KR970060354A - 위치조정방법 및 장치 - Google Patents

위치조정방법 및 장치 Download PDF

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Publication number
KR970060354A
KR970060354A KR1019960082557A KR19960082557A KR970060354A KR 970060354 A KR970060354 A KR 970060354A KR 1019960082557 A KR1019960082557 A KR 1019960082557A KR 19960082557 A KR19960082557 A KR 19960082557A KR 970060354 A KR970060354 A KR 970060354A
Authority
KR
South Korea
Prior art keywords
mark
substrate
mask
reference mark
alignment system
Prior art date
Application number
KR1019960082557A
Other languages
English (en)
Korean (ko)
Inventor
마사히로 네이
Original Assignee
고노 시게오
니콘 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고노 시게오, 니콘 코포레이션 filed Critical 고노 시게오
Publication of KR970060354A publication Critical patent/KR970060354A/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7046—Strategy, e.g. mark, sensor or wavelength selection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7065—Production of alignment light, e.g. light source, control of coherence, polarization, pulse length, wavelength
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
KR1019960082557A 1996-01-30 1996-12-31 위치조정방법 및 장치 KR970060354A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13624/1996 1996-01-30
JP8013624A JPH09213601A (ja) 1996-01-30 1996-01-30 露光方法及び装置

Publications (1)

Publication Number Publication Date
KR970060354A true KR970060354A (ko) 1997-08-12

Family

ID=11838396

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960082557A KR970060354A (ko) 1996-01-30 1996-12-31 위치조정방법 및 장치

Country Status (2)

Country Link
JP (1) JPH09213601A (ja)
KR (1) KR970060354A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005010207A (ja) 2003-06-16 2005-01-13 Olympus Corp 手振れ補正装置

Also Published As

Publication number Publication date
JPH09213601A (ja) 1997-08-15

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