RO102182B1 - Procedeu pentru obtinerea diodelor de putere cu siliciu de tip mesa - Google Patents
Procedeu pentru obtinerea diodelor de putere cu siliciu de tip mesaInfo
- Publication number
- RO102182B1 RO102182B1 RO137292A RO13729288A RO102182B1 RO 102182 B1 RO102182 B1 RO 102182B1 RO 137292 A RO137292 A RO 137292A RO 13729288 A RO13729288 A RO 13729288A RO 102182 B1 RO102182 B1 RO 102182B1
- Authority
- RO
- Romania
- Prior art keywords
- silicon
- power diode
- production method
- type production
- mesa type
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 238000005260 corrosion Methods 0.000 abstract 2
- 230000007797 corrosion Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000000407 epitaxy Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Landscapes
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Prezenta inventie se refera la un procedeu pentru realizarea prin corodare MESA a structurilor de diode de putere care sunt utilizate în domeniul microundelor. Procedeul, conform inventiei consta în obtinerea structurii diodelor prin corodare chimica în plasma anzitropa a unor ziduri de siliciu policristalin depuse simultan cu un volum de siliciu monocristalin, în care se executa, ulterior epitaxiei, difuzia pentru obtinerea jonctiunii p + + , a diodei de putere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO1988137292A RO102182A2 (ro) | 1988-12-30 | 1988-12-30 | Procedeu pentru obtinerea diodelor de putere cu siliciu de tip mesa |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO1988137292A RO102182A2 (ro) | 1988-12-30 | 1988-12-30 | Procedeu pentru obtinerea diodelor de putere cu siliciu de tip mesa |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RO102182B1 true RO102182B1 (ro) | 1991-09-30 |
| RO102182A2 RO102182A2 (ro) | 1991-10-21 |
Family
ID=20123534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO1988137292A RO102182A2 (ro) | 1988-12-30 | 1988-12-30 | Procedeu pentru obtinerea diodelor de putere cu siliciu de tip mesa |
Country Status (1)
| Country | Link |
|---|---|
| RO (1) | RO102182A2 (ro) |
-
1988
- 1988-12-30 RO RO1988137292A patent/RO102182A2/ro unknown
Also Published As
| Publication number | Publication date |
|---|---|
| RO102182A2 (ro) | 1991-10-21 |
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