SG140556A1 - Integrated circuit system having strained transistor - Google Patents

Integrated circuit system having strained transistor

Info

Publication number
SG140556A1
SG140556A1 SG200706053-6A SG2007060536A SG140556A1 SG 140556 A1 SG140556 A1 SG 140556A1 SG 2007060536 A SG2007060536 A SG 2007060536A SG 140556 A1 SG140556 A1 SG 140556A1
Authority
SG
Singapore
Prior art keywords
integrated circuit
circuit system
strained transistor
wafer
formation layer
Prior art date
Application number
SG200706053-6A
Inventor
Teh Young Way
Johnny Widodo
Michael P Belyansky
Park Jae Eun
Original Assignee
Chartered Semiconductor Mfg
Ibm
Samsung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chartered Semiconductor Mfg, Ibm, Samsung filed Critical Chartered Semiconductor Mfg
Publication of SG140556A1 publication Critical patent/SG140556A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823864—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate sidewall spacers, e.g. double spacers, particular spacer material or shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
    • H01L29/7843—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being an applied insulating layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)

Abstract

INTEGRATED CIRCUIT SYSTEM HAVING STRAINED TRANSISTOR An integrated circuit system is provided including forming a circuit element on a wafer, forming a stress formation layer on the wafer, protecting a portion of the stress formation layer, and irradiating the wafer for modification of a stress value of an unprotected portion of the stress formation layer.
SG200706053-6A 2006-08-19 2007-08-17 Integrated circuit system having strained transistor SG140556A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/465,799 US20080044967A1 (en) 2006-08-19 2006-08-19 Integrated circuit system having strained transistor

Publications (1)

Publication Number Publication Date
SG140556A1 true SG140556A1 (en) 2008-03-28

Family

ID=39101853

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200706053-6A SG140556A1 (en) 2006-08-19 2007-08-17 Integrated circuit system having strained transistor

Country Status (2)

Country Link
US (1) US20080044967A1 (en)
SG (1) SG140556A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7790540B2 (en) * 2006-08-25 2010-09-07 International Business Machines Corporation Structure and method to use low k stress liner to reduce parasitic capacitance
US7629273B2 (en) * 2006-09-19 2009-12-08 Taiwan Semiconductor Manufacturing Company, Ltd. Method for modulating stresses of a contact etch stop layer
US8274115B2 (en) * 2008-03-19 2012-09-25 Globalfoundries Singapore Pte. Ltd. Hybrid orientation substrate with stress layer
US20090289280A1 (en) * 2008-05-22 2009-11-26 Da Zhang Method for Making Transistors and the Device Thereof
US8999863B2 (en) * 2008-06-05 2015-04-07 Globalfoundries Singapore Pte. Ltd. Stress liner for stress engineering
DE102009039420A1 (en) * 2009-08-31 2011-03-03 GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG Strain adjustment in strained dielectric materials of semiconductor devices by stress relaxation based on radiation
DE102009039521B4 (en) * 2009-08-31 2018-02-15 Globalfoundries Dresden Module One Llc & Co. Kg Improved filling conditions in an exchange gate process using a tensioned topcoat
CN102024760B (en) * 2009-09-18 2012-10-31 中芯国际集成电路制造(上海)有限公司 Method for manufacturing semiconductor device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6803270B2 (en) * 2003-02-21 2004-10-12 International Business Machines Corporation CMOS performance enhancement using localized voids and extended defects
US6882025B2 (en) * 2003-04-25 2005-04-19 Taiwan Semiconductor Manufacturing Company, Ltd. Strained-channel transistor and methods of manufacture
US6881635B1 (en) * 2004-03-23 2005-04-19 International Business Machines Corporation Strained silicon NMOS devices with embedded source/drain
US7053400B2 (en) * 2004-05-05 2006-05-30 Advanced Micro Devices, Inc. Semiconductor device based on Si-Ge with high stress liner for enhanced channel carrier mobility
DE102004026149B4 (en) * 2004-05-28 2008-06-26 Advanced Micro Devices, Inc., Sunnyvale A method of producing a semiconductor device having transistor elements with voltage-inducing etch stop layers
US20060105106A1 (en) * 2004-11-16 2006-05-18 Applied Materials, Inc. Tensile and compressive stressed materials for semiconductors
US7442597B2 (en) * 2005-02-02 2008-10-28 Texas Instruments Incorporated Systems and methods that selectively modify liner induced stress

Also Published As

Publication number Publication date
US20080044967A1 (en) 2008-02-21

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