RU2430827C2 - Инструмент с полирующей поверхностью из спеченного вещества и способ его изготовления - Google Patents
Инструмент с полирующей поверхностью из спеченного вещества и способ его изготовления Download PDFInfo
- Publication number
- RU2430827C2 RU2430827C2 RU2008110905/02A RU2008110905A RU2430827C2 RU 2430827 C2 RU2430827 C2 RU 2430827C2 RU 2008110905/02 A RU2008110905/02 A RU 2008110905/02A RU 2008110905 A RU2008110905 A RU 2008110905A RU 2430827 C2 RU2430827 C2 RU 2430827C2
- Authority
- RU
- Russia
- Prior art keywords
- abrasive
- grooves
- tool according
- abrasive tool
- elements
- Prior art date
Links
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/2457—Parallel ribs and/or grooves
- Y10T428/24579—Parallel ribs and/or grooves with particulate matter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005243529 | 2005-08-25 | ||
JP2005-243529 | 2005-08-25 | ||
JP2006-209236 | 2006-07-31 | ||
JP2006209236 | 2006-07-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2008110905A RU2008110905A (ru) | 2009-09-27 |
RU2430827C2 true RU2430827C2 (ru) | 2011-10-10 |
Family
ID=37771687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2008110905/02A RU2430827C2 (ru) | 2005-08-25 | 2006-08-25 | Инструмент с полирующей поверхностью из спеченного вещества и способ его изготовления |
Country Status (12)
Country | Link |
---|---|
US (1) | US20090215366A1 (ja) |
EP (1) | EP1944125B1 (ja) |
JP (1) | JP5033630B2 (ja) |
KR (1) | KR101293461B1 (ja) |
CN (2) | CN101247923B (ja) |
AU (1) | AU2006282293B2 (ja) |
BR (1) | BRPI0615020A2 (ja) |
CA (1) | CA2620407A1 (ja) |
IL (1) | IL189314A (ja) |
RU (1) | RU2430827C2 (ja) |
TW (1) | TWI406736B (ja) |
WO (1) | WO2007023949A1 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009113133A (ja) * | 2007-11-05 | 2009-05-28 | Hiroshi Ishizuka | Cmpパッド・コンディショナー |
BR112012027030B1 (pt) * | 2010-04-27 | 2020-05-19 | 3M Innovative Properties Co | artigo abrasivo, método de abrasão de uma peça de trabalho e método de preparo de uma partícula abrasiva conformada de cerâmica |
US20120171935A1 (en) * | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
JP5809880B2 (ja) * | 2011-08-25 | 2015-11-11 | 新日鉄住金マテリアルズ株式会社 | 研磨布用ドレッサー |
KR102074138B1 (ko) | 2011-12-30 | 2020-02-07 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
US10710211B2 (en) * | 2012-08-02 | 2020-07-14 | 3M Innovative Properties Company | Abrasive articles with precisely shaped features and method of making thereof |
CN102862121B (zh) * | 2012-09-17 | 2015-05-20 | 上海华力微电子有限公司 | 一种cmp研磨垫修整结构 |
ES2756849T3 (es) * | 2013-08-07 | 2020-04-27 | Reishauer Ag | Herramienta rectificadora y procedimiento para su fabricación |
JP5976228B2 (ja) * | 2013-08-26 | 2016-08-23 | 株式会社東京精密 | ダイシングブレード |
EP3057739B1 (en) * | 2013-10-18 | 2020-12-09 | 3M Innovative Properties Company | Coated abrasive article and method of making the same |
US10293463B2 (en) * | 2014-03-21 | 2019-05-21 | Entegris, Inc. | Chemical mechanical planarization pad conditioner with elongated cutting edges |
TWI609742B (zh) * | 2015-04-20 | 2018-01-01 | 中國砂輪企業股份有限公司 | 研磨工具 |
WO2017145491A1 (ja) * | 2016-02-22 | 2017-08-31 | 株式会社アライドマテリアル | 砥粒工具 |
CN106078516B (zh) * | 2016-06-21 | 2018-09-04 | 大连理工大学 | 一种cmp抛光垫修整器 |
WO2018207145A1 (en) * | 2017-05-12 | 2018-11-15 | 3M Innovative Properties Company | Tetrahedral abrasive particles in abrasive articles |
EP3713711A4 (en) * | 2017-11-21 | 2021-08-18 | 3M Innovative Properties Company | COATED GRINDING WHEEL AND METHOD OF MANUFACTURING AND USING THEREOF |
JP6899490B2 (ja) | 2017-11-21 | 2021-07-07 | スリーエム イノベイティブ プロパティズ カンパニー | 被覆研磨ディスク並びにその製造方法及び使用方法 |
CN111372728B (zh) | 2017-11-21 | 2022-08-09 | 3M创新有限公司 | 涂覆研磨盘及其制备和使用方法 |
KR102026250B1 (ko) * | 2018-02-05 | 2019-09-27 | 에스케이실트론 주식회사 | 웨이퍼 연마 장치용 연마 패드 및 그의 제조방법 |
JP6918217B2 (ja) * | 2018-04-27 | 2021-08-11 | 住友電気工業株式会社 | 多結晶砥粒およびそれを備えた研削ホイール |
TWI735795B (zh) * | 2018-08-24 | 2021-08-11 | 宋健民 | 拋光墊修整器及化學機械平坦化的方法 |
KR102440315B1 (ko) * | 2020-05-11 | 2022-09-06 | 한국생산기술연구원 | 패턴구조를 갖는 화학기계적 연마용 패드 및 이의 제조방법 |
DK180350B1 (da) * | 2019-09-18 | 2021-01-22 | Flex Trim As | Slibeelement til brug i roterende slibe- eller pudseværktøj |
CN112677062B (zh) * | 2019-10-18 | 2022-12-09 | 江苏韦尔博新材料科技有限公司 | 一种打磨钢材磨盘的专用磨粒地貌、其金刚石磨盘与制备方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5739106A (en) * | 1980-08-14 | 1982-03-04 | Hiroshi Ishizuka | Production of diamond ultrahard alloy composite |
JPS58199776A (ja) * | 1982-05-12 | 1983-11-21 | 住友電気工業株式会社 | 工具用ダイヤモンド焼結体及びその製造方法 |
JPS6184303A (ja) * | 1984-09-28 | 1986-04-28 | Ishizuka Kenkyusho:Kk | 複合焼結体の製造法 |
JP2601284B2 (ja) * | 1987-09-01 | 1997-04-16 | 株式会社石塚研究所 | 焼結ダイヤモンド複合体、及びその製造方法 |
US5049165B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Composite material |
US4925457B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Method for making an abrasive tool |
US4954139A (en) * | 1989-03-31 | 1990-09-04 | The General Electric Company | Method for producing polycrystalline compact tool blanks with flat carbide support/diamond or CBN interfaces |
JPH08243927A (ja) * | 1995-03-02 | 1996-09-24 | Fuji Xerox Co Ltd | 研削工具とその製造方法及び研削装置 |
US5560754A (en) * | 1995-06-13 | 1996-10-01 | General Electric Company | Reduction of stresses in the polycrystalline abrasive layer of a composite compact with in situ bonded carbide/carbide support |
JPH09254042A (ja) * | 1996-03-15 | 1997-09-30 | Symtec:Kk | 溝切り用砥石およびその製造方法 |
JP2957519B2 (ja) * | 1996-05-23 | 1999-10-04 | 旭ダイヤモンド工業株式会社 | 半導体ウェーハ研磨パッド用ドレッサ及びその製造方法 |
JPH10138120A (ja) * | 1996-10-31 | 1998-05-26 | Kyocera Corp | ドレッシング用治具 |
US6054183A (en) * | 1997-07-10 | 2000-04-25 | Zimmer; Jerry W. | Method for making CVD diamond coated substrate for polishing pad conditioning head |
US6027659A (en) * | 1997-12-03 | 2000-02-22 | Intel Corporation | Polishing pad conditioning surface having integral conditioning points |
JPH11267902A (ja) * | 1998-03-23 | 1999-10-05 | Hiroshi Hashimoto | 超微細切刃付き工具及び超微細切刃付き加工具 |
JP2000190200A (ja) * | 1998-12-25 | 2000-07-11 | Mitsubishi Materials Silicon Corp | 研磨布のシ―ズニング治具 |
JP4332980B2 (ja) * | 1999-03-18 | 2009-09-16 | 株式会社デンソー | ハニカム構造体成形用金型の製造方法 |
JP2001088028A (ja) * | 1999-09-17 | 2001-04-03 | Koremura Toishi Seisakusho:Kk | ロータリードレッサー |
TW467802B (en) * | 1999-10-12 | 2001-12-11 | Hunatech Co Ltd | Conditioner for polishing pad and method for manufacturing the same |
KR100387954B1 (ko) * | 1999-10-12 | 2003-06-19 | (주) 휴네텍 | 연마패드용 컨디셔너와 이의 제조방법 |
TW436375B (en) * | 1999-11-16 | 2001-05-28 | Asia Ic Mic Process Inc | Formation method for dresser of chemical mechanical polishing pad |
JP2001347454A (ja) * | 2000-06-09 | 2001-12-18 | Koremura Toishi Seisakusho:Kk | ドレッサーとその製造方法 |
US20070060026A1 (en) * | 2005-09-09 | 2007-03-15 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
US20060258276A1 (en) * | 2005-05-16 | 2006-11-16 | Chien-Min Sung | Superhard cutters and associated methods |
-
2006
- 2006-08-25 JP JP2007532202A patent/JP5033630B2/ja not_active Expired - Fee Related
- 2006-08-25 TW TW095131436A patent/TWI406736B/zh not_active IP Right Cessation
- 2006-08-25 CA CA002620407A patent/CA2620407A1/en not_active Abandoned
- 2006-08-25 RU RU2008110905/02A patent/RU2430827C2/ru not_active IP Right Cessation
- 2006-08-25 US US11/990,562 patent/US20090215366A1/en not_active Abandoned
- 2006-08-25 EP EP06796810A patent/EP1944125B1/en not_active Not-in-force
- 2006-08-25 CN CN2006800307352A patent/CN101247923B/zh not_active Expired - Fee Related
- 2006-08-25 KR KR1020087005076A patent/KR101293461B1/ko not_active IP Right Cessation
- 2006-08-25 AU AU2006282293A patent/AU2006282293B2/en not_active Ceased
- 2006-08-25 BR BRPI0615020-9A patent/BRPI0615020A2/pt not_active IP Right Cessation
- 2006-08-25 CN CN200910170789A patent/CN101693353A/zh active Pending
- 2006-08-25 WO PCT/JP2006/316737 patent/WO2007023949A1/ja active Application Filing
-
2008
- 2008-02-05 IL IL189314A patent/IL189314A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU2006282293B2 (en) | 2011-06-23 |
EP1944125B1 (en) | 2012-01-25 |
RU2008110905A (ru) | 2009-09-27 |
CA2620407A1 (en) | 2007-03-01 |
KR101293461B1 (ko) | 2013-08-07 |
WO2007023949A1 (ja) | 2007-03-01 |
CN101247923A (zh) | 2008-08-20 |
AU2006282293A1 (en) | 2007-03-01 |
CN101693353A (zh) | 2010-04-14 |
KR20080037693A (ko) | 2008-04-30 |
JP5033630B2 (ja) | 2012-09-26 |
IL189314A0 (en) | 2008-06-05 |
BRPI0615020A2 (pt) | 2009-08-04 |
EP1944125A1 (en) | 2008-07-16 |
US20090215366A1 (en) | 2009-08-27 |
TW200714416A (en) | 2007-04-16 |
JPWO2007023949A1 (ja) | 2009-03-05 |
TWI406736B (zh) | 2013-09-01 |
CN101247923B (zh) | 2010-12-08 |
EP1944125A4 (en) | 2009-12-16 |
IL189314A (en) | 2013-01-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20170826 |