|
US4005455A
(en)
*
|
1974-08-21 |
1977-01-25 |
Intel Corporation |
Corrosive resistant semiconductor interconnect pad
|
|
JPS51111069A
(en)
*
|
1975-03-26 |
1976-10-01 |
Hitachi Ltd |
Semiconductor device
|
|
US4062720A
(en)
*
|
1976-08-23 |
1977-12-13 |
International Business Machines Corporation |
Process for forming a ledge-free aluminum-copper-silicon conductor structure
|
|
US4164461A
(en)
*
|
1977-01-03 |
1979-08-14 |
Raytheon Company |
Semiconductor integrated circuit structures and manufacturing methods
|
|
DE2730672A1
(de)
*
|
1977-07-07 |
1979-01-25 |
Schmidt Gmbh Karl |
Sicherheitslenkrad fuer kraftfahrzeuge
|
|
US4172004A
(en)
*
|
1977-10-20 |
1979-10-23 |
International Business Machines Corporation |
Method for forming dense dry etched multi-level metallurgy with non-overlapped vias
|
|
US4289834A
(en)
*
|
1977-10-20 |
1981-09-15 |
Ibm Corporation |
Dense dry etched multi-level metallurgy with non-overlapped vias
|
|
US4333099A
(en)
*
|
1978-02-27 |
1982-06-01 |
Rca Corporation |
Use of silicide to bridge unwanted polycrystalline silicon P-N junction
|
|
US4230522A
(en)
*
|
1978-12-26 |
1980-10-28 |
Rockwell International Corporation |
PNAF Etchant for aluminum and silicon
|
|
US4267012A
(en)
*
|
1979-04-30 |
1981-05-12 |
Fairchild Camera & Instrument Corp. |
Process for patterning metal connections on a semiconductor structure by using a tungsten-titanium etch resistant layer
|
|
JPS561533A
(en)
*
|
1979-06-18 |
1981-01-09 |
Hitachi Ltd |
Method of photoetching
|
|
JPS56146253A
(en)
*
|
1980-04-16 |
1981-11-13 |
Hitachi Ltd |
Semiconductor device
|
|
DE3021175A1
(de)
*
|
1980-06-04 |
1981-12-10 |
Siemens AG, 1000 Berlin und 8000 München |
Verfahren zum passivieren von siliciumbauelementen
|
|
JPS5731144A
(en)
*
|
1980-07-31 |
1982-02-19 |
Fujitsu Ltd |
Mamufacture of semiconductor device
|
|
US4392150A
(en)
*
|
1980-10-27 |
1983-07-05 |
National Semiconductor Corporation |
MOS Integrated circuit having refractory metal or metal silicide interconnect layer
|
|
US4398335A
(en)
*
|
1980-12-09 |
1983-08-16 |
Fairchild Camera & Instrument Corporation |
Multilayer metal silicide interconnections for integrated circuits
|
|
JPS57121224A
(en)
*
|
1981-01-20 |
1982-07-28 |
Sanyo Electric Co Ltd |
Formation of ohmic contact in semiconductor device
|
|
JPS57162449A
(en)
*
|
1981-03-31 |
1982-10-06 |
Fujitsu Ltd |
Formation of multilayer wiring
|
|
US4373966A
(en)
*
|
1981-04-30 |
1983-02-15 |
International Business Machines Corporation |
Forming Schottky barrier diodes by depositing aluminum silicon and copper or binary alloys thereof and alloy-sintering
|
|
JPS59220952A
(ja)
*
|
1983-05-31 |
1984-12-12 |
Toshiba Corp |
半導体装置の製造方法
|
|
JPS584948A
(ja)
*
|
1981-06-30 |
1983-01-12 |
Fujitsu Ltd |
半導体装置
|
|
US4389257A
(en)
*
|
1981-07-30 |
1983-06-21 |
International Business Machines Corporation |
Fabrication method for high conductivity, void-free polysilicon-silicide integrated circuit electrodes
|
|
GB2107744B
(en)
*
|
1981-10-06 |
1985-07-24 |
Itt Ind Ltd |
Making al/si films by ion implantation; integrated circuits
|
|
JPS5893347A
(ja)
*
|
1981-11-30 |
1983-06-03 |
Toshiba Corp |
Mos型半導体装置及びその製造方法
|
|
JPS58103168A
(ja)
*
|
1981-12-16 |
1983-06-20 |
Fujitsu Ltd |
半導体装置
|
|
US4426246A
(en)
|
1982-07-26 |
1984-01-17 |
Bell Telephone Laboratories, Incorporated |
Plasma pretreatment with BCl3 to remove passivation formed by fluorine-etch
|
|
DE3228399A1
(de)
*
|
1982-07-29 |
1984-02-02 |
Siemens AG, 1000 Berlin und 8000 München |
Verfahren zum herstellen einer monolithisch integrierten schaltung
|
|
US5136361A
(en)
*
|
1982-09-30 |
1992-08-04 |
Advanced Micro Devices, Inc. |
Stratified interconnect structure for integrated circuits
|
|
WO1984001471A1
(en)
*
|
1982-09-30 |
1984-04-12 |
Advanced Micro Devices Inc |
An aluminum-metal silicide interconnect structure for integrated circuits and method of manufacture thereof
|
|
KR840006728A
(ko)
*
|
1982-11-01 |
1984-12-01 |
오레그 이. 엘버 |
집적회로 제조방법
|
|
US4558507A
(en)
*
|
1982-11-12 |
1985-12-17 |
Nec Corporation |
Method of manufacturing semiconductor device
|
|
US4520554A
(en)
*
|
1983-02-10 |
1985-06-04 |
Rca Corporation |
Method of making a multi-level metallization structure for semiconductor device
|
|
US4720470A
(en)
*
|
1983-12-15 |
1988-01-19 |
Laserpath Corporation |
Method of making electrical circuitry
|
|
JPS60136337A
(ja)
*
|
1983-12-22 |
1985-07-19 |
モノリシツク・メモリ−ズ・インコ−ポレイテツド |
2重層処理においてヒロツク抑制層を形成する方法及びその構造物
|
|
US4622576A
(en)
*
|
1984-10-22 |
1986-11-11 |
National Semiconductor Corporation |
Conductive non-metallic self-passivating non-corrodable IC bonding pads
|
|
US4747211A
(en)
*
|
1987-02-09 |
1988-05-31 |
Sheldahl, Inc. |
Method and apparatus for preparing conductive screened through holes employing metallic plated polymer thick films
|
|
JPH0622235B2
(ja)
*
|
1987-05-21 |
1994-03-23 |
日本電気株式会社 |
半導体装置の製造方法
|
|
KR0130776B1
(ko)
*
|
1987-09-19 |
1998-04-06 |
미다 가쓰시게 |
반도체 집적회로 장치
|
|
US5081563A
(en)
*
|
1990-04-27 |
1992-01-14 |
International Business Machines Corporation |
Multi-layer package incorporating a recessed cavity for a semiconductor chip
|
|
EP0572212A3
(en)
*
|
1992-05-29 |
1994-05-11 |
Sgs Thomson Microelectronics |
Method to form silicon doped cvd aluminium
|
|
US6274391B1
(en)
*
|
1992-10-26 |
2001-08-14 |
Texas Instruments Incorporated |
HDI land grid array packaged device having electrical and optical interconnects
|
|
JP2596331B2
(ja)
*
|
1993-09-08 |
1997-04-02 |
日本電気株式会社 |
半導体装置およびその製造方法
|
|
JP3399814B2
(ja)
|
1997-11-27 |
2003-04-21 |
科学技術振興事業団 |
微細突起構造体の製造方法
|
|
US6078100A
(en)
|
1999-01-13 |
2000-06-20 |
Micron Technology, Inc. |
Utilization of die repattern layers for die internal connections
|
|
CN111682003B
(zh)
*
|
2019-03-11 |
2024-04-19 |
奥特斯奥地利科技与系统技术有限公司 |
包括具有竖向贯通连接件的部件的部件承载件
|