NL8500465A - Capacitieve drukdetector. - Google Patents

Capacitieve drukdetector. Download PDF

Info

Publication number
NL8500465A
NL8500465A NL8500465A NL8500465A NL8500465A NL 8500465 A NL8500465 A NL 8500465A NL 8500465 A NL8500465 A NL 8500465A NL 8500465 A NL8500465 A NL 8500465A NL 8500465 A NL8500465 A NL 8500465A
Authority
NL
Netherlands
Prior art keywords
plate
silicon
tube
membrane
shaped
Prior art date
Application number
NL8500465A
Other languages
English (en)
Dutch (nl)
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of NL8500465A publication Critical patent/NL8500465A/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
NL8500465A 1984-02-21 1985-02-19 Capacitieve drukdetector. NL8500465A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI840700A FI69211C (fi) 1984-02-21 1984-02-21 Kapacitiv styckgivare
FI840700 1984-02-21

Publications (1)

Publication Number Publication Date
NL8500465A true NL8500465A (nl) 1985-09-16

Family

ID=8518584

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8500465A NL8500465A (nl) 1984-02-21 1985-02-19 Capacitieve drukdetector.

Country Status (9)

Country Link
US (1) US4594639A (fr)
JP (1) JPS60195830A (fr)
BR (1) BR8500738A (fr)
DE (1) DE3505924C2 (fr)
FI (1) FI69211C (fr)
FR (1) FR2559899B1 (fr)
GB (1) GB2154747B (fr)
IT (1) IT1186831B (fr)
NL (1) NL8500465A (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572204A (en) * 1984-03-21 1986-02-25 Hewlett-Packard Company Pressure dome with compliant chamber
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4812199A (en) * 1987-12-21 1989-03-14 Ford Motor Company Rectilinearly deflectable element fabricated from a single wafer
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
US4960177A (en) * 1988-06-03 1990-10-02 University Of Hawaii Silicon membrane micro-scale
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
US4954925A (en) * 1988-12-30 1990-09-04 United Technologies Corporation Capacitive sensor with minimized dielectric drift
DE3932618A1 (de) * 1989-09-29 1991-04-18 Fraunhofer Ges Forschung Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
DE3937522A1 (de) * 1989-11-10 1991-05-16 Texas Instruments Deutschland Mit einem traegerelement verbundener halbleiter-drucksensor
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
US6662663B2 (en) * 2002-04-10 2003-12-16 Hewlett-Packard Development Company, L.P. Pressure sensor with two membranes forming a capacitor
DE102013204197A1 (de) * 2013-03-12 2014-10-02 Robert Bosch Gmbh Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikroelektrochemischen Sensors
EP3094950B1 (fr) * 2014-01-13 2022-12-21 Nextinput, Inc. Détecteurs de force pour mems à encapsulation sur tranche, miniaturisés et robustes
EP3307671B1 (fr) 2015-06-10 2022-06-15 Nextinput, Inc. Capteur de force mems à niveau de tranche renforcé avec tranchée de tolérance
US11255737B2 (en) 2017-02-09 2022-02-22 Nextinput, Inc. Integrated digital force sensors and related methods of manufacture
US11243125B2 (en) 2017-02-09 2022-02-08 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
EP3655740A4 (fr) 2017-07-19 2021-07-14 Nextinput, Inc. Empilement de transfert de contrainte dans un capteur de force mems
US11423686B2 (en) 2017-07-25 2022-08-23 Qorvo Us, Inc. Integrated fingerprint and force sensor
US11243126B2 (en) 2017-07-27 2022-02-08 Nextinput, Inc. Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
US11579028B2 (en) 2017-10-17 2023-02-14 Nextinput, Inc. Temperature coefficient of offset compensation for force sensor and strain gauge
US11385108B2 (en) 2017-11-02 2022-07-12 Nextinput, Inc. Sealed force sensor with etch stop layer
WO2019099821A1 (fr) 2017-11-16 2019-05-23 Nextinput, Inc. Atténuateur de force pour capteur de force
US10962427B2 (en) 2019-01-10 2021-03-30 Nextinput, Inc. Slotted MEMS force sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1138401A (en) * 1965-05-06 1969-01-01 Mallory & Co Inc P R Bonding
US3808480A (en) * 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US3965746A (en) * 1974-11-04 1976-06-29 Teledyne Industries, Inc. Pressure transducer
US4040118A (en) * 1975-06-18 1977-08-02 Bunker Ramo Corporation Pressure sensitive transducer
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4386453A (en) * 1979-09-04 1983-06-07 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4445383A (en) * 1982-06-18 1984-05-01 General Signal Corporation Multiple range capacitive pressure transducer
US4467394A (en) * 1983-08-29 1984-08-21 United Technologies Corporation Three plate silicon-glass-silicon capacitive pressure transducer

Also Published As

Publication number Publication date
DE3505924A1 (de) 1985-08-22
BR8500738A (pt) 1985-10-08
IT8512436A0 (it) 1985-02-20
FR2559899A1 (fr) 1985-08-23
FI69211C (fi) 1985-12-10
US4594639A (en) 1986-06-10
FI69211B (fi) 1985-08-30
JPS60195830A (ja) 1985-10-04
GB2154747B (en) 1987-05-07
GB8504078D0 (en) 1985-03-20
IT1186831B (it) 1987-12-16
DE3505924C2 (de) 1994-03-24
GB2154747A (en) 1985-09-11
FR2559899B1 (fr) 1987-02-13
FI840700A0 (fi) 1984-02-21

Similar Documents

Publication Publication Date Title
NL8500465A (nl) Capacitieve drukdetector.
JP2896725B2 (ja) 静電容量式圧力センサ
EP0059488B1 (fr) Transducteur capacitif de pression
CA1185454A (fr) Transducteur de pression capacitif silicium-verre- silicium
KR0137939B1 (ko) 용량성 압력감지기 및 그의 기생용량 최소화 방법
JP2660247B2 (ja) 圧力センサー
NL8500464A (nl) Capacitieve detector voor absolute druk.
JP2000000011U (ja) 容量型センサ
CN100353153C (zh) 电容压力传感器
KR970077749A (ko) 마이크로 가공된 고감도의 압력 센서 및 음향 트랜스듀서의 제조 방법
NO320502B1 (no) Fremgangsmate for tilvirkning av en halvlederkomponent
JPH021253B2 (fr)
JPH03175329A (ja) 静電容量式差圧検出器
US5656781A (en) Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers
JPS60202323A (ja) 圧力用デイテクタ
CN105043606A (zh) 一种电容式压力传感器及其制备方法
CN110823386A (zh) Mems结构及其加工方法、热释电传感器、红外探测器
JP2007101222A (ja) 圧力センサ
US9752900B2 (en) Multi-plate capacitive transducer
JP2005156164A (ja) 圧力センサ及び該圧力センサの製造方法
US7737514B1 (en) MEMS pressure sensor using area-change capacitive technique
US11378459B2 (en) Infrared sensor structure
JP3489563B2 (ja) 容量型圧力センサ
JPS61138135A (ja) 圧力検出器
JP2009002925A (ja) 静電容量式圧力検出装置

Legal Events

Date Code Title Description
BV The patent application has lapsed