MXPA05009409A - Sistema y metodo para proteger una disposicion de sistemas microelectromecanicos utilizando placa de apoyo estructuralmente reforzada. - Google Patents

Sistema y metodo para proteger una disposicion de sistemas microelectromecanicos utilizando placa de apoyo estructuralmente reforzada.

Info

Publication number
MXPA05009409A
MXPA05009409A MXPA05009409A MXPA05009409A MXPA05009409A MX PA05009409 A MXPA05009409 A MX PA05009409A MX PA05009409 A MXPA05009409 A MX PA05009409A MX PA05009409 A MXPA05009409 A MX PA05009409A MX PA05009409 A MXPA05009409 A MX PA05009409A
Authority
MX
Mexico
Prior art keywords
plate
microelectromechanical systems
structurally reinforced
reinforced back
display array
Prior art date
Application number
MXPA05009409A
Other languages
English (en)
Inventor
William J Cummings
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of MXPA05009409A publication Critical patent/MXPA05009409A/es

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067Mechanical properties
    • B81B3/007For controlling stiffness, e.g. ribs
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032Packages or encapsulation
    • B81B7/0058Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00Forming microstructural systems
    • B81C2203/01Packaging MEMS
    • B81C2203/0163Reinforcing a cap, e.g. with ribs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

Se describe un dispositivo electronico que utiliza modulacion interferometrica y un paquete del dispositivo. El dispositivo empaquetado incluye un sustrato 101, una disposicion 111 de visualizacion de modulacion interferometrica formada en el sustrato 101, y una placa 130 de apoyo. La placa de apoyo se coloca sobre la disposicion 111 de visualizacion con una cavidad 124 entre la placa de apoyo y la disposicion de visualizacion. El dispositivo ademas incluye estructuras de refuerzo que se integran con la placa de apoyo. Las estructuras de refuerzo agregan rigidez a la placa de apoyo. La placa de apoyo puede tener un espesor que varia a lo largo de un borde de la misma.
MXPA05009409A 2004-09-27 2005-09-02 Sistema y metodo para proteger una disposicion de sistemas microelectromecanicos utilizando placa de apoyo estructuralmente reforzada. MXPA05009409A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61340804P 2004-09-27 2004-09-27
US11/090,774 US7405924B2 (en) 2004-09-27 2005-03-25 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate

Publications (1)

Publication Number Publication Date
MXPA05009409A true MXPA05009409A (es) 2006-03-29

Family

ID=35482168

Family Applications (1)

Application Number Title Priority Date Filing Date
MXPA05009409A MXPA05009409A (es) 2004-09-27 2005-09-02 Sistema y metodo para proteger una disposicion de sistemas microelectromecanicos utilizando placa de apoyo estructuralmente reforzada.

Country Status (11)

Country Link
US (1) US7405924B2 (es)
EP (1) EP1640329A3 (es)
JP (1) JP2006099069A (es)
KR (1) KR20060092877A (es)
AU (1) AU2005203430A1 (es)
BR (1) BRPI0503937A (es)
CA (1) CA2516638A1 (es)
MX (1) MXPA05009409A (es)
RU (1) RU2005129845A (es)
SG (1) SG121062A1 (es)
TW (1) TW200618214A (es)

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CA2516638A1 (en) 2006-03-27
EP1640329A3 (en) 2007-12-05
US7405924B2 (en) 2008-07-29
JP2006099069A (ja) 2006-04-13
RU2005129845A (ru) 2007-04-10
US20060076648A1 (en) 2006-04-13
SG121062A1 (en) 2006-04-26
AU2005203430A1 (en) 2006-04-13
BRPI0503937A (pt) 2006-05-09
EP1640329A2 (en) 2006-03-29

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