RU2495510C2 - Комбинированная насосная система, содержащая геттерный насос и ионный насос - Google Patents
Комбинированная насосная система, содержащая геттерный насос и ионный насос Download PDFInfo
- Publication number
- RU2495510C2 RU2495510C2 RU2010144064/07A RU2010144064A RU2495510C2 RU 2495510 C2 RU2495510 C2 RU 2495510C2 RU 2010144064/07 A RU2010144064/07 A RU 2010144064/07A RU 2010144064 A RU2010144064 A RU 2010144064A RU 2495510 C2 RU2495510 C2 RU 2495510C2
- Authority
- RU
- Russia
- Prior art keywords
- pump
- flange
- getter
- ion
- magnet
- Prior art date
Links
- 108010083687 Ion Pumps Proteins 0.000 title claims abstract description 31
- 102000006391 Ion Pumps Human genes 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 15
- 238000005086 pumping Methods 0.000 claims description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical group [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 9
- 239000004020 conductor Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910000828 alnico Inorganic materials 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000005226 mechanical processes and functions Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical class [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000009933 burial Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001868 water Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI20080112 ITMI20080112U1 (it) | 2008-03-28 | 2008-03-28 | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
| ITMI2008U000112 | 2008-03-28 | ||
| ITMI2008U000250 | 2008-08-01 | ||
| ITMI20080250 ITMI20080250U1 (it) | 2008-08-01 | 2008-08-01 | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
| PCT/EP2009/053634 WO2009118398A1 (en) | 2008-03-28 | 2009-03-26 | Combined pumping system comprising a getter pump and an ion pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2010144064A RU2010144064A (ru) | 2012-05-10 |
| RU2495510C2 true RU2495510C2 (ru) | 2013-10-10 |
Family
ID=40848542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2010144064/07A RU2495510C2 (ru) | 2008-03-28 | 2009-03-26 | Комбинированная насосная система, содержащая геттерный насос и ионный насос |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US8342813B2 (https=) |
| EP (1) | EP2260502B1 (https=) |
| JP (1) | JP5302386B2 (https=) |
| KR (1) | KR101455044B1 (https=) |
| CN (1) | CN101978463B (https=) |
| BR (1) | BRPI0910238A2 (https=) |
| CA (1) | CA2714274A1 (https=) |
| IL (1) | IL208238A (https=) |
| RU (1) | RU2495510C2 (https=) |
| WO (1) | WO2009118398A1 (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITMI20090402A1 (it) | 2009-03-17 | 2010-09-18 | Getters Spa | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
| ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
| CN102938356B (zh) * | 2012-10-23 | 2015-03-04 | 北京市北分仪器技术有限责任公司 | 用于真空器件的真空保持系统 |
| TWI660125B (zh) * | 2014-04-03 | 2019-05-21 | 義大利商沙斯格特斯公司 | 吸氣泵 |
| JP6835592B2 (ja) * | 2014-06-26 | 2021-02-24 | サエス・ゲッターズ・エッセ・ピ・ア | ゲッターポンプシステム |
| JP7008976B2 (ja) * | 2017-11-13 | 2022-01-25 | 国立研究開発法人情報通信研究機構 | 真空作成装置 |
| US10264634B2 (en) * | 2018-04-20 | 2019-04-16 | Advanced Regulated Power Technology, Inc. | Adaptive power regulation of LED driver module for emergency lighting |
| CN108757380B (zh) * | 2018-05-18 | 2019-11-19 | 南京华东电子真空材料有限公司 | 结构简单便于安装的组合泵 |
| GB2578293A (en) * | 2018-10-18 | 2020-05-06 | Edwards Ltd | A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment |
| CN111377081A (zh) * | 2018-12-27 | 2020-07-07 | 云南全控机电有限公司 | 一种抽真空的封装设备 |
| GB2576968B (en) * | 2019-05-24 | 2021-12-08 | Edwards Ltd | A vacuum pumping system having multiple pumps |
| US11454229B1 (en) | 2019-09-16 | 2022-09-27 | Wavefront Research, Inc. | Dewar vacuum maintenance systems for intermittently powered sensors |
| GB2592655B (en) * | 2020-03-05 | 2023-01-11 | Edwards Vacuum Llc | Pump module |
| GB2592653B (en) * | 2020-03-05 | 2022-12-28 | Edwards Vacuum Llc | Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump |
| GB2592654B (en) * | 2020-03-05 | 2022-12-14 | Edwards Vacuum Llc | Pump module |
| GB2627462B (en) * | 2023-02-22 | 2025-06-11 | Edwards Vacuum Llc | Magnetic assembly for a sputter ion pump |
| GB2627459A (en) * | 2023-02-22 | 2024-08-28 | Edwards Vacuum Llc | Sputter Ion pump module and vacuum pump |
| CN120867997A (zh) * | 2025-09-03 | 2025-10-31 | 上海晶维材料科技有限公司 | 一种复合吸气泵 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2026231A (en) * | 1978-05-30 | 1980-01-30 | Emi Ltd | Mass spectrometers |
| SU943920A1 (ru) * | 1980-12-17 | 1982-07-15 | Предприятие П/Я А-3634 | Комбинированный магниторазр дный геттерно-ионный насос |
| SU1034100A1 (ru) * | 1982-01-29 | 1983-08-07 | Предприятие П/Я А-3634 | Комбинированный магниторазр дный геттерно-ионный насос |
| GB2164788A (en) * | 1984-09-21 | 1986-03-26 | Siemens Ag | A getter/ion atomisation combination pump for high vacuum and ultra-high vacuum systems |
| US5221190A (en) * | 1991-04-02 | 1993-06-22 | Leybold Aktiengesellschaft | Ion sputtering pump with getter module |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3236442A (en) * | 1964-01-20 | 1966-02-22 | Morris Associates | Ionic vacuum pump |
| US3596123A (en) * | 1969-09-18 | 1971-07-27 | Varian Associates | Anode structure for a magnetically confined glow discharge getter ion pump |
| JPS58117371A (ja) | 1981-12-30 | 1983-07-12 | Ulvac Corp | バルクゲツタポンプとスパツタイオンポンプを組合わせた超高真空ポンプ |
| JPH0334046Y2 (https=) * | 1984-10-02 | 1991-07-18 | ||
| JPS62218834A (ja) * | 1986-03-20 | 1987-09-26 | Seiko Instr & Electronics Ltd | 気体圧力計 |
| JPH03222876A (ja) * | 1990-01-26 | 1991-10-01 | Jeol Ltd | 複合ポンプ |
| IT1255438B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
| JPH06140193A (ja) | 1992-10-21 | 1994-05-20 | Mitsubishi Electric Corp | Ｓｒ装置用ビームチェンバ |
| JPH07263198A (ja) | 1994-03-18 | 1995-10-13 | Hitachi Ltd | 加速器及び真空排気装置 |
| TW287117B (https=) | 1994-12-02 | 1996-10-01 | Getters Spa | |
| IT1290548B1 (it) * | 1997-02-24 | 1998-12-10 | Getters Spa | Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli |
| IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
| JP2006066267A (ja) * | 2004-08-27 | 2006-03-09 | Canon Inc | 画像表示装置 |
| JP2006098898A (ja) * | 2004-09-30 | 2006-04-13 | Tdk Corp | 真空装置用フランジ及び該フランジを用いた真空装置 |
| JP4751635B2 (ja) * | 2005-04-13 | 2011-08-17 | 株式会社日立ハイテクノロジーズ | 磁界重畳型電子銃 |
-
2009
- 2009-03-26 WO PCT/EP2009/053634 patent/WO2009118398A1/en not_active Ceased
- 2009-03-26 JP JP2011501237A patent/JP5302386B2/ja active Active
- 2009-03-26 RU RU2010144064/07A patent/RU2495510C2/ru active
- 2009-03-26 BR BRPI0910238A patent/BRPI0910238A2/pt not_active IP Right Cessation
- 2009-03-26 KR KR1020107024101A patent/KR101455044B1/ko active Active
- 2009-03-26 CN CN200980109641.8A patent/CN101978463B/zh active Active
- 2009-03-26 EP EP09726197.8A patent/EP2260502B1/en active Active
- 2009-03-26 US US12/920,797 patent/US8342813B2/en active Active
- 2009-03-26 CA CA2714274A patent/CA2714274A1/en not_active Abandoned
-
2010
- 2010-09-19 IL IL208238A patent/IL208238A/en active IP Right Grant
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2026231A (en) * | 1978-05-30 | 1980-01-30 | Emi Ltd | Mass spectrometers |
| SU943920A1 (ru) * | 1980-12-17 | 1982-07-15 | Предприятие П/Я А-3634 | Комбинированный магниторазр дный геттерно-ионный насос |
| SU1034100A1 (ru) * | 1982-01-29 | 1983-08-07 | Предприятие П/Я А-3634 | Комбинированный магниторазр дный геттерно-ионный насос |
| GB2164788A (en) * | 1984-09-21 | 1986-03-26 | Siemens Ag | A getter/ion atomisation combination pump for high vacuum and ultra-high vacuum systems |
| US5221190A (en) * | 1991-04-02 | 1993-06-22 | Leybold Aktiengesellschaft | Ion sputtering pump with getter module |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011517836A (ja) | 2011-06-16 |
| CA2714274A1 (en) | 2009-10-01 |
| CN101978463A (zh) | 2011-02-16 |
| US20110014063A1 (en) | 2011-01-20 |
| IL208238A (en) | 2014-05-28 |
| WO2009118398A1 (en) | 2009-10-01 |
| KR101455044B1 (ko) | 2014-10-27 |
| JP5302386B2 (ja) | 2013-10-02 |
| US8342813B2 (en) | 2013-01-01 |
| KR20110004399A (ko) | 2011-01-13 |
| CN101978463B (zh) | 2013-02-13 |
| RU2010144064A (ru) | 2012-05-10 |
| EP2260502A1 (en) | 2010-12-15 |
| EP2260502B1 (en) | 2023-05-03 |
| IL208238A0 (en) | 2010-12-30 |
| BRPI0910238A2 (pt) | 2015-09-29 |
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