CN101978463B - 包括吸气剂泵和离子泵的组合式抽气系统 - Google Patents

包括吸气剂泵和离子泵的组合式抽气系统 Download PDF

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Publication number
CN101978463B
CN101978463B CN200980109641.8A CN200980109641A CN101978463B CN 101978463 B CN101978463 B CN 101978463B CN 200980109641 A CN200980109641 A CN 200980109641A CN 101978463 B CN101978463 B CN 101978463B
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China
Prior art keywords
pump
getter
flange
ion
vacuum chamber
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CN200980109641.8A
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English (en)
Chinese (zh)
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CN101978463A (zh
Inventor
M·L·费里斯
A·孔特
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SAES Getters SpA
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SAES Getters SpA
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Priority claimed from ITMI20080112 external-priority patent/ITMI20080112U1/it
Priority claimed from ITMI20080250 external-priority patent/ITMI20080250U1/it
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Publication of CN101978463A publication Critical patent/CN101978463A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CN200980109641.8A 2008-03-28 2009-03-26 包括吸气剂泵和离子泵的组合式抽气系统 Active CN101978463B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
ITMI20080112 ITMI20080112U1 (it) 2008-03-28 2008-03-28 Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
ITMI2008U000112 2008-03-28
ITMI2008U000250 2008-08-01
ITMI20080250 ITMI20080250U1 (it) 2008-08-01 2008-08-01 Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
PCT/EP2009/053634 WO2009118398A1 (en) 2008-03-28 2009-03-26 Combined pumping system comprising a getter pump and an ion pump

Publications (2)

Publication Number Publication Date
CN101978463A CN101978463A (zh) 2011-02-16
CN101978463B true CN101978463B (zh) 2013-02-13

Family

ID=40848542

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980109641.8A Active CN101978463B (zh) 2008-03-28 2009-03-26 包括吸气剂泵和离子泵的组合式抽气系统

Country Status (10)

Country Link
US (1) US8342813B2 (https=)
EP (1) EP2260502B1 (https=)
JP (1) JP5302386B2 (https=)
KR (1) KR101455044B1 (https=)
CN (1) CN101978463B (https=)
BR (1) BRPI0910238A2 (https=)
CA (1) CA2714274A1 (https=)
IL (1) IL208238A (https=)
RU (1) RU2495510C2 (https=)
WO (1) WO2009118398A1 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20090402A1 (it) 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter
CN102938356B (zh) * 2012-10-23 2015-03-04 北京市北分仪器技术有限责任公司 用于真空器件的真空保持系统
TWI660125B (zh) * 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵
JP6835592B2 (ja) * 2014-06-26 2021-02-24 サエス・ゲッターズ・エッセ・ピ・ア ゲッターポンプシステム
JP7008976B2 (ja) * 2017-11-13 2022-01-25 国立研究開発法人情報通信研究機構 真空作成装置
US10264634B2 (en) * 2018-04-20 2019-04-16 Advanced Regulated Power Technology, Inc. Adaptive power regulation of LED driver module for emergency lighting
CN108757380B (zh) * 2018-05-18 2019-11-19 南京华东电子真空材料有限公司 结构简单便于安装的组合泵
GB2578293A (en) * 2018-10-18 2020-05-06 Edwards Ltd A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment
CN111377081A (zh) * 2018-12-27 2020-07-07 云南全控机电有限公司 一种抽真空的封装设备
GB2576968B (en) * 2019-05-24 2021-12-08 Edwards Ltd A vacuum pumping system having multiple pumps
US11454229B1 (en) 2019-09-16 2022-09-27 Wavefront Research, Inc. Dewar vacuum maintenance systems for intermittently powered sensors
GB2592655B (en) * 2020-03-05 2023-01-11 Edwards Vacuum Llc Pump module
GB2592653B (en) * 2020-03-05 2022-12-28 Edwards Vacuum Llc Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump
GB2592654B (en) * 2020-03-05 2022-12-14 Edwards Vacuum Llc Pump module
GB2627462B (en) * 2023-02-22 2025-06-11 Edwards Vacuum Llc Magnetic assembly for a sputter ion pump
GB2627459A (en) * 2023-02-22 2024-08-28 Edwards Vacuum Llc Sputter Ion pump module and vacuum pump
CN120867997A (zh) * 2025-09-03 2025-10-31 上海晶维材料科技有限公司 一种复合吸气泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2164788A (en) * 1984-09-21 1986-03-26 Siemens Ag A getter/ion atomisation combination pump for high vacuum and ultra-high vacuum systems
US5221190A (en) * 1991-04-02 1993-06-22 Leybold Aktiengesellschaft Ion sputtering pump with getter module
CN1215799A (zh) * 1997-10-15 1999-05-05 工程吸气公司 高气体吸附速度的吸气泵
US20060231773A1 (en) * 2005-04-13 2006-10-19 Souichi Katagiri Charged particle beam apparatus

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
US3596123A (en) * 1969-09-18 1971-07-27 Varian Associates Anode structure for a magnetically confined glow discharge getter ion pump
GB2026231B (en) * 1978-05-30 1982-10-27 Emi Ltd Mass spectrometers
SU943920A1 (ru) * 1980-12-17 1982-07-15 Предприятие П/Я А-3634 Комбинированный магниторазр дный геттерно-ионный насос
JPS58117371A (ja) 1981-12-30 1983-07-12 Ulvac Corp バルクゲツタポンプとスパツタイオンポンプを組合わせた超高真空ポンプ
SU1034100A1 (ru) * 1982-01-29 1983-08-07 Предприятие П/Я А-3634 Комбинированный магниторазр дный геттерно-ионный насос
JPH0334046Y2 (https=) * 1984-10-02 1991-07-18
JPS62218834A (ja) * 1986-03-20 1987-09-26 Seiko Instr & Electronics Ltd 気体圧力計
JPH03222876A (ja) * 1990-01-26 1991-10-01 Jeol Ltd 複合ポンプ
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
JPH06140193A (ja) 1992-10-21 1994-05-20 Mitsubishi Electric Corp Ｓｒ装置用ビームチェンバ
JPH07263198A (ja) 1994-03-18 1995-10-13 Hitachi Ltd 加速器及び真空排気装置
TW287117B (https=) 1994-12-02 1996-10-01 Getters Spa
IT1290548B1 (it) * 1997-02-24 1998-12-10 Getters Spa Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli
JP2006066267A (ja) * 2004-08-27 2006-03-09 Canon Inc 画像表示装置
JP2006098898A (ja) * 2004-09-30 2006-04-13 Tdk Corp 真空装置用フランジ及び該フランジを用いた真空装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2164788A (en) * 1984-09-21 1986-03-26 Siemens Ag A getter/ion atomisation combination pump for high vacuum and ultra-high vacuum systems
US5221190A (en) * 1991-04-02 1993-06-22 Leybold Aktiengesellschaft Ion sputtering pump with getter module
CN1215799A (zh) * 1997-10-15 1999-05-05 工程吸气公司 高气体吸附速度的吸气泵
US20060231773A1 (en) * 2005-04-13 2006-10-19 Souichi Katagiri Charged particle beam apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP平3-222876A 1991.10.01

Also Published As

Publication number Publication date
JP2011517836A (ja) 2011-06-16
CA2714274A1 (en) 2009-10-01
CN101978463A (zh) 2011-02-16
US20110014063A1 (en) 2011-01-20
IL208238A (en) 2014-05-28
WO2009118398A1 (en) 2009-10-01
KR101455044B1 (ko) 2014-10-27
JP5302386B2 (ja) 2013-10-02
US8342813B2 (en) 2013-01-01
RU2495510C2 (ru) 2013-10-10
KR20110004399A (ko) 2011-01-13
RU2010144064A (ru) 2012-05-10
EP2260502A1 (en) 2010-12-15
EP2260502B1 (en) 2023-05-03
IL208238A0 (en) 2010-12-30
BRPI0910238A2 (pt) 2015-09-29

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