MX360285B - Separacion de maquina de recubrimiento modular. - Google Patents

Separacion de maquina de recubrimiento modular.

Info

Publication number
MX360285B
MX360285B MX2013004489A MX2013004489A MX360285B MX 360285 B MX360285 B MX 360285B MX 2013004489 A MX2013004489 A MX 2013004489A MX 2013004489 A MX2013004489 A MX 2013004489A MX 360285 B MX360285 B MX 360285B
Authority
MX
Mexico
Prior art keywords
coating machine
separation
deposition
glass substrate
modular coating
Prior art date
Application number
MX2013004489A
Other languages
English (en)
Other versions
MX2013004489A (es
Inventor
Lecomte Benoit
Wiame Hugues
Yonemichi Tomohiro
Original Assignee
Agc Glass Europe
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=43664901&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=MX360285(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Agc Glass Europe filed Critical Agc Glass Europe
Publication of MX2013004489A publication Critical patent/MX2013004489A/es
Publication of MX360285B publication Critical patent/MX360285B/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

La invención se refiere a un procedimiento para depositar al vacío una pila de recubrimiento de múltiples capas sobre un sustrato de vidrio plano y a una máquina de recubrimiento modular para el depósito de capas delgadas sobre un sustrato de vidrio plano. Una zona de separación de gas dispuesta entre dos zonas de deposición de la máquina de recubrimiento modular comprende por lo menos un inyector de gas en las proximidades de la trayectoria de transporte para el sustrato de vidrio que pasa a través de unas aberturas desde una zona de deposición hacia la otra zona de deposición a través de la zona de separación. La invención permite la mejora del factor de separación entre las dos zonas de deposición.
MX2013004489A 2010-10-22 2011-10-18 Separacion de maquina de recubrimiento modular. MX360285B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP10188560 2010-10-22
PCT/EP2011/068176 WO2012052428A1 (en) 2010-10-22 2011-10-18 Modular coater separation

Publications (2)

Publication Number Publication Date
MX2013004489A MX2013004489A (es) 2013-09-13
MX360285B true MX360285B (es) 2018-10-26

Family

ID=43664901

Family Applications (2)

Application Number Title Priority Date Filing Date
MX2018007835A MX366096B (es) 2010-10-22 2011-10-18 Separacion de maquina de recubrimiento modular.
MX2013004489A MX360285B (es) 2010-10-22 2011-10-18 Separacion de maquina de recubrimiento modular.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
MX2018007835A MX366096B (es) 2010-10-22 2011-10-18 Separacion de maquina de recubrimiento modular.

Country Status (15)

Country Link
US (1) US9938617B2 (es)
EP (1) EP2630271B2 (es)
JP (1) JP5984820B2 (es)
KR (1) KR101926884B1 (es)
CN (1) CN103237919B (es)
BR (1) BR112013009629B1 (es)
EA (1) EA025781B1 (es)
ES (1) ES2872339T3 (es)
MX (2) MX366096B (es)
MY (1) MY164208A (es)
PH (1) PH12013500754B1 (es)
PL (1) PL2630271T3 (es)
UA (1) UA112300C2 (es)
WO (1) WO2012052428A1 (es)
ZA (1) ZA201303646B (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2013739B1 (en) * 2014-11-04 2016-10-04 Asm Int Nv Atomic layer deposition apparatus and method for processing substrates using an apparatus.
DE102014116700B4 (de) * 2014-11-14 2016-09-22 Von Ardenne Gmbh Kammerdeckel und Vakuumkammeranordnung
WO2016075189A1 (de) * 2014-11-14 2016-05-19 Von Ardenne Gmbh Kammerdeckel zum abdichten einer kammeröffnung in einer gasseparationskammer und gasseparationskammer
FR3034434B1 (fr) 2015-03-31 2021-10-22 Coating Plasma Ind Installation pour le traitement d'objets par plasma, et procede de mise en oeuvre de cette installation
WO2017140384A1 (en) * 2016-02-19 2017-08-24 Applied Materials, Inc. Method of examining a gas separation quality of a gas separation passage in a vacuum chamber, and vacuum processing apparatus
CN207483840U (zh) * 2017-11-21 2018-06-12 北京铂阳顶荣光伏科技有限公司 板材镀膜设备
CN109206020B (zh) * 2018-10-19 2021-07-27 布勒莱宝光学设备（北京）有限公司 红外截止膜及其生产方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IN161171B (es) 1982-09-16 1987-10-10 Energy Conversion Devices Inc
JPS62202078A (ja) * 1986-03-03 1987-09-05 Seiko Epson Corp スパツタ装置
US5324360A (en) 1991-05-21 1994-06-28 Canon Kabushiki Kaisha Method for producing non-monocrystalline semiconductor device and apparatus therefor
DE4303462C2 (de) * 1992-03-30 1994-03-31 Leybold Ag Mehrkammerbeschichtungsanlage
DE4313284A1 (de) † 1993-04-23 1994-10-27 Leybold Ag Spaltschleuse für das Ein- oder Ausbringen von Substraten von der einen in eine benachbarte Behandlungskammer
JP3349953B2 (ja) * 1998-05-25 2002-11-25 シャープ株式会社 基板処理装置
JP2001023907A (ja) * 1999-07-07 2001-01-26 Mitsubishi Heavy Ind Ltd 成膜装置
JP4316767B2 (ja) † 2000-03-22 2009-08-19 株式会社半導体エネルギー研究所 基板処理装置
US6336999B1 (en) * 2000-10-11 2002-01-08 Centre Luxembourgeois De Recherches Pour Le Verre Et Al Ceramique S.A. (C.R.V.C.) Apparatus for sputter-coating glass and corresponding method
US20040058293A1 (en) † 2002-08-06 2004-03-25 Tue Nguyen Assembly line processing system
DE10352144B8 (de) * 2003-11-04 2008-11-13 Von Ardenne Anlagentechnik Gmbh Vakuumbeschichtungsanlage zum Beschichten von längserstreckten Substraten
DE102004021734B4 (de) * 2004-04-30 2010-09-02 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur kontinuierlichen Beschichtung flacher Substrate mit optisch aktiven Schichtsystemen
US20070256934A1 (en) * 2006-05-08 2007-11-08 Perata Michael R Apparatus and Method for Coating Substrates With Approximate Process Isolation
DE102007058052B4 (de) * 2007-11-30 2013-12-05 Von Ardenne Anlagentechnik Gmbh Vakuumbeschichtungsanlage
DE102008019427A1 (de) * 2008-04-17 2009-10-29 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Diffusionsbehandlung von Werkstücken
US20100206229A1 (en) 2008-05-30 2010-08-19 Alta Devices, Inc. Vapor deposition reactor system
WO2009155119A2 (en) 2008-05-30 2009-12-23 Alta Devices, Inc. Methods and apparatus for a chemical vapor deposition reactor
JP2010077508A (ja) 2008-09-26 2010-04-08 Tokyo Electron Ltd 成膜装置及び基板処理装置
FI122880B (fi) 2009-02-09 2012-08-15 Beneq Oy Sulkujärjestely, tuotantolinja ja menetelmä
DE102009029902A1 (de) 2009-02-25 2010-09-02 Von Ardenne Anlagentechnik Gmbh Vakuumbeschichtungsanlage mit zwei oder mehr Vakuumkammern und Verfahren zur Behandlung von Substraten in der Anlage
US8118982B2 (en) * 2009-03-06 2012-02-21 Applied Materials, Inc. Gas flow set-up for multiple, interacting reactive sputter sources
US8117987B2 (en) 2009-09-18 2012-02-21 Applied Materials, Inc. Hot wire chemical vapor deposition (CVD) inline coating tool
CN102869810A (zh) 2010-02-03 2013-01-09 美国迅力光能公司 一种隔离腔室及使用该种隔离腔室制备太阳电池材料的方法

Also Published As

Publication number Publication date
BR112013009629A2 (pt) 2016-07-12
CN103237919B (zh) 2016-11-09
MY164208A (en) 2017-11-30
PL2630271T3 (pl) 2021-11-02
CN103237919A (zh) 2013-08-07
JP2013545891A (ja) 2013-12-26
ZA201303646B (en) 2014-04-30
WO2012052428A1 (en) 2012-04-26
PH12013500754A1 (en) 2013-06-10
UA112300C2 (uk) 2016-08-25
KR20130132814A (ko) 2013-12-05
US20130337193A1 (en) 2013-12-19
BR112013009629B1 (pt) 2020-11-17
EP2630271B2 (en) 2026-04-22
EP2630271A1 (en) 2013-08-28
EA025781B1 (ru) 2017-01-30
JP5984820B2 (ja) 2016-09-06
EA201390594A1 (ru) 2013-08-30
ES2872339T3 (es) 2021-11-02
US9938617B2 (en) 2018-04-10
MX2013004489A (es) 2013-09-13
EP2630271B1 (en) 2021-03-24
MX366096B (es) 2019-06-27
PH12013500754B1 (en) 2018-10-05
KR101926884B1 (ko) 2018-12-07

Similar Documents

Publication Publication Date Title
MX366096B (es) Separacion de maquina de recubrimiento modular.
MX356930B (es) Compensador de grosor de tejido que comprende una pluralidad de materiales.
BR112013032527B8 (pt) filme de barreira de polímero em multicamadas simultaneamente biaxialmente orientado, filme biaxialmente orientado revestido, material de acondicionamento laminado, recipiente de acondicionamento, e, método para fabricação de um filme de barreira de polímero em multicamadas biaxialmente orientado
EP2644113A3 (en) Tissue thickness compensator comprised of a plurality of materials
RU2013153395A (ru) Пуленепробиваемая панель
MY165547A (en) Multilayer, heat-shrinkeable film comprising a plurality of microlayers and method for its fabrication
CL2009000427A1 (es) Embalaje secundario, que comprende una pluralidad de envases primarios individuales, con una envoltura que los agrupa, donde al menos dos envases primarios individuales adyacentes dentro de la envoltura comprenden mecanismos de fijación; método para mejorar la estabilidad de los embalajes secundarios; pallet.
MX2016002703A (es) Metodo para fabricar un material que incluye un sustrato que tiene una capa funcional a base de oxido de estaño e indio.
MX345686B (es) Papel de boquilla para un artículo de fumar.
MX355663B (es) Material para caja de cartón, preforma, o sustrato.
MX2010012731A (es) Cubierta de empaque blister ranurada con laser dual.
AR106662A1 (es) Método para la fabricación de una capa no opaca para una estructura multicapa que comprende una ventana, y una multicapa con dicha capa no opaca
AR087632A1 (es) Capas de oxido de silicio depositado por incidencia oblicua para lentes oftalmicas dinamicas
MX2009004367A (es) Pelicula de estiramiento de multicapa pre-estirada.
WO2014066455A3 (en) Flexible multilayer hermetic laminate
BR112012023478A2 (pt) método para proporcionar um substrato com uma barreira e um substrato que compreende uma barreira.
WO2011124205A3 (de) Verpackung für metall-keramik-substrate sowie verfahren zum verpacken solcher substrate
CO2021007275A2 (es) Película de barrera y sus implementaciones
WO2012021884A3 (en) Photovoltaic device
SG11201906260QA (en) Laminate, blister pack, press-through package, and laminate manufacturing method
WO2008093726A1 (ja) 蒸着装置、蒸着方法および蒸着装置の製造方法
BR112015004046A2 (pt) película em multicamada e artigo
FI20115764A0 (fi) Etikettilaminaatti sekä menetelmä ja järjestelmä etikettilaminaatin valmistamiseksi
EP4189736A4 (en) MULTI-LAYER SEMICONDUCTOR PACKAGE WITH STACKED PASSIVE COMPONENTS
ES2415773R1 (es) Metodo de fabricacion de piezas de material compuesto con cambios de espesor

Legal Events

Date Code Title Description
FG Grant or registration