RO85673B1 - Procedeu de realizare a tranzistoarelor dmos de putere - Google Patents

Procedeu de realizare a tranzistoarelor dmos de putere

Info

Publication number
RO85673B1
RO85673B1 RO111306A RO11130683A RO85673B1 RO 85673 B1 RO85673 B1 RO 85673B1 RO 111306 A RO111306 A RO 111306A RO 11130683 A RO11130683 A RO 11130683A RO 85673 B1 RO85673 B1 RO 85673B1
Authority
RO
Romania
Prior art keywords
substrate
making
realization
power transistors
source
Prior art date
Application number
RO111306A
Other languages
English (en)
Other versions
RO85673A2 (ro
Inventor
Sorin Stefan Georgescu
Dumitru George Sdrulla
Ion Ghita
Tudor Gavril Dunca
Original Assignee
îNTREPRINDEREA DE PIESE RADIO SI SEMICONDUCTORI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by îNTREPRINDEREA DE PIESE RADIO SI SEMICONDUCTORI filed Critical îNTREPRINDEREA DE PIESE RADIO SI SEMICONDUCTORI
Priority to RO111306A priority Critical patent/RO85673B1/ro
Publication of RO85673A2 publication Critical patent/RO85673A2/ro
Publication of RO85673B1 publication Critical patent/RO85673B1/ro

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  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

Prezenta inventie se refera la un procedeu de realizare a tranzistoarelor MOS de putere dublu difazate, cu drena contactata pe spatele structurii, generic denumite DMOS. Procedeul, conform inventiei, prevede realizarea substratului si sursei prin implantare ionica printr-un strat de nitrura de siliciu depus dupa definirea electrozilor de polisiliciu, scurtcircuitarea sursa-substrat prin pastrarea unei zone de oxid gros (impenetrabil de la implantare) iar sub padurile de contactare prevede realizarea unor zine de potential flotant folosind acelasi dopant ca pentru substrat.
RO111306A 1983-06-16 1983-06-16 Procedeu de realizare a tranzistoarelor dmos de putere RO85673B1 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RO111306A RO85673B1 (ro) 1983-06-16 1983-06-16 Procedeu de realizare a tranzistoarelor dmos de putere

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RO111306A RO85673B1 (ro) 1983-06-16 1983-06-16 Procedeu de realizare a tranzistoarelor dmos de putere

Publications (2)

Publication Number Publication Date
RO85673A2 RO85673A2 (ro) 1984-10-31
RO85673B1 true RO85673B1 (ro) 1984-11-30

Family

ID=20113238

Family Applications (1)

Application Number Title Priority Date Filing Date
RO111306A RO85673B1 (ro) 1983-06-16 1983-06-16 Procedeu de realizare a tranzistoarelor dmos de putere

Country Status (1)

Country Link
RO (1) RO85673B1 (ro)

Also Published As

Publication number Publication date
RO85673A2 (ro) 1984-10-31

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