DE69222219T2 - Absolutwert-Gasrefraktometer - Google Patents

Absolutwert-Gasrefraktometer

Info

Publication number
DE69222219T2
DE69222219T2 DE69222219T DE69222219T DE69222219T2 DE 69222219 T2 DE69222219 T2 DE 69222219T2 DE 69222219 T DE69222219 T DE 69222219T DE 69222219 T DE69222219 T DE 69222219T DE 69222219 T2 DE69222219 T2 DE 69222219T2
Authority
DE
Germany
Prior art keywords
absolute gas
gas refractometer
refractometer
absolute
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69222219T
Other languages
English (en)
Other versions
DE69222219D1 (de
Inventor
Raymond John Chaney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw Transducer Systems Ltd
Original Assignee
Renishaw Transducer Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB919104897A external-priority patent/GB9104897D0/en
Priority claimed from GB919117921A external-priority patent/GB9117921D0/en
Application filed by Renishaw Transducer Systems Ltd filed Critical Renishaw Transducer Systems Ltd
Application granted granted Critical
Publication of DE69222219D1 publication Critical patent/DE69222219D1/de
Publication of DE69222219T2 publication Critical patent/DE69222219T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69222219T 1991-03-08 1992-03-03 Absolutwert-Gasrefraktometer Expired - Fee Related DE69222219T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB919104897A GB9104897D0 (en) 1991-03-08 1991-03-08 Interferometric measuring apparatus including atmospheric compensation
GB919117921A GB9117921D0 (en) 1991-08-20 1991-08-20 Interferometric measuring apparatus including atmospheric compensation

Publications (2)

Publication Number Publication Date
DE69222219D1 DE69222219D1 (de) 1997-10-23
DE69222219T2 true DE69222219T2 (de) 1998-01-15

Family

ID=26298549

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69222219T Expired - Fee Related DE69222219T2 (de) 1991-03-08 1992-03-03 Absolutwert-Gasrefraktometer

Country Status (4)

Country Link
US (1) US5313271A (de)
EP (1) EP0508583B1 (de)
JP (1) JP3242139B2 (de)
DE (1) DE69222219T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5585922A (en) * 1992-12-24 1996-12-17 Nikon Corporation Dual interferometer apparatus compensating for environmental turbulence or fluctuation and for quantization error
GB9324926D0 (en) * 1993-12-04 1994-01-26 Renishaw Plc Combined interferometer and refractometer
US5870185A (en) * 1996-10-21 1999-02-09 C.F.C. Technology, Inc. Apparatus and method for fluid analysis
US6417927B2 (en) * 1999-04-28 2002-07-09 Zygo Corporation Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer
CN1095542C (zh) * 2000-02-25 2002-12-04 清华大学 双真空室双频测相空气折射率干涉仪
AU2002950968A0 (en) * 2002-08-23 2002-09-12 Australian National University Spectroscopic measurement of dispersion
DE102006059698A1 (de) 2006-12-18 2008-07-24 Abb Ag Interferometer zur Bestimmung des Brechungsindex für die Analyse von Gasen
JP5180594B2 (ja) * 2008-01-08 2013-04-10 新東エスプレシジョン株式会社 干渉計
CN102323237B (zh) * 2011-06-17 2013-01-02 清华大学 一种空气折射率快速高精度绝对测量装置及其测量方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4215938A (en) * 1978-09-28 1980-08-05 Farrand Industries, Inc. Method and apparatus for correcting the error of a position measuring interferometer
DE3370186D1 (en) * 1982-05-18 1987-04-16 Nat Res Dev Apparatus and method for measuring refractive index
US4733967A (en) * 1987-03-19 1988-03-29 Zygo Corporation Apparatus for the measurement of the refractive index of a gas
US4765741A (en) * 1987-03-20 1988-08-23 Hewlett-Packard Company Wavelength tracking compensator for an interferometer
US4813783A (en) * 1987-11-03 1989-03-21 Carl-Zeiss-Stiftung Interferometer system for making length or angle measurements

Also Published As

Publication number Publication date
DE69222219D1 (de) 1997-10-23
JP3242139B2 (ja) 2001-12-25
EP0508583A2 (de) 1992-10-14
JPH0627020A (ja) 1994-02-04
US5313271A (en) 1994-05-17
EP0508583A3 (en) 1993-06-23
EP0508583B1 (de) 1997-09-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee