NL182898C - Werkwijze voor het aanbrengen van een beschermende bekleding op de binnenwand van een reactor. - Google Patents
Werkwijze voor het aanbrengen van een beschermende bekleding op de binnenwand van een reactor.Info
- Publication number
- NL182898C NL182898C NLAANVRAGE7603575,A NL7603575A NL182898C NL 182898 C NL182898 C NL 182898C NL 7603575 A NL7603575 A NL 7603575A NL 182898 C NL182898 C NL 182898C
- Authority
- NL
- Netherlands
- Prior art keywords
- reactor
- applying
- interior wall
- protective coating
- protective
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Production Of Liquid Hydrocarbon Mixture For Refining Petroleum (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Silicon Compounds (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB14145/75A GB1483144A (en) | 1975-04-07 | 1975-04-07 | Protective films |
Publications (3)
Publication Number | Publication Date |
---|---|
NL7603575A NL7603575A (nl) | 1976-10-11 |
NL182898B NL182898B (nl) | 1988-01-04 |
NL182898C true NL182898C (nl) | 1988-06-01 |
Family
ID=10035842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NLAANVRAGE7603575,A NL182898C (nl) | 1975-04-07 | 1976-04-06 | Werkwijze voor het aanbrengen van een beschermende bekleding op de binnenwand van een reactor. |
Country Status (9)
Country | Link |
---|---|
US (1) | US4099990A (ja) |
JP (1) | JPS5924184B2 (ja) |
BE (1) | BE840490A (ja) |
CA (1) | CA1043190A (ja) |
DE (1) | DE2613787C3 (ja) |
FR (1) | FR2307052A1 (ja) |
GB (1) | GB1483144A (ja) |
IT (1) | IT1059591B (ja) |
NL (1) | NL182898C (ja) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1552284A (en) * | 1977-05-03 | 1979-09-12 | British Petroleum Co | Protective films for coating hydrocarbon conversion reactors |
AU526104B2 (en) * | 1978-09-08 | 1982-12-16 | Geon Company, The | Polymerization of vinyl chloride |
US4297150A (en) * | 1979-07-07 | 1981-10-27 | The British Petroleum Company Limited | Protective metal oxide films on metal or alloy substrate surfaces susceptible to coking, corrosion or catalytic activity |
US4263421A (en) * | 1979-09-14 | 1981-04-21 | The B. F. Goodrich Company | Process for coating reactors using organic compound vapor application |
US4343658A (en) * | 1980-04-14 | 1982-08-10 | Exxon Research & Engineering Co. | Inhibition of carbon accumulation on metal surfaces |
US4410418A (en) * | 1982-03-30 | 1983-10-18 | Phillips Petroleum Company | Method for reducing carbon formation in a thermal cracking process |
CH654334A5 (de) * | 1982-09-02 | 1986-02-14 | Maschf Augsburg Nuernberg Ag | Verfahren zur bildung einer korrosionsbestaendigen oxidischen schicht auf einem metallischen substrat sowie verwendung dieser schicht. |
US4759993A (en) * | 1985-04-25 | 1988-07-26 | Ovonic Synthetic Materials Co., Inc. | Plasma chemical vapor deposition SiO2-x coated articles and plasma assisted chemical vapor deposition method of applying the coating |
KR870000750A (ko) * | 1985-06-14 | 1987-02-20 | 이마드 마하윌리 | 이산화실리콘 필름을 화학적으로 증기피복하는 방법 |
US4845054A (en) * | 1985-06-14 | 1989-07-04 | Focus Semiconductor Systems, Inc. | Low temperature chemical vapor deposition of silicon dioxide films |
US5208069A (en) * | 1991-10-28 | 1993-05-04 | Istituto Guido Donegani S.P.A. | Method for passivating the inner surface by deposition of a ceramic coating of an apparatus subject to coking, apparatus prepared thereby, and method of utilizing apparatus prepared thereby |
US5266360A (en) * | 1991-12-20 | 1993-11-30 | United Technologies Corporation | Inhibiting coke formation by coating gas turbine elements with silica |
US5336560A (en) * | 1991-12-20 | 1994-08-09 | United Technologies Corporation | Gas turbine elements bearing alumina-silica coating to inhibit coking |
US5324544A (en) * | 1991-12-20 | 1994-06-28 | United Technologies Corporation | Inhibiting coke formation by coating gas turbine elements with alumina-silica sol gel |
US5399257A (en) * | 1991-12-23 | 1995-03-21 | Uop | Coke inhibiting process using glass bead treating |
DE4225106C2 (de) * | 1992-07-30 | 1995-10-05 | Heraeus Kulzer Gmbh | Verfahren und Vorrichtung zur Herstellung eines Metall-Kunststoff-Verbundes |
US5413813A (en) * | 1993-11-23 | 1995-05-09 | Enichem S.P.A. | CVD of silicon-based ceramic materials on internal surface of a reactor |
US5424095A (en) * | 1994-03-07 | 1995-06-13 | Eniricerche S.P.A. | Ceramic vapor deposited coating using a steam-containing carrier gas and non-alkoxy silane precursors |
US6056870A (en) * | 1994-08-25 | 2000-05-02 | Reed; Larry E. | Method of promoting the decomposition of silicon compounds in a process for depositing silicon upon a metal surface |
US6074713A (en) * | 1995-04-24 | 2000-06-13 | Corning Incorporated | Preventing carbon deposits on metal |
US5807616A (en) * | 1995-04-24 | 1998-09-15 | Corning Incorporated | Thermal cracking process and furnace elements |
US6071563A (en) * | 1995-04-24 | 2000-06-06 | Corning Incorporated | Method of protecting metal |
CA2175439C (en) * | 1996-04-30 | 2001-09-04 | Sabino Steven Anthony Petrone | Surface alloyed high temperature alloys |
US6503347B1 (en) | 1996-04-30 | 2003-01-07 | Surface Engineered Products Corporation | Surface alloyed high temperature alloys |
DE19721080C1 (de) * | 1997-05-20 | 1998-10-01 | Siemens Ag | Verfahren zum Überdecken eines Bauteiles mit einer korrosionshemmenden Fremdoxidschicht und mit einer solchen Fremdoxidschicht überdecktes Bauteil |
JP3949303B2 (ja) * | 1998-03-20 | 2007-07-25 | 三星エスディアイ株式会社 | リチウム二次電池負極用炭素材及びこれを用いたリチウム二次電池 |
US6316052B1 (en) | 1998-08-19 | 2001-11-13 | Anelva Corporation | Method for the surface treatment of vacuum materials and surface treated vacuum |
US6358618B1 (en) | 1999-09-22 | 2002-03-19 | Corning Incorporated | Protective coating on metal |
FR2798939B1 (fr) | 1999-09-24 | 2001-11-09 | Atofina | Reduction du cokage dans les reacteurs de craquage |
KR100338361B1 (ko) * | 2000-01-28 | 2002-05-30 | 유승렬 | 탄화수소 열분해 반응기 튜브 내벽에 코크의 저감을 위한온라인 코팅 방법 |
US6423415B1 (en) | 2000-08-31 | 2002-07-23 | Corning Incorporated | Potassium silicate frits for coating metals |
US20030163144A1 (en) * | 2002-02-28 | 2003-08-28 | Weadock Kevin S. | Sponge for creating an anastomosis between vessels |
US20050019580A1 (en) * | 2003-06-10 | 2005-01-27 | Mori Yasuhiro | Method for modifying surface of solid substrate, surface modified solid substrate and apparatus for modifying surface of solid substrate |
DE102004012889A1 (de) * | 2004-03-16 | 2005-10-06 | Nütro Maschinen- und Anlagenbau GmbH & Co. KG | Wasserdampfunterstütztes Lackierverfahren |
US7524735B1 (en) | 2004-03-25 | 2009-04-28 | Novellus Systems, Inc | Flowable film dielectric gap fill process |
US7582555B1 (en) | 2005-12-29 | 2009-09-01 | Novellus Systems, Inc. | CVD flowable gap fill |
US9257302B1 (en) | 2004-03-25 | 2016-02-09 | Novellus Systems, Inc. | CVD flowable gap fill |
US20060182888A1 (en) * | 2005-01-10 | 2006-08-17 | Cody Ian A | Modifying steel surfaces to mitigate fouling and corrosion |
US20060219598A1 (en) * | 2005-01-10 | 2006-10-05 | Cody Ian A | Low energy surfaces for reduced corrosion and fouling |
US9245739B2 (en) | 2006-11-01 | 2016-01-26 | Lam Research Corporation | Low-K oxide deposition by hydrolysis and condensation |
US7888273B1 (en) * | 2006-11-01 | 2011-02-15 | Novellus Systems, Inc. | Density gradient-free gap fill |
DE102008010188A1 (de) * | 2008-02-20 | 2009-08-27 | Biotronik Crm Patent Ag | Verfahren zur Herstellung eines Isolationsschlauchs und Verfahren zur Herstellung einer Elektrode |
US8557712B1 (en) | 2008-12-15 | 2013-10-15 | Novellus Systems, Inc. | PECVD flowable dielectric gap fill |
US8278224B1 (en) | 2009-09-24 | 2012-10-02 | Novellus Systems, Inc. | Flowable oxide deposition using rapid delivery of process gases |
WO2011072143A2 (en) * | 2009-12-09 | 2011-06-16 | Novellus Systems, Inc. | Novel gap fill integration |
US8685867B1 (en) | 2010-12-09 | 2014-04-01 | Novellus Systems, Inc. | Premetal dielectric integration process |
US9719169B2 (en) | 2010-12-20 | 2017-08-01 | Novellus Systems, Inc. | System and apparatus for flowable deposition in semiconductor fabrication |
CN102807886B (zh) * | 2011-05-31 | 2014-12-03 | 中国石油化工股份有限公司 | 一种烃类裂解炉管在线烧焦过程中抑制结焦的方法 |
US8846536B2 (en) | 2012-03-05 | 2014-09-30 | Novellus Systems, Inc. | Flowable oxide film with tunable wet etch rate |
CN104294271A (zh) * | 2013-07-18 | 2015-01-21 | 中国石油化工股份有限公司 | 一种在线预涂覆烃类裂解炉管的方法 |
US20150030885A1 (en) * | 2013-07-29 | 2015-01-29 | Silcotek Corp. | Coated article and chemical vapor deposition process |
US9847222B2 (en) | 2013-10-25 | 2017-12-19 | Lam Research Corporation | Treatment for flowable dielectric deposition on substrate surfaces |
US10049921B2 (en) | 2014-08-20 | 2018-08-14 | Lam Research Corporation | Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor |
US9916977B2 (en) | 2015-11-16 | 2018-03-13 | Lam Research Corporation | Low k dielectric deposition via UV driven photopolymerization |
US10388546B2 (en) | 2015-11-16 | 2019-08-20 | Lam Research Corporation | Apparatus for UV flowable dielectric |
KR20210143943A (ko) | 2019-04-19 | 2021-11-29 | 램 리써치 코포레이션 | 원자층 증착 동안 급속 플러시 퍼징 |
CN113004724A (zh) * | 2021-03-08 | 2021-06-22 | 华东理工大学 | 一种抑制炉管结焦的涂层及其制备方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA812249A (en) * | 1969-05-06 | Karcher Walter | Process for the prevention or reduction of carbon deposits on metal surfaces in a nuclear reactor | |
FR630344A (fr) * | 1926-03-13 | 1927-12-01 | Ig Farbenindustrie Ag | Procédé pour l'exécution d'opérations dans lesquelles des hydrocarbures sont soumis à de hautes températures |
AT119023B (de) * | 1928-08-08 | 1930-09-25 | Franz Krusek | Teigförmiges Abdeckmittel für stellenweise Einsatzhärtung von Eisen und Stahl. |
US3003857A (en) * | 1957-11-04 | 1961-10-10 | Perolin Co Inc | Fuel oil additive |
US3013898A (en) * | 1958-09-19 | 1961-12-19 | Du Pont | Coating painted surfaces with a silica sol |
US3013897A (en) * | 1959-03-20 | 1961-12-19 | Du Pont | Silica coating composition, process of coating metal therewith and article produced thereby |
US3304200A (en) * | 1961-03-08 | 1967-02-14 | Texas Instruments Inc | Semiconductor devices and methods of making same |
NL120318C (ja) * | 1961-07-17 | |||
US3150015A (en) * | 1961-08-29 | 1964-09-22 | Allegheny Ludlum Steel | Insulation for silicon steel |
US3243314A (en) * | 1962-09-14 | 1966-03-29 | Ibm | Silicon oxide film formation |
US3445280A (en) * | 1964-08-08 | 1969-05-20 | Hitachi Ltd | Surface treatment of semiconductor device |
DE1518875A1 (de) * | 1965-10-07 | 1969-09-04 | Hoechst Ag | Verfahren zur Durchfuehrung von thermischen Behandlungen von Kohlenwasserstoffen bei hohen Temperaturen |
US3556841A (en) * | 1967-04-11 | 1971-01-19 | Matsushita Electronics Corp | Process for forming silicon dioxide films |
US3532539A (en) * | 1968-11-04 | 1970-10-06 | Hitachi Ltd | Method for treating the surface of semiconductor devices |
DE1812455C3 (de) * | 1968-12-03 | 1980-03-13 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen einer aus einem Metalloxyd bestehenden isolierenden Schutzschicht an der Oberfläche eines Halbleiterkristalls |
ES373126A1 (es) * | 1969-03-03 | 1971-12-16 | Continental Oil Co | Perfeccionamientos en los procedimientos de descomposicion termica de compuestos organicos en contacto con un acero de aleacion. |
NL6907435A (en) * | 1969-05-14 | 1970-11-17 | Carbon-free temp sensors | |
US3607378A (en) * | 1969-10-27 | 1971-09-21 | Texas Instruments Inc | Technique for depositing silicon dioxide from silane and oxygen |
US3704333A (en) * | 1970-08-20 | 1972-11-28 | Continental Oil Co | Thermal decomposition of organic compounds |
US3934060A (en) * | 1973-12-19 | 1976-01-20 | Motorola, Inc. | Method for forming a deposited silicon dioxide layer on a semiconductor wafer |
-
1975
- 1975-04-07 GB GB14145/75A patent/GB1483144A/en not_active Expired
-
1976
- 1976-03-22 CA CA248,521A patent/CA1043190A/en not_active Expired
- 1976-03-23 US US05/669,636 patent/US4099990A/en not_active Expired - Lifetime
- 1976-03-31 DE DE2613787A patent/DE2613787C3/de not_active Expired
- 1976-04-05 JP JP51038092A patent/JPS5924184B2/ja not_active Expired
- 1976-04-06 NL NLAANVRAGE7603575,A patent/NL182898C/xx not_active IP Right Cessation
- 1976-04-06 FR FR7609887A patent/FR2307052A1/fr active Granted
- 1976-04-06 IT IT21989/76A patent/IT1059591B/it active
- 1976-04-07 BE BE165936A patent/BE840490A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
IT1059591B (it) | 1982-06-21 |
US4099990A (en) | 1978-07-11 |
DE2613787A1 (de) | 1976-10-21 |
FR2307052A1 (fr) | 1976-11-05 |
FR2307052B1 (ja) | 1980-07-18 |
BE840490A (fr) | 1976-10-07 |
DE2613787B2 (de) | 1981-02-26 |
JPS51123783A (en) | 1976-10-28 |
JPS5924184B2 (ja) | 1984-06-07 |
NL182898B (nl) | 1988-01-04 |
GB1483144A (en) | 1977-08-17 |
NL7603575A (nl) | 1976-10-11 |
DE2613787C3 (de) | 1982-01-14 |
CA1043190A (en) | 1978-11-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BA | A request for search or an international-type search has been filed | ||
BB | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
A85 | Still pending on 85-01-01 | ||
V1 | Lapsed because of non-payment of the annual fee |