MX2015008589A - Produccion de un objeto voluminoso mediante litografia, con resolucion espacial mejorada. - Google Patents

Produccion de un objeto voluminoso mediante litografia, con resolucion espacial mejorada.

Info

Publication number
MX2015008589A
MX2015008589A MX2015008589A MX2015008589A MX2015008589A MX 2015008589 A MX2015008589 A MX 2015008589A MX 2015008589 A MX2015008589 A MX 2015008589A MX 2015008589 A MX2015008589 A MX 2015008589A MX 2015008589 A MX2015008589 A MX 2015008589A
Authority
MX
Mexico
Prior art keywords
illuminated
plane
lithography
production
spatial resolution
Prior art date
Application number
MX2015008589A
Other languages
English (en)
Inventor
André-Luc Allanic
Original Assignee
Prodways
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prodways filed Critical Prodways
Publication of MX2015008589A publication Critical patent/MX2015008589A/es

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0037—Production of three-dimensional images
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/22—Exposing sequentially with the same light pattern different positions of the same surface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

La presente invención se relaciona con un método para producir un objeto voluminoso mediante litografía, que comprende una proyección de la imagen en proyección en un plano que se va a iluminar (9) de la capa de material, que involucra: - mover la máscara (3) en un movimiento que tiene un componente (15) a lo largo de un eje oblicuo (16) que forma un ángulo (17) con el plano que se va a iluminar (9), y - transformar un movimiento de la máscara (3) con un componente (15) a lo largo del eje oblicuo (16) que forma el ángulo (17) con el plano que se va a iluminar (9) en un desplazamiento de la imagen en proyección (5) en el plano que va a ser iluminado (9) a lo largo de la primera dirección (10) del desplazamiento contenido en el plano que va a ser iluminado (9) por medio de un espejo (6) que refleja la imagen en proyección (5) que viene de la máscara (3) hacia el plano que va a ser iluminado (9).
MX2015008589A 2013-01-09 2014-01-09 Produccion de un objeto voluminoso mediante litografia, con resolucion espacial mejorada. MX2015008589A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1350177A FR3000698B1 (fr) 2013-01-09 2013-01-09 Fabrication d'un objet en volume par lithographie, a resolution spatiale amelioree
PCT/EP2014/050326 WO2014108473A1 (fr) 2013-01-09 2014-01-09 Fabrication d'un objet en volume par lithographie, a resolution spatiale amelioree

Publications (1)

Publication Number Publication Date
MX2015008589A true MX2015008589A (es) 2016-01-15

Family

ID=47833292

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015008589A MX2015008589A (es) 2013-01-09 2014-01-09 Produccion de un objeto voluminoso mediante litografia, con resolucion espacial mejorada.

Country Status (13)

Country Link
US (1) US9632420B2 (es)
EP (1) EP2943329B1 (es)
KR (1) KR102217967B1 (es)
CN (1) CN104981339B (es)
BR (1) BR112015016385A2 (es)
CA (1) CA2897119A1 (es)
EA (1) EA030782B1 (es)
FR (1) FR3000698B1 (es)
HK (1) HK1211540A1 (es)
IL (1) IL239835A0 (es)
MX (1) MX2015008589A (es)
SG (1) SG11201505400VA (es)
WO (1) WO2014108473A1 (es)

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US10792868B2 (en) 2015-09-09 2020-10-06 Carbon, Inc. Method and apparatus for three-dimensional fabrication
US10151960B2 (en) 2015-09-25 2018-12-11 Microsoft Technology Licensing, Llc Backlight assembly with tunable grating layer for local dimming
US10543645B2 (en) * 2017-09-15 2020-01-28 The Boeing Company Feedstock lines for additive manufacturing of an object
US11351724B2 (en) 2017-10-03 2022-06-07 General Electric Company Selective sintering additive manufacturing method
US11420384B2 (en) 2017-10-03 2022-08-23 General Electric Company Selective curing additive manufacturing method
US11254052B2 (en) 2017-11-02 2022-02-22 General Electric Company Vatless additive manufacturing apparatus and method
US11590691B2 (en) 2017-11-02 2023-02-28 General Electric Company Plate-based additive manufacturing apparatus and method
US20190129308A1 (en) 2017-11-02 2019-05-02 Taiwan Green Point Enterprises Co., Ltd. Digital masking system, pattern imaging apparatus and digital masking method
US10821669B2 (en) 2018-01-26 2020-11-03 General Electric Company Method for producing a component layer-by-layer
US10821668B2 (en) 2018-01-26 2020-11-03 General Electric Company Method for producing a component layer-by- layer
US11794412B2 (en) 2019-02-20 2023-10-24 General Electric Company Method and apparatus for layer thickness control in additive manufacturing
US11498283B2 (en) 2019-02-20 2022-11-15 General Electric Company Method and apparatus for build thickness control in additive manufacturing
JP7161628B2 (ja) 2019-02-28 2022-10-26 スリーディー システムズ インコーポレーテッド 高解像度三次元プリントシステム
US11179891B2 (en) 2019-03-15 2021-11-23 General Electric Company Method and apparatus for additive manufacturing with shared components
US11951679B2 (en) 2021-06-16 2024-04-09 General Electric Company Additive manufacturing system
US11731367B2 (en) 2021-06-23 2023-08-22 General Electric Company Drive system for additive manufacturing
US11958250B2 (en) 2021-06-24 2024-04-16 General Electric Company Reclamation system for additive manufacturing
US11958249B2 (en) 2021-06-24 2024-04-16 General Electric Company Reclamation system for additive manufacturing
US11826950B2 (en) 2021-07-09 2023-11-28 General Electric Company Resin management system for additive manufacturing
US11813799B2 (en) 2021-09-01 2023-11-14 General Electric Company Control systems and methods for additive manufacturing

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US5133987A (en) * 1989-10-27 1992-07-28 3D Systems, Inc. Stereolithographic apparatus and method
JPH04305438A (ja) * 1991-04-02 1992-10-28 Sanyo Electric Co Ltd 光学的立体造形方法
US5247180A (en) 1991-12-30 1993-09-21 Texas Instruments Incorporated Stereolithographic apparatus and method of use
WO1995015841A1 (fr) * 1992-06-05 1995-06-15 Finab Limited Machine de fabrication d'objets par photopolymerisation selective de liquides ou poudres par couches
JPH07290578A (ja) * 1994-04-26 1995-11-07 Japan Synthetic Rubber Co Ltd 光造形装置
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Also Published As

Publication number Publication date
BR112015016385A2 (pt) 2017-07-11
IL239835A0 (en) 2015-08-31
US9632420B2 (en) 2017-04-25
CN104981339B (zh) 2017-10-27
KR102217967B1 (ko) 2021-02-19
EP2943329B1 (fr) 2018-05-16
FR3000698A1 (fr) 2014-07-11
CN104981339A (zh) 2015-10-14
HK1211540A1 (en) 2016-05-27
EA201591209A1 (ru) 2015-12-30
EP2943329A1 (fr) 2015-11-18
US20150355553A1 (en) 2015-12-10
SG11201505400VA (en) 2015-08-28
KR20150118105A (ko) 2015-10-21
FR3000698B1 (fr) 2015-02-06
EA030782B1 (ru) 2018-09-28
CA2897119A1 (fr) 2014-07-17
WO2014108473A1 (fr) 2014-07-17

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