BRPI0503937A - sistema e método para proteger matriz de sistemas micro eletromecánicos usando placa posterior estruturalmente reforçada - Google Patents

sistema e método para proteger matriz de sistemas micro eletromecánicos usando placa posterior estruturalmente reforçada

Info

Publication number
BRPI0503937A
BRPI0503937A BRPI0503937-1A BRPI0503937A BRPI0503937A BR PI0503937 A BRPI0503937 A BR PI0503937A BR PI0503937 A BRPI0503937 A BR PI0503937A BR PI0503937 A BRPI0503937 A BR PI0503937A
Authority
BR
Brazil
Prior art keywords
back plate
electromechanical systems
micro electromechanical
structurally reinforced
display matrix
Prior art date
Application number
BRPI0503937-1A
Other languages
English (en)
Inventor
Brian J Gally
Lauren Palmateer
William J Cummings
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of BRPI0503937A publication Critical patent/BRPI0503937A/pt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0058—Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0163—Reinforcing a cap, e.g. with ribs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

"SISTEMA E MéTODO PARA PROTEGER MATRIZ DE SISTEMAS MICRO ELETROMECáNICOS USANDO PLACA POSTERIOR ESTRUTURALMENTE REFORçADA". é revelado um dispositivo eletrónico que utiliza modulação interferométrica e uma embalagem do dispositivo. O dispositivo embalado inclui um substrato 101, uma matriz de display de modulação interferométrica 111 formada sobre o substrato 101 e uma placa posterior 130. A placa posterior é posicionada sobre a matriz de display 111 com um intervalo 124 entre a placa posterior e a matriz de display. O dispositivo inclui também estruturas de reforço que estão integradas com a placa posterior. As estruturas de reforço adicionam rigidez à placa posterior. A placa posterior pode possuir uma espessura que varia ao longo de uma borda da mesma.
BRPI0503937-1A 2004-09-27 2005-09-23 sistema e método para proteger matriz de sistemas micro eletromecánicos usando placa posterior estruturalmente reforçada BRPI0503937A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61340804P 2004-09-27 2004-09-27
US11/090,774 US7405924B2 (en) 2004-09-27 2005-03-25 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate

Publications (1)

Publication Number Publication Date
BRPI0503937A true BRPI0503937A (pt) 2006-05-09

Family

ID=35482168

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0503937-1A BRPI0503937A (pt) 2004-09-27 2005-09-23 sistema e método para proteger matriz de sistemas micro eletromecánicos usando placa posterior estruturalmente reforçada

Country Status (11)

Country Link
US (1) US7405924B2 (pt)
EP (1) EP1640329A3 (pt)
JP (1) JP2006099069A (pt)
KR (1) KR20060092877A (pt)
AU (1) AU2005203430A1 (pt)
BR (1) BRPI0503937A (pt)
CA (1) CA2516638A1 (pt)
MX (1) MXPA05009409A (pt)
RU (1) RU2005129845A (pt)
SG (1) SG121062A1 (pt)
TW (1) TW200618214A (pt)

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US20060076648A1 (en) 2006-04-13
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EP1640329A3 (en) 2007-12-05
MXPA05009409A (es) 2006-03-29
JP2006099069A (ja) 2006-04-13
AU2005203430A1 (en) 2006-04-13
KR20060092877A (ko) 2006-08-23
RU2005129845A (ru) 2007-04-10
SG121062A1 (en) 2006-04-26
TW200618214A (en) 2006-06-01
CA2516638A1 (en) 2006-03-27

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