NL9201825A - Inrichting voor het vervaardigen van een matrijs voor een schijfvormige registratiedrager. - Google Patents

Inrichting voor het vervaardigen van een matrijs voor een schijfvormige registratiedrager. Download PDF

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Publication number
NL9201825A
NL9201825A NL9201825A NL9201825A NL9201825A NL 9201825 A NL9201825 A NL 9201825A NL 9201825 A NL9201825 A NL 9201825A NL 9201825 A NL9201825 A NL 9201825A NL 9201825 A NL9201825 A NL 9201825A
Authority
NL
Netherlands
Prior art keywords
substrate
station
arm
photoresist layer
turntable
Prior art date
Application number
NL9201825A
Other languages
English (en)
Dutch (nl)
Original Assignee
Od & Me Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Od & Me Bv filed Critical Od & Me Bv
Priority to NL9201825A priority Critical patent/NL9201825A/nl
Priority to AT93202917T priority patent/ATE124562T1/de
Priority to DE69300222T priority patent/DE69300222T2/de
Priority to EP93202917A priority patent/EP0594255B1/en
Priority to US08/138,224 priority patent/US5403397A/en
Priority to KR1019930021947A priority patent/KR0182331B1/ko
Priority to JP5263487A priority patent/JP2771762B2/ja
Priority to RU93048165A priority patent/RU2113020C1/ru
Priority to CN93120241A priority patent/CN1039063C/zh
Priority to TW082109132A priority patent/TW239212B/zh
Publication of NL9201825A publication Critical patent/NL9201825A/nl
Priority to HK184995A priority patent/HK184995A/xx
Priority to US08/838,805 priority patent/US5780205A/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D17/00—Producing carriers of records containing fine grooves or impressions, e.g. disc records for needle playback, cylinder records; Producing record discs from master stencils
    • B29D17/005—Producing optically read record carriers, e.g. optical discs
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam
NL9201825A 1992-10-21 1992-10-21 Inrichting voor het vervaardigen van een matrijs voor een schijfvormige registratiedrager. NL9201825A (nl)

Priority Applications (12)

Application Number Priority Date Filing Date Title
NL9201825A NL9201825A (nl) 1992-10-21 1992-10-21 Inrichting voor het vervaardigen van een matrijs voor een schijfvormige registratiedrager.
AT93202917T ATE124562T1 (de) 1992-10-21 1993-10-18 Gerät zur herstellung einer matrize für einen scheibenförmigen aufzeichnungsträger.
DE69300222T DE69300222T2 (de) 1992-10-21 1993-10-18 Gerät zur Herstellung einer Matrize für einen scheibenförmigen Aufzeichnungsträger.
EP93202917A EP0594255B1 (en) 1992-10-21 1993-10-18 A device for manufacturing a mould for a disc-shaped registration carrier
US08/138,224 US5403397A (en) 1992-10-21 1993-10-20 Device for manufacturing a mold for a disc-shaped registration carrier
KR1019930021947A KR0182331B1 (ko) 1992-10-21 1993-10-21 원판형 기록매체의 주물을 제조하는 장치
JP5263487A JP2771762B2 (ja) 1992-10-21 1993-10-21 ディスク形記録担体用の型製造装置
RU93048165A RU2113020C1 (ru) 1992-10-21 1993-10-21 Способ и устройство для изготовления матрицы для дискового носителя информации
CN93120241A CN1039063C (zh) 1992-10-21 1993-10-21 一种制造盘状纪录体的模盘的装置及其方法
TW082109132A TW239212B (ru) 1992-10-21 1993-11-02
HK184995A HK184995A (en) 1992-10-21 1995-12-07 A device for manufacturing a mould for a disc-shaped registration carrier
US08/838,805 US5780205A (en) 1992-10-21 1997-04-10 Method for manufacturing a mold for a disc-shaped registration carrier

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9201825A NL9201825A (nl) 1992-10-21 1992-10-21 Inrichting voor het vervaardigen van een matrijs voor een schijfvormige registratiedrager.
NL9201825 1992-10-21

Publications (1)

Publication Number Publication Date
NL9201825A true NL9201825A (nl) 1994-05-16

Family

ID=19861405

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9201825A NL9201825A (nl) 1992-10-21 1992-10-21 Inrichting voor het vervaardigen van een matrijs voor een schijfvormige registratiedrager.

Country Status (11)

Country Link
US (2) US5403397A (ru)
EP (1) EP0594255B1 (ru)
JP (1) JP2771762B2 (ru)
KR (1) KR0182331B1 (ru)
CN (1) CN1039063C (ru)
AT (1) ATE124562T1 (ru)
DE (1) DE69300222T2 (ru)
HK (1) HK184995A (ru)
NL (1) NL9201825A (ru)
RU (1) RU2113020C1 (ru)
TW (1) TW239212B (ru)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100284556B1 (ko) * 1993-03-25 2001-04-02 다카시마 히로시 도포막 형성방법 및 그를 위한 장치
US5565034A (en) * 1993-10-29 1996-10-15 Tokyo Electron Limited Apparatus for processing substrates having a film formed on a surface of the substrate
US5518542A (en) * 1993-11-05 1996-05-21 Tokyo Electron Limited Double-sided substrate cleaning apparatus
US6074901A (en) * 1993-12-03 2000-06-13 Semiconductor Energy Laboratory Co., Ltd. Process for crystallizing an amorphous silicon film and apparatus for fabricating the same
JPH07186194A (ja) * 1993-12-27 1995-07-25 Sony Disc Technol:Kk スタンパーの自動交換装置
KR100284559B1 (ko) * 1994-04-04 2001-04-02 다카시마 히로시 처리방법 및 처리장치
JP3196917B2 (ja) * 1994-06-17 2001-08-06 大日本スクリーン製造株式会社 基板処理装置
US5529626A (en) * 1994-10-24 1996-06-25 Nec Electronics, Inc. Spincup with a wafer backside deposition reduction apparatus
JP3235012B2 (ja) * 1995-08-18 2001-12-04 株式会社新川 ダイ移送装置
JP3354761B2 (ja) * 1995-08-30 2002-12-09 オリジン電気株式会社 ディスク用被膜形成装置
DE19537409A1 (de) * 1995-10-09 1997-04-10 Leybold Ag Vorrichtung zur Herstellung von belichteten und metallisierten Substraten
NL1002848C2 (nl) * 1996-04-12 1997-10-15 Od & Me Bv Grijperinrichting voor het beetpakken van een schijfvormig object.
NL1002849C2 (nl) * 1996-04-12 1997-10-15 Od & Me Bv Inrichting voor het bewerken van een schijfvormig substraat alsmede een station geschikt voor koppeling met een dergelijke inrichting.
NL1002879C2 (nl) * 1996-04-16 1997-10-17 Robi Omp Mastering Dev Gmbh Cassette voor een schijfvormige drager of substraat.
NL1002876C2 (nl) * 1996-04-16 1997-10-17 Robi Omp Mastering Dev Gmbh Inrichting voor het vervaardigen van schijfvormige informatiedragers.
JP3249395B2 (ja) * 1996-06-21 2002-01-21 東京応化工業株式会社 処理ユニット構築体
US5779799A (en) * 1996-06-21 1998-07-14 Micron Technology, Inc. Substrate coating apparatus
NL1004837C2 (nl) * 1996-12-19 1998-06-22 O T B Engineering B V Systeem voor het produceren van optische gegevensdragers.
KR20000046116A (ko) * 1998-12-31 2000-07-25 김영환 Cdma무선데이터 서비스를 위한 교환기의 계층 3 메시지 처리 장치
DE29909642U1 (de) * 1999-06-02 2000-10-05 Universalmanufakturing & Logis Vorrichtung zum Beschichten scheibenförmiger Informationsträger
WO2002095499A1 (en) * 2001-05-23 2002-11-28 Optical Measuring-Equipment & Projects Bv Method for manufacturing a stamper for optical disc production, a stamper obtained by the method, and an optical disc obtained with such stamper
DE10136331A1 (de) * 2001-07-26 2003-02-20 Steag Hamatech Ag Vorrichtung und Verfahren zum Abtasten von Datenträgern
DE10202559A1 (de) * 2002-01-24 2003-07-31 Krauss Maffei Kunststofftech Verfahren und Vorrichtung zum Herstellen optischer Datenträger
US7644512B1 (en) * 2006-01-18 2010-01-12 Akrion, Inc. Systems and methods for drying a rotating substrate
DE102006015460A1 (de) * 2006-03-31 2007-10-04 Büttner, Dieter Vorrichtung zum Herstellen einer Datenträger-Matrize
EP1965383A1 (en) * 2007-03-02 2008-09-03 Singulus Mastering B.V. Diffraction order measurement
DE102009060649A1 (de) * 2009-12-22 2011-06-30 EISENMANN Anlagenbau GmbH & Co. KG, 71032 Anlage zur Oberflächenbehandlung von Gegenständen

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4650735A (en) * 1982-10-14 1987-03-17 U.S. Philips Corporation Method of manufacturing a metal matrix and an intermediate product obtained in performing the method
US4604027A (en) * 1984-06-21 1986-08-05 At&T Technologies, Inc. Manipulator of articles and methods of moving articles over an extended distance
JPH0620922B2 (ja) * 1984-10-19 1994-03-23 株式会社東芝 被検物の搬送装置
EP0189279B1 (en) * 1985-01-22 1991-10-09 Applied Materials, Inc. Semiconductor processing system
JPS61178747A (ja) * 1985-02-04 1986-08-11 Matsushita Electric Ind Co Ltd 光デイスクの製造方法およびその装置
JPH0739288B2 (ja) * 1985-09-18 1995-05-01 松下電器産業株式会社 デイスク基板搬送装置
US4850791A (en) * 1986-09-10 1989-07-25 Pioneer Electronic Corporation Flow processing system
JPH0410529A (ja) * 1990-04-27 1992-01-14 Shin Etsu Handotai Co Ltd サセプタ及びウエーハ自動脱着装置
JPH0451444A (ja) * 1990-06-20 1992-02-19 Nec Kyushu Ltd イオン注入装置
JPH04221444A (ja) * 1990-12-20 1992-08-11 Matsushita Electric Ind Co Ltd 光ディスク製造装置
DE4127341C2 (de) * 1991-08-19 2000-03-09 Leybold Ag Vorrichtung zum selbsttätigen Gießen, Beschichten, Lackieren, Prüfen und Sortieren von Werkstücken

Also Published As

Publication number Publication date
KR940008779A (ko) 1994-05-16
DE69300222D1 (de) 1995-08-03
DE69300222T2 (de) 1995-11-16
CN1091852A (zh) 1994-09-07
EP0594255B1 (en) 1995-06-28
US5403397A (en) 1995-04-04
JP2771762B2 (ja) 1998-07-02
HK184995A (en) 1995-12-15
ATE124562T1 (de) 1995-07-15
RU2113020C1 (ru) 1998-06-10
TW239212B (ru) 1995-01-21
US5780205A (en) 1998-07-14
EP0594255A1 (en) 1994-04-27
CN1039063C (zh) 1998-07-08
JPH06195764A (ja) 1994-07-15
KR0182331B1 (ko) 1999-04-15

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Date Code Title Description
A1B A search report has been drawn up
BV The patent application has lapsed