JP6317471B2 - ゲッターポンプ - Google Patents

ゲッターポンプ Download PDF

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Publication number
JP6317471B2
JP6317471B2 JP2016559888A JP2016559888A JP6317471B2 JP 6317471 B2 JP6317471 B2 JP 6317471B2 JP 2016559888 A JP2016559888 A JP 2016559888A JP 2016559888 A JP2016559888 A JP 2016559888A JP 6317471 B2 JP6317471 B2 JP 6317471B2
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JP
Japan
Prior art keywords
getter
cartridge
casing
pump
getter pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016559888A
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English (en)
Japanese (ja)
Other versions
JP2017510748A (ja
JP2017510748A5 (enExample
Inventor
アントニオ・ボヌッチ
パオロ・マニーニ
アンドレア・コンテ
ルカ・ヴィアーレ
Original Assignee
サエス・ゲッターズ・エッセ・ピ・ア
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JP2017510748A publication Critical patent/JP2017510748A/ja
Publication of JP2017510748A5 publication Critical patent/JP2017510748A5/ja
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Publication of JP6317471B2 publication Critical patent/JP6317471B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2016559888A 2014-04-03 2015-03-25 ゲッターポンプ Active JP6317471B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI2014A000595 2014-04-03
ITMI20140595 2014-04-03
PCT/IB2015/052174 WO2015150974A1 (en) 2014-04-03 2015-03-25 Getter pump

Publications (3)

Publication Number Publication Date
JP2017510748A JP2017510748A (ja) 2017-04-13
JP2017510748A5 JP2017510748A5 (enExample) 2018-03-08
JP6317471B2 true JP6317471B2 (ja) 2018-04-25

Family

ID=50819846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016559888A Active JP6317471B2 (ja) 2014-04-03 2015-03-25 ゲッターポンプ

Country Status (9)

Country Link
US (1) US9541078B2 (enExample)
EP (1) EP2989327B1 (enExample)
JP (1) JP6317471B2 (enExample)
KR (1) KR101887292B1 (enExample)
CN (1) CN106133314B (enExample)
ES (1) ES2604969T3 (enExample)
RU (1) RU2673834C2 (enExample)
TW (1) TWI660125B (enExample)
WO (1) WO2015150974A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107076133B (zh) * 2014-06-26 2019-06-18 工程吸气公司 吸气剂泵送系统
RU2661493C1 (ru) * 2017-07-24 2018-07-17 ООО "Инновационные Вакуумные Решения" Способ управления скоростью распыления материала в геттерном насосе и устройство геттерного насоса
RU187265U1 (ru) * 2018-10-25 2019-02-27 Закрытое акционерное общество "Время - Ч" Комбинированный магниторазрядный геттерный насос для откачки вакуумных объемов рубидиевого стандарта частоты
CN114928934B (zh) * 2022-06-20 2024-06-18 中国科学院近代物理研究所 加速器真空室非蒸散型吸气剂片固定装置及其使用方法
WO2024028240A1 (en) 2022-08-01 2024-02-08 Saes Getters S.P.A. Snap-on getter pump assembly and its use

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2034633C3 (de) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
IT1255439B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
IT1274478B (it) 1995-05-11 1997-07-17 Getters Spa Insieme di riscaldamento per pompe getter e purificatori di gas
IT237018Y1 (it) * 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
IT1292175B1 (it) 1997-06-17 1999-01-25 Getters Spa Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
IT1297013B1 (it) * 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
US7045958B2 (en) 2003-04-14 2006-05-16 Hewlett-Packard Development Company, L.P. Vacuum device having a getter
ITMI20080282A1 (it) * 2008-02-22 2009-08-23 Getters Spa Apparato per litografia con radiazione nell'uv estremo con un elemento assorbitore di idrocarburi comprendente un materiale getter
RU2495510C2 (ru) * 2008-03-28 2013-10-10 Саес Геттерс С.П.А. Комбинированная насосная система, содержащая геттерный насос и ионный насос
ITMI20090402A1 (it) * 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter

Also Published As

Publication number Publication date
RU2016143194A3 (enExample) 2018-09-06
US9541078B2 (en) 2017-01-10
TWI660125B (zh) 2019-05-21
KR101887292B1 (ko) 2018-08-09
JP2017510748A (ja) 2017-04-13
ES2604969T3 (es) 2017-03-10
CN106133314B (zh) 2017-09-22
CN106133314A (zh) 2016-11-16
WO2015150974A1 (en) 2015-10-08
RU2016143194A (ru) 2018-05-04
RU2673834C2 (ru) 2018-11-30
TW201538855A (zh) 2015-10-16
EP2989327A1 (en) 2016-03-02
US20160069337A1 (en) 2016-03-10
EP2989327B1 (en) 2016-09-07
KR20160142299A (ko) 2016-12-12

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