IL189314A - A device with a glossy heating surface and a method of manufacturing it - Google Patents
A device with a glossy heating surface and a method of manufacturing itInfo
- Publication number
- IL189314A IL189314A IL189314A IL18931408A IL189314A IL 189314 A IL189314 A IL 189314A IL 189314 A IL189314 A IL 189314A IL 18931408 A IL18931408 A IL 18931408A IL 189314 A IL189314 A IL 189314A
- Authority
- IL
- Israel
- Prior art keywords
- abrasive
- tool
- grooves
- units
- abrasive tool
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/2457—Parallel ribs and/or grooves
- Y10T428/24579—Parallel ribs and/or grooves with particulate matter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005243529 | 2005-08-25 | ||
JP2006209236 | 2006-07-31 | ||
PCT/JP2006/316737 WO2007023949A1 (ja) | 2005-08-25 | 2006-08-25 | 焼結体研磨部を持つ工具およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
IL189314A0 IL189314A0 (en) | 2008-06-05 |
IL189314A true IL189314A (en) | 2013-01-31 |
Family
ID=37771687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL189314A IL189314A (en) | 2005-08-25 | 2008-02-05 | A device with a glossy heating surface and a method of manufacturing it |
Country Status (12)
Country | Link |
---|---|
US (1) | US20090215366A1 (ja) |
EP (1) | EP1944125B1 (ja) |
JP (1) | JP5033630B2 (ja) |
KR (1) | KR101293461B1 (ja) |
CN (2) | CN101247923B (ja) |
AU (1) | AU2006282293B2 (ja) |
BR (1) | BRPI0615020A2 (ja) |
CA (1) | CA2620407A1 (ja) |
IL (1) | IL189314A (ja) |
RU (1) | RU2430827C2 (ja) |
TW (1) | TWI406736B (ja) |
WO (1) | WO2007023949A1 (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009113133A (ja) * | 2007-11-05 | 2009-05-28 | Hiroshi Ishizuka | Cmpパッド・コンディショナー |
EP2563549B1 (en) * | 2010-04-27 | 2022-07-13 | 3M Innovative Properties Company | Ceramic shaped abrasive particles, methods of making the same, and abrasive articles containing the same |
US20120171935A1 (en) * | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
JP5809880B2 (ja) * | 2011-08-25 | 2015-11-11 | 新日鉄住金マテリアルズ株式会社 | 研磨布用ドレッサー |
KR102074138B1 (ko) | 2011-12-30 | 2020-02-07 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
KR102089383B1 (ko) * | 2012-08-02 | 2020-03-16 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 정밀하게 형상화된 특징부를 갖는 연마 물품 및 그의 제조 방법 |
CN102862121B (zh) * | 2012-09-17 | 2015-05-20 | 上海华力微电子有限公司 | 一种cmp研磨垫修整结构 |
ES2756849T3 (es) * | 2013-08-07 | 2020-04-27 | Reishauer Ag | Herramienta rectificadora y procedimiento para su fabricación |
JP5976228B2 (ja) * | 2013-08-26 | 2016-08-23 | 株式会社東京精密 | ダイシングブレード |
US20160263722A1 (en) * | 2013-10-18 | 2016-09-15 | 3M Innovative Properties Company | Coated abrasive article and method of making the same |
KR102304574B1 (ko) * | 2014-03-21 | 2021-09-27 | 엔테그리스, 아이엔씨. | 세장형 절삭 에지를 갖는 화학 기계 평탄화 패드 컨디셔너 |
TWI609742B (zh) * | 2015-04-20 | 2018-01-01 | 中國砂輪企業股份有限公司 | 研磨工具 |
EP3409422B1 (en) | 2016-02-22 | 2024-05-22 | A.L.M.T. Corp. | Abrasive tool |
CN106078516B (zh) * | 2016-06-21 | 2018-09-04 | 大连理工大学 | 一种cmp抛光垫修整器 |
EP3621771A1 (en) | 2017-05-12 | 2020-03-18 | 3M Innovative Properties Company | Tetrahedral abrasive particles in abrasive articles |
US11607775B2 (en) | 2017-11-21 | 2023-03-21 | 3M Innovative Properties Company | Coated abrasive disc and methods of making and using the same |
JP2021504171A (ja) | 2017-11-21 | 2021-02-15 | スリーエム イノベイティブ プロパティズ カンパニー | 被覆研磨ディスク並びにその製造方法及び使用方法 |
WO2019102329A1 (en) * | 2017-11-21 | 2019-05-31 | 3M Innovative Properties Company | Coated abrasive disc and methods of making and using the same |
KR102026250B1 (ko) | 2018-02-05 | 2019-09-27 | 에스케이실트론 주식회사 | 웨이퍼 연마 장치용 연마 패드 및 그의 제조방법 |
WO2019208640A1 (ja) * | 2018-04-27 | 2019-10-31 | 住友電気工業株式会社 | 多結晶砥粒およびそれを備えた研削ホイール |
TWI735795B (zh) * | 2018-08-24 | 2021-08-11 | 宋健民 | 拋光墊修整器及化學機械平坦化的方法 |
KR102440315B1 (ko) * | 2020-05-11 | 2022-09-06 | 한국생산기술연구원 | 패턴구조를 갖는 화학기계적 연마용 패드 및 이의 제조방법 |
DK180350B1 (da) * | 2019-09-18 | 2021-01-22 | Flex Trim As | Slibeelement til brug i roterende slibe- eller pudseværktøj |
CN112677062B (zh) * | 2019-10-18 | 2022-12-09 | 江苏韦尔博新材料科技有限公司 | 一种打磨钢材磨盘的专用磨粒地貌、其金刚石磨盘与制备方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5739106A (en) * | 1980-08-14 | 1982-03-04 | Hiroshi Ishizuka | Production of diamond ultrahard alloy composite |
JPS58199776A (ja) * | 1982-05-12 | 1983-11-21 | 住友電気工業株式会社 | 工具用ダイヤモンド焼結体及びその製造方法 |
JPS6184303A (ja) * | 1984-09-28 | 1986-04-28 | Ishizuka Kenkyusho:Kk | 複合焼結体の製造法 |
JP2601284B2 (ja) * | 1987-09-01 | 1997-04-16 | 株式会社石塚研究所 | 焼結ダイヤモンド複合体、及びその製造方法 |
US4925457B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Method for making an abrasive tool |
US5049165B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Composite material |
US4954139A (en) * | 1989-03-31 | 1990-09-04 | The General Electric Company | Method for producing polycrystalline compact tool blanks with flat carbide support/diamond or CBN interfaces |
JPH08243927A (ja) * | 1995-03-02 | 1996-09-24 | Fuji Xerox Co Ltd | 研削工具とその製造方法及び研削装置 |
US5560754A (en) * | 1995-06-13 | 1996-10-01 | General Electric Company | Reduction of stresses in the polycrystalline abrasive layer of a composite compact with in situ bonded carbide/carbide support |
JPH09254042A (ja) * | 1996-03-15 | 1997-09-30 | Symtec:Kk | 溝切り用砥石およびその製造方法 |
JP2957519B2 (ja) * | 1996-05-23 | 1999-10-04 | 旭ダイヤモンド工業株式会社 | 半導体ウェーハ研磨パッド用ドレッサ及びその製造方法 |
JPH10138120A (ja) * | 1996-10-31 | 1998-05-26 | Kyocera Corp | ドレッシング用治具 |
US6054183A (en) * | 1997-07-10 | 2000-04-25 | Zimmer; Jerry W. | Method for making CVD diamond coated substrate for polishing pad conditioning head |
US6027659A (en) * | 1997-12-03 | 2000-02-22 | Intel Corporation | Polishing pad conditioning surface having integral conditioning points |
JPH11267902A (ja) * | 1998-03-23 | 1999-10-05 | Hiroshi Hashimoto | 超微細切刃付き工具及び超微細切刃付き加工具 |
JP2000190200A (ja) * | 1998-12-25 | 2000-07-11 | Mitsubishi Materials Silicon Corp | 研磨布のシ―ズニング治具 |
JP4332980B2 (ja) * | 1999-03-18 | 2009-09-16 | 株式会社デンソー | ハニカム構造体成形用金型の製造方法 |
JP2001088028A (ja) * | 1999-09-17 | 2001-04-03 | Koremura Toishi Seisakusho:Kk | ロータリードレッサー |
KR100387954B1 (ko) * | 1999-10-12 | 2003-06-19 | (주) 휴네텍 | 연마패드용 컨디셔너와 이의 제조방법 |
US6439986B1 (en) * | 1999-10-12 | 2002-08-27 | Hunatech Co., Ltd. | Conditioner for polishing pad and method for manufacturing the same |
TW436375B (en) * | 1999-11-16 | 2001-05-28 | Asia Ic Mic Process Inc | Formation method for dresser of chemical mechanical polishing pad |
JP2001347454A (ja) * | 2000-06-09 | 2001-12-18 | Koremura Toishi Seisakusho:Kk | ドレッサーとその製造方法 |
US20060258276A1 (en) * | 2005-05-16 | 2006-11-16 | Chien-Min Sung | Superhard cutters and associated methods |
US20070060026A1 (en) * | 2005-09-09 | 2007-03-15 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
-
2006
- 2006-08-25 CN CN2006800307352A patent/CN101247923B/zh not_active Expired - Fee Related
- 2006-08-25 KR KR1020087005076A patent/KR101293461B1/ko not_active IP Right Cessation
- 2006-08-25 US US11/990,562 patent/US20090215366A1/en not_active Abandoned
- 2006-08-25 EP EP06796810A patent/EP1944125B1/en not_active Not-in-force
- 2006-08-25 AU AU2006282293A patent/AU2006282293B2/en not_active Ceased
- 2006-08-25 CN CN200910170789A patent/CN101693353A/zh active Pending
- 2006-08-25 WO PCT/JP2006/316737 patent/WO2007023949A1/ja active Application Filing
- 2006-08-25 RU RU2008110905/02A patent/RU2430827C2/ru not_active IP Right Cessation
- 2006-08-25 TW TW095131436A patent/TWI406736B/zh not_active IP Right Cessation
- 2006-08-25 JP JP2007532202A patent/JP5033630B2/ja not_active Expired - Fee Related
- 2006-08-25 BR BRPI0615020-9A patent/BRPI0615020A2/pt not_active IP Right Cessation
- 2006-08-25 CA CA002620407A patent/CA2620407A1/en not_active Abandoned
-
2008
- 2008-02-05 IL IL189314A patent/IL189314A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
IL189314A0 (en) | 2008-06-05 |
RU2008110905A (ru) | 2009-09-27 |
WO2007023949A1 (ja) | 2007-03-01 |
EP1944125A1 (en) | 2008-07-16 |
KR101293461B1 (ko) | 2013-08-07 |
CN101247923A (zh) | 2008-08-20 |
TWI406736B (zh) | 2013-09-01 |
BRPI0615020A2 (pt) | 2009-08-04 |
AU2006282293A1 (en) | 2007-03-01 |
JPWO2007023949A1 (ja) | 2009-03-05 |
US20090215366A1 (en) | 2009-08-27 |
CN101247923B (zh) | 2010-12-08 |
EP1944125B1 (en) | 2012-01-25 |
AU2006282293B2 (en) | 2011-06-23 |
EP1944125A4 (en) | 2009-12-16 |
TW200714416A (en) | 2007-04-16 |
KR20080037693A (ko) | 2008-04-30 |
CA2620407A1 (en) | 2007-03-01 |
CN101693353A (zh) | 2010-04-14 |
RU2430827C2 (ru) | 2011-10-10 |
JP5033630B2 (ja) | 2012-09-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AU2006282293B2 (en) | Tool with sintered body polishing surface and method of manufacturing the same | |
KR100387954B1 (ko) | 연마패드용 컨디셔너와 이의 제조방법 | |
KR101091030B1 (ko) | 감소된 마찰력을 갖는 패드 컨디셔너 제조방법 | |
KR100789620B1 (ko) | 초연마입자공구 및 그 제조방법 | |
EP2351630B1 (en) | Apparatus for polishing spherical body, method for polishing spherical body and method for manufacturing spherical member | |
JP3791610B2 (ja) | 鏡面加工用超砥粒ホイール | |
TW200821092A (en) | Conditioning disk having uniform structures | |
JP2012213833A (ja) | パッドコンディショニング用焼結体およびその製造方法 | |
TWI383860B (zh) | Modular dresser | |
JPH0715725Y2 (ja) | 電着砥石 | |
JP2011020182A (ja) | パッド・コンディショニングに適した研磨工具及びこれを用いた研磨方法 | |
JP4281253B2 (ja) | 電着砥石とその製造装置及び製造方法 | |
KR200175263Y1 (ko) | 화학적.기계적연마 장치의 폴리싱 패드용 콘디셔너의 구조 | |
JPH08192359A (ja) | 研削砥石の成形又は目立て用ドレッサとこれを用いた研削砥石の成形又は目立て方法 | |
JP2003039334A (ja) | 平面ホーニング加工用超砥粒ホイール及びそのドレス方法ならびに同ホイールを使用する研削装置 | |
JP2012121129A (ja) | パッド・コンディショニングに適した研磨工具及びこれを用いた研磨方法 | |
KR101147149B1 (ko) | 폴리싱패드드레서 | |
KR200188920Y1 (ko) | 연마패드용 컨디셔너 | |
KR101126107B1 (ko) | 가공팁 | |
KR101148934B1 (ko) | 조합식 드레서 | |
JPH06114743A (ja) | 電着砥石 | |
CN110871407A (zh) | 抛光垫修整器及化学机械平坦化的方法 | |
JP2009113133A (ja) | Cmpパッド・コンディショナー | |
JP2012213834A (ja) | 超砥粒焼結体研磨パッチおよびその製造方法 | |
KR20110113158A (ko) | 감소된 마찰력을 갖는 패드 컨디셔너 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
KB | Patent renewed | ||
MM9K | Patent not in force due to non-payment of renewal fees |