IT1059591B - Processo per formare pellicole protettivw - Google Patents

Processo per formare pellicole protettivw

Info

Publication number
IT1059591B
IT1059591B IT21989/76A IT2198976A IT1059591B IT 1059591 B IT1059591 B IT 1059591B IT 21989/76 A IT21989/76 A IT 21989/76A IT 2198976 A IT2198976 A IT 2198976A IT 1059591 B IT1059591 B IT 1059591B
Authority
IT
Italy
Prior art keywords
filmsw
forming protective
protective
forming
protective filmsw
Prior art date
Application number
IT21989/76A
Other languages
English (en)
Original Assignee
British Petroleum Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Petroleum Co filed Critical British Petroleum Co
Application granted granted Critical
Publication of IT1059591B publication Critical patent/IT1059591B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Production Of Liquid Hydrocarbon Mixture For Refining Petroleum (AREA)
  • Chemically Coating (AREA)
  • Silicon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
IT21989/76A 1975-04-07 1976-04-06 Processo per formare pellicole protettivw IT1059591B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB14145/75A GB1483144A (en) 1975-04-07 1975-04-07 Protective films

Publications (1)

Publication Number Publication Date
IT1059591B true IT1059591B (it) 1982-06-21

Family

ID=10035842

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21989/76A IT1059591B (it) 1975-04-07 1976-04-06 Processo per formare pellicole protettivw

Country Status (9)

Country Link
US (1) US4099990A (it)
JP (1) JPS5924184B2 (it)
BE (1) BE840490A (it)
CA (1) CA1043190A (it)
DE (1) DE2613787C3 (it)
FR (1) FR2307052A1 (it)
GB (1) GB1483144A (it)
IT (1) IT1059591B (it)
NL (1) NL182898C (it)

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DE4225106C2 (de) * 1992-07-30 1995-10-05 Heraeus Kulzer Gmbh Verfahren und Vorrichtung zur Herstellung eines Metall-Kunststoff-Verbundes
US5413813A (en) * 1993-11-23 1995-05-09 Enichem S.P.A. CVD of silicon-based ceramic materials on internal surface of a reactor
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US6074713A (en) * 1995-04-24 2000-06-13 Corning Incorporated Preventing carbon deposits on metal
US6071563A (en) * 1995-04-24 2000-06-06 Corning Incorporated Method of protecting metal
CA2175439C (en) * 1996-04-30 2001-09-04 Sabino Steven Anthony Petrone Surface alloyed high temperature alloys
US6503347B1 (en) 1996-04-30 2003-01-07 Surface Engineered Products Corporation Surface alloyed high temperature alloys
DE19721080C1 (de) * 1997-05-20 1998-10-01 Siemens Ag Verfahren zum Überdecken eines Bauteiles mit einer korrosionshemmenden Fremdoxidschicht und mit einer solchen Fremdoxidschicht überdecktes Bauteil
JP3949303B2 (ja) * 1998-03-20 2007-07-25 三星エスディアイ株式会社 リチウム二次電池負極用炭素材及びこれを用いたリチウム二次電池
US6316052B1 (en) * 1998-08-19 2001-11-13 Anelva Corporation Method for the surface treatment of vacuum materials and surface treated vacuum
US6358618B1 (en) 1999-09-22 2002-03-19 Corning Incorporated Protective coating on metal
FR2798939B1 (fr) 1999-09-24 2001-11-09 Atofina Reduction du cokage dans les reacteurs de craquage
KR100338361B1 (ko) * 2000-01-28 2002-05-30 유승렬 탄화수소 열분해 반응기 튜브 내벽에 코크의 저감을 위한온라인 코팅 방법
US6423415B1 (en) 2000-08-31 2002-07-23 Corning Incorporated Potassium silicate frits for coating metals
US20030163144A1 (en) * 2002-02-28 2003-08-28 Weadock Kevin S. Sponge for creating an anastomosis between vessels
US20050019580A1 (en) * 2003-06-10 2005-01-27 Mori Yasuhiro Method for modifying surface of solid substrate, surface modified solid substrate and apparatus for modifying surface of solid substrate
DE102004012889A1 (de) * 2004-03-16 2005-10-06 Nütro Maschinen- und Anlagenbau GmbH & Co. KG Wasserdampfunterstütztes Lackierverfahren
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US7524735B1 (en) 2004-03-25 2009-04-28 Novellus Systems, Inc Flowable film dielectric gap fill process
US7582555B1 (en) 2005-12-29 2009-09-01 Novellus Systems, Inc. CVD flowable gap fill
US20060219598A1 (en) * 2005-01-10 2006-10-05 Cody Ian A Low energy surfaces for reduced corrosion and fouling
US20060182888A1 (en) * 2005-01-10 2006-08-17 Cody Ian A Modifying steel surfaces to mitigate fouling and corrosion
US7888273B1 (en) * 2006-11-01 2011-02-15 Novellus Systems, Inc. Density gradient-free gap fill
US9245739B2 (en) 2006-11-01 2016-01-26 Lam Research Corporation Low-K oxide deposition by hydrolysis and condensation
DE102008010188A1 (de) * 2008-02-20 2009-08-27 Biotronik Crm Patent Ag Verfahren zur Herstellung eines Isolationsschlauchs und Verfahren zur Herstellung einer Elektrode
US8557712B1 (en) 2008-12-15 2013-10-15 Novellus Systems, Inc. PECVD flowable dielectric gap fill
US8278224B1 (en) 2009-09-24 2012-10-02 Novellus Systems, Inc. Flowable oxide deposition using rapid delivery of process gases
TWI579916B (zh) * 2009-12-09 2017-04-21 諾菲勒斯系統公司 整合可流動氧化物及頂蓋氧化物之新穎間隙填充
US8685867B1 (en) 2010-12-09 2014-04-01 Novellus Systems, Inc. Premetal dielectric integration process
US9719169B2 (en) 2010-12-20 2017-08-01 Novellus Systems, Inc. System and apparatus for flowable deposition in semiconductor fabrication
CN102807886B (zh) * 2011-05-31 2014-12-03 中国石油化工股份有限公司 一种烃类裂解炉管在线烧焦过程中抑制结焦的方法
US8846536B2 (en) 2012-03-05 2014-09-30 Novellus Systems, Inc. Flowable oxide film with tunable wet etch rate
CN104294271A (zh) * 2013-07-18 2015-01-21 中国石油化工股份有限公司 一种在线预涂覆烃类裂解炉管的方法
US20150030885A1 (en) * 2013-07-29 2015-01-29 Silcotek Corp. Coated article and chemical vapor deposition process
US9847222B2 (en) 2013-10-25 2017-12-19 Lam Research Corporation Treatment for flowable dielectric deposition on substrate surfaces
US10049921B2 (en) 2014-08-20 2018-08-14 Lam Research Corporation Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor
US10388546B2 (en) 2015-11-16 2019-08-20 Lam Research Corporation Apparatus for UV flowable dielectric
US9916977B2 (en) 2015-11-16 2018-03-13 Lam Research Corporation Low k dielectric deposition via UV driven photopolymerization
CN113004724A (zh) * 2021-03-08 2021-06-22 华东理工大学 一种抑制炉管结焦的涂层及其制备方法

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FR630344A (fr) * 1926-03-13 1927-12-01 Ig Farbenindustrie Ag Procédé pour l'exécution d'opérations dans lesquelles des hydrocarbures sont soumis à de hautes températures
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US3150015A (en) * 1961-08-29 1964-09-22 Allegheny Ludlum Steel Insulation for silicon steel
US3243314A (en) * 1962-09-14 1966-03-29 Ibm Silicon oxide film formation
US3445280A (en) * 1964-08-08 1969-05-20 Hitachi Ltd Surface treatment of semiconductor device
DE1518875A1 (de) * 1965-10-07 1969-09-04 Hoechst Ag Verfahren zur Durchfuehrung von thermischen Behandlungen von Kohlenwasserstoffen bei hohen Temperaturen
US3556841A (en) * 1967-04-11 1971-01-19 Matsushita Electronics Corp Process for forming silicon dioxide films
US3532539A (en) * 1968-11-04 1970-10-06 Hitachi Ltd Method for treating the surface of semiconductor devices
DE1812455C3 (de) * 1968-12-03 1980-03-13 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen einer aus einem Metalloxyd bestehenden isolierenden Schutzschicht an der Oberfläche eines Halbleiterkristalls
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Also Published As

Publication number Publication date
DE2613787C3 (de) 1982-01-14
US4099990A (en) 1978-07-11
NL182898B (nl) 1988-01-04
DE2613787B2 (de) 1981-02-26
DE2613787A1 (de) 1976-10-21
FR2307052A1 (fr) 1976-11-05
BE840490A (fr) 1976-10-07
FR2307052B1 (it) 1980-07-18
GB1483144A (en) 1977-08-17
NL7603575A (nl) 1976-10-11
NL182898C (nl) 1988-06-01
JPS51123783A (en) 1976-10-28
JPS5924184B2 (ja) 1984-06-07
CA1043190A (en) 1978-11-28

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