FR2559899B1 - Detecteur de pression capacitif - Google Patents

Detecteur de pression capacitif

Info

Publication number
FR2559899B1
FR2559899B1 FR8502193A FR8502193A FR2559899B1 FR 2559899 B1 FR2559899 B1 FR 2559899B1 FR 8502193 A FR8502193 A FR 8502193A FR 8502193 A FR8502193 A FR 8502193A FR 2559899 B1 FR2559899 B1 FR 2559899B1
Authority
FR
France
Prior art keywords
pressure sensor
capacitive pressure
capacitive
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8502193A
Other languages
English (en)
Other versions
FR2559899A1 (fr
Inventor
Heikki Kuisma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FR2559899A1 publication Critical patent/FR2559899A1/fr
Application granted granted Critical
Publication of FR2559899B1 publication Critical patent/FR2559899B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
FR8502193A 1984-02-21 1985-02-15 Detecteur de pression capacitif Expired FR2559899B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI840700A FI69211C (fi) 1984-02-21 1984-02-21 Kapacitiv styckgivare

Publications (2)

Publication Number Publication Date
FR2559899A1 FR2559899A1 (fr) 1985-08-23
FR2559899B1 true FR2559899B1 (fr) 1987-02-13

Family

ID=8518584

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8502193A Expired FR2559899B1 (fr) 1984-02-21 1985-02-15 Detecteur de pression capacitif

Country Status (9)

Country Link
US (1) US4594639A (fr)
JP (1) JPS60195830A (fr)
BR (1) BR8500738A (fr)
DE (1) DE3505924C2 (fr)
FI (1) FI69211C (fr)
FR (1) FR2559899B1 (fr)
GB (1) GB2154747B (fr)
IT (1) IT1186831B (fr)
NL (1) NL8500465A (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572204A (en) * 1984-03-21 1986-02-25 Hewlett-Packard Company Pressure dome with compliant chamber
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4812199A (en) * 1987-12-21 1989-03-14 Ford Motor Company Rectilinearly deflectable element fabricated from a single wafer
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
US4960177A (en) * 1988-06-03 1990-10-02 University Of Hawaii Silicon membrane micro-scale
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
US4954925A (en) * 1988-12-30 1990-09-04 United Technologies Corporation Capacitive sensor with minimized dielectric drift
DE3932618A1 (de) * 1989-09-29 1991-04-18 Fraunhofer Ges Forschung Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
DE3937522A1 (de) * 1989-11-10 1991-05-16 Texas Instruments Deutschland Mit einem traegerelement verbundener halbleiter-drucksensor
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
US6662663B2 (en) 2002-04-10 2003-12-16 Hewlett-Packard Development Company, L.P. Pressure sensor with two membranes forming a capacitor
DE102013204197A1 (de) * 2013-03-12 2014-10-02 Robert Bosch Gmbh Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikroelektrochemischen Sensors
EP3094950B1 (fr) * 2014-01-13 2022-12-21 Nextinput, Inc. Détecteurs de force pour mems à encapsulation sur tranche, miniaturisés et robustes
WO2016201235A1 (fr) 2015-06-10 2016-12-15 Nextinput, Inc. Capteur de force mems à niveau de tranche renforcé avec tranchée de tolérance
EP3580539A4 (fr) 2017-02-09 2020-11-25 Nextinput, Inc. Capteurs de force numériques intégrés et procédés de fabrication associés
US11243125B2 (en) 2017-02-09 2022-02-08 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
US11221263B2 (en) 2017-07-19 2022-01-11 Nextinput, Inc. Microelectromechanical force sensor having a strain transfer layer arranged on the sensor die
US11423686B2 (en) 2017-07-25 2022-08-23 Qorvo Us, Inc. Integrated fingerprint and force sensor
WO2019023552A1 (fr) 2017-07-27 2019-01-31 Nextinput, Inc. Capteur de force piézorésistif et piézoélectrique collé sur tranche et procédés de fabrication associés
WO2019079420A1 (fr) 2017-10-17 2019-04-25 Nextinput, Inc. Compensation de coefficient de température de décalage pour capteur de force et jauge de contrainte
WO2019090057A1 (fr) 2017-11-02 2019-05-09 Nextinput, Inc. Capteur de force étanche à couche d'arrêt de gravure
US11874185B2 (en) 2017-11-16 2024-01-16 Nextinput, Inc. Force attenuator for force sensor
US10962427B2 (en) 2019-01-10 2021-03-30 Nextinput, Inc. Slotted MEMS force sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1138401A (en) * 1965-05-06 1969-01-01 Mallory & Co Inc P R Bonding
US3808480A (en) * 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US3965746A (en) * 1974-11-04 1976-06-29 Teledyne Industries, Inc. Pressure transducer
US4040118A (en) * 1975-06-18 1977-08-02 Bunker Ramo Corporation Pressure sensitive transducer
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4386453A (en) * 1979-09-04 1983-06-07 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4445383A (en) * 1982-06-18 1984-05-01 General Signal Corporation Multiple range capacitive pressure transducer
US4467394A (en) * 1983-08-29 1984-08-21 United Technologies Corporation Three plate silicon-glass-silicon capacitive pressure transducer

Also Published As

Publication number Publication date
DE3505924C2 (de) 1994-03-24
IT8512436A0 (it) 1985-02-20
FI69211B (fi) 1985-08-30
BR8500738A (pt) 1985-10-08
US4594639A (en) 1986-06-10
GB8504078D0 (en) 1985-03-20
DE3505924A1 (de) 1985-08-22
GB2154747A (en) 1985-09-11
IT1186831B (it) 1987-12-16
FI840700A0 (fi) 1984-02-21
JPS60195830A (ja) 1985-10-04
FR2559899A1 (fr) 1985-08-23
GB2154747B (en) 1987-05-07
FI69211C (fi) 1985-12-10
NL8500465A (nl) 1985-09-16

Similar Documents

Publication Publication Date Title
FR2559899B1 (fr) Detecteur de pression capacitif
BR8207848A (pt) Sensor de pressao capacitivo aperfeicoado
FR2571855B1 (fr) Transducteur de pression absolue
GB2168160B (en) Silicon capacitive pressure sensor
DE3785037D1 (de) Kapazitiver druckfuehler.
BR8707718A (pt) Sensor de pressao
PT84262B (pt) Sensor de pressao
BR8706755A (pt) Sensor de pressao capacitivo eletrostatico
BR8207904A (pt) Transdutor de pressao capacitivo de silicio-vidro-silicio
JPS57149933A (en) Capacitive pressure sensor
DE3462379D1 (en) Capacitive pressure sensor
FI91444B (fi) Paineanturi
FI883523A0 (fi) Kapasitiiviset paineanturit
FR2559900B1 (fr) Detecteur de pression capacitif insensible aux variations de temperature
FR2587485B1 (fr) Capteur de pression
FR2614988B1 (fr) Capteur capacitif de pression
FR2624270B1 (fr) Transducteur de pression
FR2555743B1 (fr) Capteur inductif de pression differentielle
BR8803885A (pt) Sensor de pressao
FR2566529B1 (fr) Capteur de pression
AT386482B (de) Druckaufnehmer
DE3529799A1 (de) Drucksensor
FR2602334B1 (fr) Capteur de pression
FR2566907B1 (fr) Capteur de pression
BE892771A (fr) Capteur de pression