Spa | Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore |
| US7045958B2 (en) | 2003-04-14 | 2006-05-16 | Hewlett-Packard Development Company, L.P. | Vacuum device having a getter |
| ITMI20080282A1 (it) * | 2008-02-22 | 2009-08-23 | Getters Spa | Apparato per litografia con radiazione nell'uv estremo con un elemento assorbitore di idrocarburi comprendente un materiale getter |
| ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
-
2015
- 2015-03-20 TW TW104108930A patent/TWI660125B/zh active
- 2015-03-25 WO PCT/IB2015/052174 patent/WO2015150974A1/en not_active Ceased
- 2015-03-25 US US14/786,138 patent/US9541078B2/en active Active
- 2015-03-25 ES ES15715853.6T patent/ES2604969T3/es active Active
- 2015-03-25 EP EP15715853.6A patent/EP2989327B1/en active Active
- 2015-03-25 KR KR1020167027026A patent/KR101887292B1/ko active Active
- 2015-03-25 JP JP2016559888A patent/JP6317471B2/ja active Active
- 2015-03-25 RU RU2016143194A patent/RU2673834C2/ru active
- 2015-03-25 CN CN201580017115.4A patent/CN106133314B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
| EP0753663B1 (en) * | 1995-07-10 | 1999-03-31 | SAES GETTERS S.p.A. | Improved getter pump, particularly for a portable chemical analysis instrument |
| CN1215799A (zh) * | 1997-10-15 | 1999-05-05 | 工程吸气公司 | 高气体吸附速度的吸气泵 |
| WO2009118398A1 (en) * | 2008-03-28 | 2009-10-01 | Saes Getters S.P.A. | Combined pumping system comprising a getter pump and an ion pump |
| TW201102505A (en) * | 2009-03-17 | 2011-01-16 | Getters Spa | Combined pumping system comprising a getter pump and an ion pump |
Also Published As
| Publication number | Publication date |
|---|---|
| RU2016143194A3 (enExample) | 2018-09-06 |
| US9541078B2 (en) | 2017-01-10 |
| KR101887292B1 (ko) | 2018-08-09 |
| JP2017510748A (ja) | 2017-04-13 |
| ES2604969T3 (es) | 2017-03-10 |
| CN106133314B (zh) | 2017-09-22 |
| CN106133314A (zh) | 2016-11-16 |
| WO2015150974A1 (en) | 2015-10-08 |
| RU2016143194A (ru) | 2018-05-04 |
| RU2673834C2 (ru) | 2018-11-30 |
| JP6317471B2 (ja) | 2018-04-25 |
| TW201538855A (zh) | 2015-10-16 |
| EP2989327A1 (en) | 2016-03-02 |
| US20160069337A1 (en) | 2016-03-10 |
| EP2989327B1 (en) | 2016-09-07 |
| KR20160142299A (ko) | 2016-12-12 |
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