RO97880B1 - Procedeu de obtinere a tranzistoarelor cu inductie statica cu jonctiune poarta retrasa - Google Patents
Procedeu de obtinere a tranzistoarelor cu inductie statica cu jonctiune poarta retrasaInfo
- Publication number
- RO97880B1 RO97880B1 RO133239A RO13323988A RO97880B1 RO 97880 B1 RO97880 B1 RO 97880B1 RO 133239 A RO133239 A RO 133239A RO 13323988 A RO13323988 A RO 13323988A RO 97880 B1 RO97880 B1 RO 97880B1
- Authority
- RO
- Romania
- Prior art keywords
- static induction
- silicon
- silicon dioxide
- layer
- junction
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 230000006698 induction Effects 0.000 title abstract 3
- 230000003068 static effect Effects 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005260 corrosion Methods 0.000 abstract 2
- 230000007797 corrosion Effects 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 238000005234 chemical deposition Methods 0.000 abstract 1
- 238000000407 epitaxy Methods 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 238000000206 photolithography Methods 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000012808 vapor phase Substances 0.000 abstract 1
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
Prezenta inventie se refera la un procedeu de obtinere a structurii tranzistorului cu inductie statica cu jonctiune poarta retrasa pentru tensiuni si puteri mari, utilizat în domenil microundelor. Procedeul, conform inventiei, consta într-o serie de operatii clasice pentru transzistorul cu inductie statica, precum oxidari termice, depuneri chimice din faza de vapori, epitaxie, difuzii, fotolitografii, metalizari etc, iar în scopul obtinerii de tensiuni de strapungere si puteri mari prevede ca difuzia retelei jonctiunilor de poarta sa se efectueze dintr-un strat de bioxid de siliciu dopat cu bor depus pe sandvichul dielectric format din bioxid de siliciu si nitrura de siliciu, realizat prin procese cunoscute la suprafata plachetei de siliciu în stratul de siliciu mmonocristalin n - crescut selectiv în jurul sandvichului dielectric si simultan cu cresterea stratului de oxid, la suprafata siliciului monocristalin, iar corodarea puturilor retelei de porti retrase sa fie realizata prin corodarea chimica conventionala a bioxidului de siliciu dopat cu bor prin ariile de poarta.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO133239A RO97880B1 (ro) | 1988-04-27 | 1988-04-27 | Procedeu de obtinere a tranzistoarelor cu inductie statica cu jonctiune poarta retrasa |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO133239A RO97880B1 (ro) | 1988-04-27 | 1988-04-27 | Procedeu de obtinere a tranzistoarelor cu inductie statica cu jonctiune poarta retrasa |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RO97880B1 true RO97880B1 (ro) | 1990-01-30 |
Family
ID=40906005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO133239A RO97880B1 (ro) | 1988-04-27 | 1988-04-27 | Procedeu de obtinere a tranzistoarelor cu inductie statica cu jonctiune poarta retrasa |
Country Status (1)
| Country | Link |
|---|---|
| RO (1) | RO97880B1 (ro) |
-
1988
- 1988-04-27 RO RO133239A patent/RO97880B1/ro unknown
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