NO793115L - Interferometrisk apparat. - Google Patents
Interferometrisk apparat.Info
- Publication number
- NO793115L NO793115L NO793115A NO793115A NO793115L NO 793115 L NO793115 L NO 793115L NO 793115 A NO793115 A NO 793115A NO 793115 A NO793115 A NO 793115A NO 793115 L NO793115 L NO 793115L
- Authority
- NO
- Norway
- Prior art keywords
- interferometer
- path
- measuring
- distance
- reflector
- Prior art date
Links
- 238000005259 measurement Methods 0.000 claims description 43
- 230000003287 optical effect Effects 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 9
- 230000007613 environmental effect Effects 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000000654 additive Substances 0.000 claims 1
- 230000000996 additive effect Effects 0.000 claims 1
- 230000010287 polarization Effects 0.000 description 19
- 230000002441 reversible effect Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000002301 combined effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- External Artificial Organs (AREA)
- Materials For Medical Uses (AREA)
- Paper (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/946,465 US4215938A (en) | 1978-09-28 | 1978-09-28 | Method and apparatus for correcting the error of a position measuring interferometer |
Publications (1)
Publication Number | Publication Date |
---|---|
NO793115L true NO793115L (no) | 1980-03-31 |
Family
ID=25484502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO793115A NO793115L (no) | 1978-09-28 | 1979-09-27 | Interferometrisk apparat. |
Country Status (13)
Country | Link |
---|---|
US (1) | US4215938A (es) |
JP (1) | JPS5546190A (es) |
AU (1) | AU4927179A (es) |
BR (1) | BR7904550A (es) |
CA (1) | CA1147950A (es) |
DE (1) | DE2929945A1 (es) |
ES (1) | ES482034A1 (es) |
FR (1) | FR2437609A1 (es) |
GB (1) | GB2032098B (es) |
IL (1) | IL57686A (es) |
IT (1) | IT1119125B (es) |
NO (1) | NO793115L (es) |
SE (1) | SE7903801L (es) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3378140D1 (en) * | 1982-07-14 | 1988-11-03 | Fujitsu Ltd | Polarizing elements |
US4536088A (en) * | 1982-09-17 | 1985-08-20 | Rashleigh Scott C | Polarimetric Fabry-Perot sensor |
US4558952A (en) * | 1983-02-22 | 1985-12-17 | Kules Vladimir P | Method for measuring an optical length of light path and a laser interferometer for carrying same into effect |
JPS60500734A (ja) * | 1983-03-07 | 1985-05-16 | ベツクマン・インストルメンツ・インコ−ポレ−テツド | 鏡走査速度制御装置 |
US4655587A (en) * | 1983-03-07 | 1987-04-07 | Beckman Instruments, Inc. | Mirror scan velocity control |
US4643577A (en) * | 1983-07-15 | 1987-02-17 | Wero Ohg Roth & Co. | Length measuring apparatus based on the dual laser beam interferometer principle |
JPS60225005A (ja) * | 1984-04-24 | 1985-11-09 | Tokyo Erekutoron Kk | レ−ザ−光を利用した位置決め装置の補正方式 |
GB2182433B (en) * | 1985-11-02 | 1989-10-25 | Stc Plc | Remote sensor |
US4752133A (en) * | 1985-12-19 | 1988-06-21 | Zygo Corporation | Differential plane mirror interferometer |
JPS62233704A (ja) * | 1986-03-28 | 1987-10-14 | ジゴ− コ−ポレ−シヨン | 差動平面鏡干渉計システム |
US4890921A (en) * | 1986-08-11 | 1990-01-02 | The Boeing Company | Scanning interferometer |
US4974961A (en) * | 1986-09-12 | 1990-12-04 | Jackson David A | Optical fibre measuring system |
US4765741A (en) * | 1987-03-20 | 1988-08-23 | Hewlett-Packard Company | Wavelength tracking compensator for an interferometer |
US4784489A (en) * | 1987-04-29 | 1988-11-15 | Hewlett-Packard Company | Fiber-optic based remote receiver for laser interferometer systems |
JPH0198902A (ja) * | 1987-10-12 | 1989-04-17 | Res Dev Corp Of Japan | 光波干渉測長装置 |
US4884889A (en) * | 1987-11-19 | 1989-12-05 | Brown & Sharpe Manufacturing Company | Calibration system for coordinate measuring machine |
US4939678A (en) * | 1987-11-19 | 1990-07-03 | Brown & Sharpe Manufacturing Company | Method for calibration of coordinate measuring machine |
JPH0674963B2 (ja) * | 1988-02-08 | 1994-09-21 | 株式会社日立製作所 | レーザ干渉測長器及びそれを用いた位置決め方法 |
DE4107762B4 (de) * | 1990-03-09 | 2006-07-13 | Dai Nippon Printing Co., Ltd. | Verfahren zum Herstellen von Master- und Arbeitsmusterplatten für den Ätzprozess |
DE69222219T2 (de) * | 1991-03-08 | 1998-01-15 | Renishaw Transducer Syst | Absolutwert-Gasrefraktometer |
US5801833A (en) * | 1991-03-08 | 1998-09-01 | Dai Nippon Printing Co., Ltd. | Method of producing master and working pattern plates for etching and photolithographic apparatus therefor |
JPH04331333A (ja) * | 1991-05-02 | 1992-11-19 | Canon Inc | 波長変化測定装置 |
JPH0634318A (ja) * | 1992-07-14 | 1994-02-08 | Nikon Corp | 干渉計測装置 |
US5585922A (en) * | 1992-12-24 | 1996-12-17 | Nikon Corporation | Dual interferometer apparatus compensating for environmental turbulence or fluctuation and for quantization error |
US5404222A (en) * | 1994-01-14 | 1995-04-04 | Sparta, Inc. | Interferametric measuring system with air turbulence compensation |
US5991033A (en) * | 1996-09-20 | 1999-11-23 | Sparta, Inc. | Interferometer with air turbulence compensation |
US6124931A (en) * | 1997-10-02 | 2000-09-26 | Zygo Corporation | Apparatus and methods for measuring intrinsic optical properties of a gas |
US6219144B1 (en) | 1997-10-02 | 2001-04-17 | Zygo Corporation | Apparatus and method for measuring the refractive index and optical path length effects of air using multiple-pass interferometry |
US6330065B1 (en) * | 1997-10-02 | 2001-12-11 | Zygo Corporation | Gas insensitive interferometric apparatus and methods |
US6509971B2 (en) | 2001-05-09 | 2003-01-21 | Nikon Corporation | Interferometer system |
US6674512B2 (en) | 2001-08-07 | 2004-01-06 | Nikon Corporation | Interferometer system for a semiconductor exposure system |
US6785005B2 (en) | 2001-09-21 | 2004-08-31 | Nikon Corporation | Switching type dual wafer stage |
US6665054B2 (en) | 2001-10-22 | 2003-12-16 | Nikon Corporation | Two stage method |
US7256871B2 (en) * | 2004-07-27 | 2007-08-14 | Asml Netherlands B.V. | Lithographic apparatus and method for calibrating the same |
KR101749442B1 (ko) | 2006-08-31 | 2017-06-20 | 가부시키가이샤 니콘 | 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
SG10201407478PA (en) | 2006-08-31 | 2015-01-29 | Nikon Corp | Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method |
SG10201407395SA (en) * | 2006-08-31 | 2014-12-30 | Nikon Corp | Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, And Device Manufacturing Method |
EP2993523B1 (en) | 2006-09-01 | 2017-08-30 | Nikon Corporation | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method |
TWI434326B (zh) | 2006-09-01 | 2014-04-11 | 尼康股份有限公司 | Mobile body driving method and moving body driving system, pattern forming method and apparatus, exposure method and apparatus, component manufacturing method, and correcting method |
US9013681B2 (en) * | 2007-11-06 | 2015-04-21 | Nikon Corporation | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method |
US9256140B2 (en) * | 2007-11-07 | 2016-02-09 | Nikon Corporation | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction |
US8665455B2 (en) * | 2007-11-08 | 2014-03-04 | Nikon Corporation | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method |
US8422015B2 (en) * | 2007-11-09 | 2013-04-16 | Nikon Corporation | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method |
CN102003935B (zh) * | 2010-11-03 | 2012-10-31 | 中国科学院光电技术研究所 | 一种激光跟踪仪测量中环境补偿的方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3656853A (en) * | 1966-11-07 | 1972-04-18 | Hewlett Packard Co | Interferometric system |
US3458259A (en) * | 1966-11-07 | 1969-07-29 | Hewlett Packard Co | Interferometric system |
DE1909728B2 (de) * | 1969-02-26 | 1971-02-18 | Interferometrische einrichtung | |
US3647302A (en) * | 1970-05-18 | 1972-03-07 | Bendix Corp | Apparatus for and method of obtaining precision dimensional measurements |
DE2027983A1 (de) * | 1970-06-06 | 1971-12-16 | Ibm Deutschland | Verfahren zur Fehlerkompensation |
-
1978
- 1978-09-28 US US05/946,465 patent/US4215938A/en not_active Expired - Lifetime
-
1979
- 1979-05-02 SE SE7903801A patent/SE7903801L/xx not_active Application Discontinuation
- 1979-06-28 ES ES482034A patent/ES482034A1/es not_active Expired
- 1979-06-29 IL IL57686A patent/IL57686A/xx unknown
- 1979-07-06 CA CA000331310A patent/CA1147950A/en not_active Expired
- 1979-07-06 JP JP8511479A patent/JPS5546190A/ja active Granted
- 1979-07-17 BR BR7904550A patent/BR7904550A/pt unknown
- 1979-07-24 DE DE19792929945 patent/DE2929945A1/de not_active Withdrawn
- 1979-07-26 AU AU49271/79A patent/AU4927179A/en not_active Abandoned
- 1979-08-07 IT IT68625/79A patent/IT1119125B/it active
- 1979-08-22 GB GB7929255A patent/GB2032098B/en not_active Expired
- 1979-09-26 FR FR7923931A patent/FR2437609A1/fr not_active Withdrawn
- 1979-09-27 NO NO793115A patent/NO793115L/no unknown
Also Published As
Publication number | Publication date |
---|---|
JPH0137682B2 (es) | 1989-08-09 |
US4215938A (en) | 1980-08-05 |
IT7968625A0 (it) | 1979-08-07 |
IL57686A (en) | 1982-04-30 |
SE7903801L (sv) | 1980-03-29 |
GB2032098A (en) | 1980-04-30 |
IT1119125B (it) | 1986-03-03 |
CA1147950A (en) | 1983-06-14 |
FR2437609A1 (fr) | 1980-04-25 |
IL57686A0 (en) | 1979-10-31 |
BR7904550A (pt) | 1980-04-15 |
GB2032098B (en) | 1983-05-25 |
AU4927179A (en) | 1980-04-03 |
DE2929945A1 (de) | 1980-04-17 |
ES482034A1 (es) | 1980-08-16 |
JPS5546190A (en) | 1980-03-31 |
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