PL3197013T3 - Cyrkulator do odzyskiwania, urządzenie w postaci źródła zasilania o wysokiej częstotliwości i sposób odzyskiwania mocy o wysokiej częstotliwości - Google Patents

Cyrkulator do odzyskiwania, urządzenie w postaci źródła zasilania o wysokiej częstotliwości i sposób odzyskiwania mocy o wysokiej częstotliwości

Info

Publication number
PL3197013T3
PL3197013T3 PL14900492T PL14900492T PL3197013T3 PL 3197013 T3 PL3197013 T3 PL 3197013T3 PL 14900492 T PL14900492 T PL 14900492T PL 14900492 T PL14900492 T PL 14900492T PL 3197013 T3 PL3197013 T3 PL 3197013T3
Authority
PL
Poland
Prior art keywords
frequency power
regeneration
supply device
power supply
circulator
Prior art date
Application number
PL14900492T
Other languages
English (en)
Inventor
Itsuo Yuzurihara
Satoshi Aikawa
Ryosuke OHMA
Original Assignee
Kyosan Electric Mfg. Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=54348596&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=PL3197013(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Kyosan Electric Mfg. Co., Ltd. filed Critical Kyosan Electric Mfg. Co., Ltd.
Publication of PL3197013T3 publication Critical patent/PL3197013T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/32—Non-reciprocal transmission devices
    • H01P1/38—Circulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
    • H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
    • H02J50/20—Circuit arrangements or systems for wireless supply or distribution of electric power using microwaves or radio frequency waves
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
    • H03F1/56—Modifications of input or output impedances, not otherwise provided for
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/189—High frequency amplifiers, e.g. radio frequency amplifiers
    • H03F3/19—High frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
    • H03F3/193—High frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only with field-effect devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
    • H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
    • H03F3/217—Class D power amplifiers; Switching amplifiers
    • H03F3/2171—Class D power amplifiers; Switching amplifiers with field-effect devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/60—Amplifiers in which coupling networks have distributed constants, e.g. with waveguide resonators
    • H03F3/601—Amplifiers in which coupling networks have distributed constants, e.g. with waveguide resonators using FET's, e.g. GaAs FET's
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/01—Resonant DC/DC converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
    • H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
    • H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
    • H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
    • H02M3/33573—Full-bridge at primary side of an isolation transformer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/387—A circuit being added at the output of an amplifier to adapt the output impedance of the amplifier
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/451—Indexing scheme relating to amplifiers the amplifier being a radio frequency amplifier
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/541—Transformer coupled at the output of an amplifier
PL14900492T 2014-08-25 2014-11-19 Cyrkulator do odzyskiwania, urządzenie w postaci źródła zasilania o wysokiej częstotliwości i sposób odzyskiwania mocy o wysokiej częstotliwości PL3197013T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014170664A JP5797313B1 (ja) 2014-08-25 2014-08-25 回生サーキュレータ、高周波電源装置、及び高周波電力の回生方法
PCT/JP2014/080580 WO2016031091A1 (ja) 2014-08-25 2014-11-19 回生サーキュレータ、高周波電源装置、及び高周波電力の回生方法
EP14900492.1A EP3197013B1 (en) 2014-08-25 2014-11-19 Regeneration circulator, high-frequency power supply device, and high-frequency power regeneration method

Publications (1)

Publication Number Publication Date
PL3197013T3 true PL3197013T3 (pl) 2021-05-31

Family

ID=54348596

Family Applications (1)

Application Number Title Priority Date Filing Date
PL14900492T PL3197013T3 (pl) 2014-08-25 2014-11-19 Cyrkulator do odzyskiwania, urządzenie w postaci źródła zasilania o wysokiej częstotliwości i sposób odzyskiwania mocy o wysokiej częstotliwości

Country Status (8)

Country Link
US (1) US10355607B2 (pl)
EP (1) EP3197013B1 (pl)
JP (1) JP5797313B1 (pl)
KR (1) KR101913050B1 (pl)
CN (1) CN106797141B (pl)
PL (1) PL3197013T3 (pl)
TW (1) TWI576017B (pl)
WO (1) WO2016031091A1 (pl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6608761B2 (ja) * 2016-04-14 2019-11-20 ファナック株式会社 Ｄｃリンクコンデンサの電圧変動を抑制するモータ駆動装置
US10924024B2 (en) * 2016-09-02 2021-02-16 Panasonic Intellectual Property Management Co, Ltd. Regenerative power conversion system with inverter and converter
WO2018061932A1 (ja) 2016-09-30 2018-04-05 株式会社アルバック 電源装置
US10672590B2 (en) * 2018-03-14 2020-06-02 Lam Research Corporation Frequency tuning for a matchless plasma source
JP7117693B2 (ja) * 2018-03-22 2022-08-15 大成建設株式会社 電力伝送システム
JP7348101B2 (ja) 2020-02-18 2023-09-20 株式会社京三製作所 高周波電源装置の制御方法及び高周波電源装置
CN117678204A (zh) * 2020-04-13 2024-03-08 先进工程解决方案全球控股私人有限公司 具有功率恢复的输入阻抗网络
DE102022122044A1 (de) * 2022-08-31 2024-02-29 TRUMPF Hüttinger GmbH + Co. KG Plasmazustandsüberwachungsvorrichtung zum Anschluss an eine Impedanzanpassungsschaltung für ein Plasmaerzeugungssystem, ein Plasmaerzeugungssystem und ein Verfahren zur Überwachung des Plasmaerzeugungssystems

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US5559685A (en) 1994-10-12 1996-09-24 Electronic Power Conditioning, Inc. Voltage clamped parallel resonant converter with controllable duty cycle
JP3920420B2 (ja) 1996-10-08 2007-05-30 富士通株式会社 Ｅｈ整合器、マイクロ波自動整合方法、半導体製造装置
US7180758B2 (en) 1999-07-22 2007-02-20 Mks Instruments, Inc. Class E amplifier with inductive clamp
DE60011874T2 (de) 1999-07-22 2005-08-25 Eni Technologies, Inc. Stromversorgungen mit schutzschaltungen
JP4461537B2 (ja) * 1999-12-24 2010-05-12 シンフォニアテクノロジー株式会社 電力線搬送通信装置
JP4141797B2 (ja) 2002-10-31 2008-08-27 株式会社東芝 低反射型リミタ並びに低反射型リミタを用いた送受信モジュールおよびアクティブフェーズドアレーアンテナ
JP2004205328A (ja) * 2002-12-25 2004-07-22 Daihen Corp 高周波電源装置
US8217299B2 (en) 2007-02-22 2012-07-10 Advanced Energy Industries, Inc. Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch
JP4808182B2 (ja) 2007-04-27 2011-11-02 株式会社エヌ・ティ・ティ・ドコモ 無線通信装置、無線通信装置の給電方法
TWI363481B (en) 2008-03-28 2012-05-01 Delta Electronics Inc Synchronous rectifying circuit having burst mode controller and controlling method thereof
CN102668325B (zh) 2009-10-29 2014-12-17 日本电业工作株式会社 电力再生装置及电力再生方法、蓄电系统及蓄电方法、以及高频波装置
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JP5534366B2 (ja) 2012-06-18 2014-06-25 株式会社京三製作所 高周波電力供給装置、及びイグニッション電圧選定方法
JP5534365B2 (ja) * 2012-06-18 2014-06-25 株式会社京三製作所 高周波電力供給装置、及び反射波電力制御方法
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Also Published As

Publication number Publication date
US10355607B2 (en) 2019-07-16
CN106797141A (zh) 2017-05-31
KR101913050B1 (ko) 2018-10-29
JP2016046951A (ja) 2016-04-04
TW201608936A (zh) 2016-03-01
TWI576017B (zh) 2017-03-21
WO2016031091A1 (ja) 2016-03-03
EP3197013B1 (en) 2021-01-06
JP5797313B1 (ja) 2015-10-21
US20170279364A1 (en) 2017-09-28
KR20170038187A (ko) 2017-04-06
EP3197013A1 (en) 2017-07-26
EP3197013A4 (en) 2018-03-21
CN106797141B (zh) 2019-04-26

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